Angular velocity acquisition device

#This application is based upon and claims the benefit of priority from Japanese Patent Application No. 2016-130106, filed Jun. 30, 2016, the entire contents of which are incorporated herein by reference.

#Embodiments described herein relate generally to an angular velocity acquisition device.

#Known gyro sensors which detect the angular velocity using the Coriolis force that acts on an object that is vibrating in a rotation system include the one produced by using micro electro mechanical systems (MEMS) technology. The MEMS technology may involve variation in processing, which may impair a normal operation of the gyro sensor.

#FIG. 1 is a schematic plan view of a MEMS portion of an angular velocity acquisition device according to an embodiment.

#FIG. 2 is an enlarged schematic plan view of a portion A illustrated in FIG. 1.

#FIG. 3 is a schematic plan view illustrating a hold state of a movable body illustrated in FIG. 2.

#Embodiments provide an angular velocity acquisition device whose operation is hardly affected by any variation in processing thereof.

#In general, according to one embodiment, an angular velocity acquisition device includes a movable body that vibrates in a first direction and in a second direction that is based on Coriolis force and includes a movable electrode portion extending in the second direction, a hold electrode that extends in the second direction and includes a fixed electrode portion opposite to the movable electrode portion across a gap, and a stopper that is provided between the fixed electrode portion and the movable electrode portion and includes an end portion closer to the movable electrode portion than a surface of the fixed electrode portion facing the movable electrode portion.

#Hereinafter, example embodiments will be described with reference to the drawings. Furthermore, the same portions are assigned the respective same reference characters over all the figures.