US 10,330,467 B2Granted

Precision locating rotary stage

AssigneeVirtek Vision International Ulc

InventorKurt D. Rueb

Life of this patent

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Abstract

A rotary stage assembly includes a platform and a rotary drive defining an axis of rotation. The platform is mounted on a spindle for receiving rotary movement from the rotary drive. A cylindrical wall is attached to the platform receiving rotary movement from the rotary drive and is coaxial with the axis of rotation defined by the rotary drive. The cylindrical wall defines an inner surface including reference patterns. An imaging assembly images the reference patterns on the inner surface of the cylindrical wall. The imaging assembly detects angular orientation and tilt of the platform from an axis of rotation of the platform from imaging the reference patterns on the inner surface of the cylindrical wall. A controller calculates angular orientation and tilt of the platform from the location of said reference patterns signaled from the imaging assembly.

Claims11

Dependent claims

A rotary stage assembly;

comprising:
a platform and a rotary drive defining an axis of rotation with a spindle, said platform being mounted on said spindle for receiving rotary movement from said rotary drive;
a cylindrical wall fixedly attached to said platform receiving rotary movement with said platform from said rotary drive and being coaxial with said axis of rotation defined by said rotary drive, said cylindrical wall defining an inner surface including reference patterns;
an imaging assembly for imaging said reference patterns disposed upon said inner surface of said cylindrical wall;
said imaging assembly being adapted for detecting angular orientation and tilt of said platform from an axis of rotation of said platform by imaging said reference patterns disposed upon said inner surface of said cylindrical wall;
and
a controller for calculating angular orientation and tilt of said platform from said axis of rotation from a location of said reference patterns signaled from said imaging assembly to said controller.

4 more elements

Dependencies are inferred from the claim text.

Facts

Application: 15/609,778Filed 31 May 2017 · us provisional application
Priority: 1 Jun 2016
Published: US 2017/0350694 A17 Dec 2017
Granted: 25 Jun 2019
Term ends: Not estimatedThe source records don’t support an estimate.

Classification8 codes

G01B 11/26
Measuring arrangements characterised by the use of optical techniques: for measuring angles or tapers; for testing the alignment of axes
F16M 11/08
Allowing pivoting: around a vertical axis , e.g. panoramic heads
F16M 11/126
In more than one direction: for tilting and panning
F16M 11/18
Heads: with mechanism for moving the apparatus relatively to the stand