Calibration of an interferometer
AssigneeHaag-Streit AG
InventorsLucio Robledo, Pascal Kesselring
Life of this patent
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Abstract
In a method for calibrating an interferometer (100) having a beam path for a measuring beam (112), wherein at least one plane (320) that at least partially reflects the measuring beam (112) has been introduced into the beam path, and wherein a normal to a first plane (320) is inclined at a first angle to a measuring beam (112) incident on the first plane (320), the following steps are carried out: interferometric measurement of a first axial spacing of a first point on the first plane (320) with the measuring beam (112), and interferometric measurement of a second axial spacing of a second point on one of the at least one plane (320) with the measuring beam (112), wherein the second point is spaced apart from the first point.
Claims9
A method for calibrating an interferometer having a beam path for a measuring beam, wherein at least one plane that at least partially reflects the measuring beam has been introduced into the beam path, and wherein a normal to a first plane is inclined at a first angle to a measuring beam incident on the first plane and wherein the following steps are carried out:
- a. interferometric measurement of a first axial spacing of a first point on the first plane with the measuring beam;
- b. interferometric measurement of a second axial spacing of a second point on one of the at least one plane with the measuring beam, wherein the second point is spaced apart from the first point.
Dependencies are inferred from the claim text.