Effusion cells, deposition systems including effusion cells, and related methods

An effusion cell, comprising:

• a crucible configured to contain therein a material to be evaporated or sublimated within the effusion cell;
• a delivery tube configured to deliver evaporated or sublimated material originating from the crucible out from the effusion cell and into a deposition chamber;
• a supply tube extending from and physically coupled to the crucible at a first end thereof, the supply tube located and configured to trap condensate originating from the evaporated or sublimated material and to deliver the condensate back to the crucible;
• at least one heating element located and configured to heat material contained in the crucible so as to cause evaporation or sublimation of the material in the crucible and flow of the evaporated or sublimated material through the delivery tube and out from the effusion cell;
• a load lock device including an access port and a vacuum pump;
• and
• a thermal isolator between the load lock device and the supply tube;
• wherein the effusion cell is configured such that the supply tube and the crucible can be filled with the material to be evaporated or sublimated without removing the effusion cell from the deposition chamber and while maintaining the effusion cell under vacuum;
• wherein the effusion cell is enclosed within a vacuum housing;
• and
• wherein a second end of the supply tube opposite the first end is open to the vacuum housing thereabout through the thermal isolator.