Protecting an interior of a hollow body with an ALD coating
AssigneePicosun Oy
InventorsJuhana Kostamo, Timo Malinen, Väino Sammelselg, Jaan Aarik, Lauri Aarik
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Abstract
An apparatus and method for protecting an interior of a hollow body, where an inlet and exhaust manifold include a port assembly attachable to an opening of the hollow body is provided. The interior of the hollow body is exposed to sequential self-saturating surface reactions by sequential inlet of reactive gases via the port assembly and the opening into the interior of the hollow body, and excess gases is pumped via the opening and the port assembly out from the hollow body.
Claims15
A method of protecting an interior of a hollow body, the method comprising:
- providing an inlet and exhaust manifold comprising a port assembly attachable to an opening of the hollow body;
- exposing the interior of the hollow body to sequential self-saturating surface reactions by sequential inlet of reactive gases via said port assembly and said opening into the interior of the hollow body;
- removing excess gases via said opening and said port assembly out from the hollow body;
- guiding inactive purge gas into an intermediate space between the hollow body and a surrounding chamber wall;
- and
- pumping said inactive purge gas out from the intermediate space.
An apparatus for protecting an interior of a hollow body, comprising:
- an inlet and exhaust manifold comprising a port assembly attachable to an opening of the hollow body, the apparatus being configured to expose the interior of the hollow body to sequential self-saturating surface reactions by sequential inlet of reactive gases via said port assembly and said opening into the interior of the hollow body;
- a pump configured to remove excess gases via said opening and said port assembly out from the hollow body;
- and
- a chamber surrounding the hollow body and an inactive gas in-feed line configured to guide inactive purge gas into an intermediate space between the hollow body and a surrounding chamber wall.
Dependencies are inferred from the claim text.