Method for laser deposition of organic material film or organic-inorganic composite material film, and laser deposition apparatus

A production method for an organic-inorganic composite perovskite film by film formation of the organic-inorganic composite perovskite on a substrate, comprising:

• irradiating an organic material with a laser beam to evaporate the organic material and irradiating an inorganic material with a laser beam and thereby evaporating the inorganic material, and codepositing the organic material and the inorganic material with the substrate and thereby film forming the organic-inorganic composite perovskite on the substrate;
• wherein
• the organic material is a halide of an organic cation and the organic material has molecular weight of about 200 or less;
• the inorganic material is MX2, where M is a divalent metal ion and X is at least one halogen selected from the group consisting of F, Cl, Br and I;
• the laser beam irradiated to the organic material is a pulsed laser beam with laser pulses having adjustable pulse widths and amplitudes, and a duty ratio of the pulsed laser beam changes during the codeposition;
• and
• the laser beam irradiated to the inorganic material is either a continuous-wave laser beam having an adjustable power or a pulsed laser beam having an adjustable duty ratio.