Compositions comprising silane modified metal oxides

A chemical mechanical polishing composition comprising at least one silane modified metal oxide, wherein the silane modified metal oxide comprises a metal oxide having attached at least one non-zwitterionic silyl group having the formula Si(X)n[(R″-HET)mL-(R—I)]3−n, wherein X, which can independently be the same or different, is —OH, a hydrolyzable substituent, a non-hydrolyzable substituent, or an oxygen-containing substituent having the formula —O-G- wherein G is a Si of a silicon-containing group or a surface metal atom of the metal oxide;

• R and R″ are independently a branched or unbranched alkylene, alkenylene, or alkynylene group or an arylene, heteroarylene, alkylarylene;
• or arylalkylene group;
• HET is a heteroatom group selected from O, S, NH, or NR′;
• L is a linking group;
• m is 0, 1, 2, 3, 4, 5, or 6;
• n is 0, 1, or 2;
• and
• a) when m=0, I is —NHSO3−M+ or —NR′SO3−M+,
• b) when m≥1 and HET is O then I is a —OSO3−M+, —SSO3−M+, —NHSO3−M+, —NR'SO3−M+, or —Q+A- group,
• c) when m≥1 and HET is NH or NR′ then I is a —OSO3-M+, —SSO3-M+, —NHSO3-M+, —NR'SO3-M+, or —Q+A- group, and
• d) when m≥1 and HET is S, then I is a —SO3−M+, —OSO3−M+, —SSO3−M+, —NHSO3−M+, —NR'SO3−M+, or —Q+A− group;
• wherein R′, which can be the same or different, is a branched or unbranched, substituted or unsubstituted alkyl, alkenyl or alkynyl group or a substituted or unsubstituted aryl, heteroaryl, alkylaryl;
• or arylalkyl group, Q+ is a heteroaromatic quaternary ammonium group, M+ is a cationic counterion, and A− is a anionic counterion.