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US 10,329,312 B2Granted
Lanthanum compound, method of synthesizing lanthanum compound, lanthanum precursor composition, method of forming thin film, and method of manufacturing integrated circuit device
AssigneesSamsung Electronics Co., Ltd., Adeka Corporation
InventorsGyu-hee Park, Youn-soo Kim, Jae-soon Lim, Youn-joung Cho, Haruyoshi Sato, Naoki Yamada, Hiroyuki Uchiuzou
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Abstract
A silicon-containing intermediate is synthesized by reacting a lanthanum tris[bis(trialkylsilyl)amide] complex with an alkylcyclopentadiene. A lanthanum compound is synthesized by reacting the silicon-containing intermediate with a dialkylamidine-based compound.
Claims16
A compound of the following Chemical Formula 1:
- wherein R1 is a C1-C4 linear or branched alkyl group, and each RX is independently a C1-C2 alkyl group.
A synthesis method, the method comprising:
- synthesizing a silicon-containing intermediate of Chemical Formula 1 by reacting a lanthanum tris[bis(trialkylsilyl)amide] complex with an alkylcyclopentadiene,
- wherein R1 is a C1-C4 linear or branched alkyl group, and each RX is independently a C1-C2 alkyl group;
- and
- synthesizing a lanthanum compound of Chemical Formula 2 by reacting the silicon-containing intermediate of Chemical Formula 1 with a dialkylamidine-based compound,
- wherein R1 is a C1-C4 linear or branched alkyl group, each of R2 and R3 is independently a C1-C4 linear or branched alkyl group, and R4 is hydrogen atom or a methyl group.
2 more elements
Dependencies are inferred from the claim text.