Substrate treatment method, computer storage medium and substrate treatment system

A substrate treatment method of treating a substrate using a block copolymer containing a hydrophilic polymer and a hydrophobic polymer, the substrate treatment method comprising:

• a neutral layer forming step of forming a neutral layer on the substrate;
• a coating film pattern forming step of forming a plurality of circular patterns of hydrophobic coating films at predetermined positions on the substrate after the neutral layer forming step, wherein the predetermined positions are based on a desired pattern which is a hexagonal close-packed structure in a plan view;
• a block copolymer coating step of applying the block copolymer onto the substrate on which the circular patterns of the hydrophobic coating films are formed;
• a polymer separating step of phase-separating the block copolymer into the hydrophilic polymer and the hydrophobic polymer;
• and
• a polymer removing step of selectively removing the hydrophilic polymer from the phase-separated block copolymer,
• wherein a ratio of a molecular weight of the hydrophilic polymer in the block copolymer is adjusted to 20% to 40% so that the hydrophilic polymers align at positions corresponding to the hexagonal close-packed structure in the plan view after the polymer separating step, and
• wherein the circular pattern of the hydrophobic coating films formed at the coating film pattern forming step is decided based on following (1) to (3):
• (1) a diameter of the circular pattern of the hydrophobic coating films is 0.8 to 1.5 times a desired pitch between the hydrophilic polymers aligning after the polymer separating step;
• (2) a distance between closest adjacent circular patterns of the hydrophobic coating films is twice the desired pitch;
• and
• (3) at least one of the circular patterns of the hydrophobic coating films is arranged on a circumference having a radius of 2√{square root over ( )}3 times the desired pitch around the circular pattern of the hydrophobic coating films.

A substrate treatment method of treating a substrate using a block copolymer containing a hydrophilic polymer and a hydrophobic polymer, the substrate treatment method comprising:

• a neutral layer forming step of forming a neutral layer on the substrate;
• a coating film pattern forming step of forming a plurality of circular patterns of hydrophobic coating films at predetermined positions on the substrate after the neutral layer forming step, wherein the predetermined positions are based on a desired pattern which is a hexagonal close-packed structure in a plan view;
• a block copolymer coating step of applying the block copolymer onto the substrate on which the circular patterns of the hydrophobic coating films are formed;
• a polymer separating step of phase-separating the block copolymer into the hydrophilic polymer and the hydrophobic polymer;
• and
• a polymer removing step of selectively removing the hydrophilic polymer from the phase-separated block copolymer,
• wherein a ratio of a molecular weight of the hydrophilic polymer in the block copolymer is adjusted to 20% to 40% so that the hydrophilic polymers align at positions corresponding to the hexagonal close-packed structure in the plan view after the polymer separating step, and
• wherein the circular patterns of the hydrophobic coating films formed at the coating film pattern forming step are arranged in an equilateral triangle shape having a pitch twice a desired pitch between the hydrophilic polymers aligning after the polymer separating step.