Reduced footprint substrate transport vacuum platform

An apparatus comprising:

• a vacuum transport chamber having first and second isolation valves coupled to first and second substrate processing locations;
• the vacuum transport chamber having third and fourth isolation valves coupled to a load lock;
• a first substrate transport vacuum robot located within the vacuum transport chamber;
• a second substrate transport vacuum robot located within the vacuum transport chamber;
• the load lock located between the first and second substrate transport vacuum robots, the load lock having an atmospheric isolation valve;
• the atmospheric isolation valve, the third and the fourth isolation valves arranged in a spaced triangular relationship;
• wherein, the first substrate transport vacuum robot is configured to transport a processed substrate from the first processing location to the load lock and is configured to transport an unprocessed substrate from the load lock to the first processing location substantially simultaneously as the second substrate transport vacuum robot transports a different processed substrate from the second processing location to the load lock and transports a different unprocessed substrate from the load lock to the second processing location.

An apparatus comprising:

• a vacuum transport chamber having first and second isolation valves coupled to first and second substrate processing locations;
• the vacuum transport chamber having third and fourth isolation valves coupled to a load lock;
• a first substrate transport vacuum robot located within the vacuum transport chamber;
• a second substrate transport vacuum robot located within the vacuum transport chamber;
• the load lock located between the first and second substrate transport vacuum robots, the load lock having substrate supporting shelves and a moveable poppet sealed to a bottom face of the vacuum transport chamber, the poppet being moveable to provide isolation of the load lock from an atmospheric portion of the apparatus;
• wherein, the first substrate transport vacuum robot is configured to transport a processed substrate from the first processing location to the load lock and is configured to transport an unprocessed substrate from the load lock to the first processing location substantially simultaneously as the second substrate transport vacuum robot transports a different processed substrate from the second processing location to the load lock and transports a different unprocessed substrate from the load lock to the second processing location;
• wherein the third and fourth isolation valves are arranged in a triangular configuration with the moveable poppet.