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US 10,328,453 B2Granted
Thin film production method and transparent conductive film
AssigneeNikon Corporation
InventorsYasutaka Nishi, Makoto Nakazumi
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Abstract
In order to provide a novel method of obtaining a thin film to replace the related art, provided is a method of manufacturing a thin film, including: generating mist of a dispersion liquid containing fine particles; supplying the generated mist of the dispersion liquid onto a substrate; and drying the dispersion liquid supplied onto the substrate.
Claims12
A method of manufacturing a thin film by using a film forming apparatus, comprising:
- generating mist of a dispersion liquid containing fine particles in a first chamber of the film forming apparatus;
- sending the generated mist of the dispersion liquid to a third chamber via a second chamber of the film forming apparatus by supplying the generated mist of the dispersion liquid into an inlet in a top of the second chamber in a first direction and discharging the generated mist of the dispersion liquid from an outlet in the top of the second chamber in a second direction opposite to the first direction;
- supplying the generated mist of the dispersion liquid onto a substrate in the third chamber;
- and
- drying the dispersion liquid supplied onto the substrate.
2 more elements
Dependencies are inferred from the claim text.