Nozzle unit and coating apparatus including the same

A coating apparatus comprising:

• a support unit configured to support a coating object;
• and
• a spray assembly configured to spray a fluid which includes a coating material to be coated by the coating object supported on the support unit,
• wherein the spray assembly comprises,
• a nozzle unit where the fluid is sprayed, and
• a fluid supply unit configured to supply the fluid to the nozzle unit,
• wherein the nozzle unit comprises,
• a body including a passageway for the fluid therein and a dielectric unit provided with a dielectric material, and
• a plasma source for generating plasma from the fluid which flows to an area adjacent to an inner lateral surface of the dielectric unit,
• wherein the plasma source comprises,
• a power electrode configured to apply a power, and
• a ground electrode configured to be grounded,
• wherein the power electrode and the ground electrode are mounted on the dielectric unit,
• wherein the power electrode surrounds a center shaft of the body and is in a helical shape having a plurality of turns arranged along a lengthwise direction of the body,
• wherein the ground electrode surrounds the center shaft of the body and is in a helical shape having a plurality of turns arranged along the lengthwise direction of the body, and
• wherein each of the turns of the power electrode and the turns of the ground electrode are departed from each other, when viewed from a lateral side.