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US 10,322,384 B2Granted
Counter flow mixer for process chamber
AssigneeASM IP Holding B.V.
InventorsJohn F. Stumpf, Chris Wuester
Life of this patent
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Abstract
A counterflow mixing device for a process chamber is disclosed, comprising an injection tube that introduces a fluid in a manner counter to a flow of a post-plasma gas mixture traveling downward from a plasma source. The invention allows for proper mixing of the fluid as well as avoiding recombination of generated ions and radicals.
Claims19
An apparatus for mixing at least one gas, comprising:
- a conical member comprising a top end and a bottom end, the conical member configured to receive a first gas in a first direction at the top end;
- a counter flow injector disposed within the conical member, the counter flow injector introducing a second gas in a second direction, wherein the first direction is opposite to the second direction;
- a configurable orifice plate mounted at the bottom of the conical member, the configurable orifice plate defining an opening through which the first gas and the second gas pass through;
- wherein the conical member promotes a mixing of the first gas and the second gas between the top end and the bottom end;
- and
- wherein changing a size of the opening of the configurable orifice plate changes an extent of the mixing of the first gas and the second gas.
3 more elements
A reaction system for forming a film, comprising:
- a plasma source, the plasma source generating a first gas;
- a conical member, the conical member configured to receive the first gas in a first direction;
- a counter flow injector, the counter flow injector introducing a second gas in a second direction, wherein the first direction is opposite to the second direction;
- an adjustable orifice plate mounted at the bottom of the conical member, the adjustable orifice plate defining an opening through which the plasma gas and the first fluid pass through;
- a reaction chamber that receives the first gas and the second gas, the reaction chamber comprising:
- a housing defining a plenum to receive the first gas and the second gas;
- and
- a showerhead with a plurality of holes for passing the first gas and the second gas onto a substrate to be processed;
- wherein the conical member promotes a mixing of the first gas and the second gas;
- and
- wherein adjusting a size of the opening of the adjustable orifice plate changes an extent of the mixing of the first gas and the second gas.
8 more elements
Dependencies are inferred from the claim text.