# US 10,319,950 B2 · Evaporation method and evaporation device for organic light-emitting diode substrate > Agents: this data is available as JSON from the patentgrep API and MCP server — see https://patentgrep.com/llms.txt - Number: US 10,319,950 B2 - Document ID: US10319950B2 - Status: Granted - Kind: B2 - Application number: 14/907,885 - Filed: 2016-01-06 - Published: 2018-02-01 - Granted: 2019-06-11 - Earliest claimed: 2015-12-15 - Assignees: Shenzhen China Star Optoelectronics Technology Co., Ltd. - Applicants: Shenzhen China Star Optoelectronics Technology Co., Ltd. - Inventors: Youyuan Kuang - Web page: https://patentgrep.com/patent/US10319950B2 ## CPC - C23C 14/24: Vacuum evaporation - C23C 14/243: {Crucibles for source material (C23C14/28, C23C14/30 take precedence)} - C23C 14/50: Substrate holders - C23C 14/54: Controlling or regulating the coating process - C23C 14/542: {Controlling the film thickness or evaporation rate} - C23C 14/545: {using measurement on deposited material} - H10K 71/164: {using vacuum deposition} - H10K 71/40: Thermal treatment, e.g. annealing in the presence of a solvent vapour - H10K 71/70: Testing, e.g. accelerated lifetime tests - H10K 2102/351: {Thickness} - C23C: COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL (making metal-coated products by extrusion B21C23/22; covering with metal by connecting pre-existing layers to articles, see the relevant places, e.g. B21D39/00, B23K; metallising of glass C03C; metallising mortars, concrete, artificial stone, ceramics or natural stone C04B41/00; enamelling of, or applying a vitreous layer to, metals C23D; treating metal surfaces or coating of metals by electrolysis or electrophoresis C25D; single-crystal film growth C30B; by metallising textiles D06M11/83; decorating textiles by locally metallising D06Q1/04) - H10K: ORGANIC ELECTRIC SOLID-STATE DEVICES ## Abstract An evaporation method and an evaporation device for an organic light-emitting diode substrate are proposed. The evaporation method includes: step 1, regulating a distance between a supporting module for supporting a substrate and a crucible platform of an evaporation device; step 2, adjusting a direction of opening of a crucible disposed on the crucible platform; and step 3, placing a substrate to be evaporated on the supporting module and volatizing an evaporation source in the crucible and attaching the volatized evaporation source onto a surface of the substrate. ## Claims ### Claim 1 An evaporation method for an organic light-emitting diode substrate, comprising: step 1, regulating a distance between a supporting module for supporting a substrate and a crucible platform of an evaporation device, step 2, adjusting a direction of opening of a crucible disposed on the crucible platform, and step 3, placing a substrate to be evaporated on the supporting module, and volatizing an evaporation source in the crucible and attaching the volatized evaporation source onto a surface of the substrate; wherein in step 1, the evaporation source is selected and volatilized, so as to form a single film layer on a corresponding first test substrate; different first test points are selected on the first test substrate, so as to obtain a thickness value of the single film layer at each of the first test points; a ratio of a difference between a maximum value and a minimum value of the thickness values of the single film layer at the first test points on the first test substrate to a sum there between is calculated to obtain a test single film layer thickness homogeneity parameter; and a comparison of the test single film layer thickness homogeneity parameter with a standard single film layer thickness homogeneity parameter is made, so as to adjust the distance between the supporting module and the crucible platform; wherein the standard single film layer thickness homogeneity parameter is in a range of 1% to 3%, and wherein when the test single film layer thickness homogeneity parameter is smaller than 1%, the distance between the supporting module and the crucible platform is reduced and when the test single film layer thickness homogeneity parameter is larger than 3%, the distance between the supporting module and the crucible platform is increased. ### Claim 2 (depends on 1) The evaporation method according to claim 1, wherein 12-24 of the first test points are selected on the first test substrate. ### Claim 3 (depends on 2) The evaporation method according to claim 2, wherein when the first test substrate is square shaped, the first test points are evenly distributed along a diagonal line. ### Claim 4 (depends on 1) The evaporation method according to claim 1, wherein in step 2, the direction of opening of each of the crucibles is coarsely adjusted, so that the evaporation source in each of the crucibles volatilizes either outwardly and obliquely in a homogeneous manner, or inwardly and obliquely in a homogeneous manner. ### Claim 5 (depends on 1) The evaporation method according to claim 1, wherein in step 2, the direction of opening of each of the crucibles is coarsely adjusted, so that the evaporation source in each of the crucibles volatilizes either outwardly and obliquely in a homogeneous manner, or inwardly and obliquely in a homogeneous manner. ### Claim 6 (depends on 3) The evaporation method according to claim 3, wherein in step 2, the direction of opening of each of the crucibles is coarsely adjusted, so that the evaporation source in each of the crucibles volatilizes either outwardly and obliquely in a homogeneous manner, or inwardly and obliquely in a homogeneous manner. ### Claim 7 (depends on 2) The evaporation method according to claim 2, wherein in step 2, the direction of opening of each of the crucibles is coarsely adjusted, so that the evaporation source in each of the crucibles volatilizes either outwardly and obliquely in a homogeneous manner, or inwardly and obliquely in a homogeneous manner. ### Claim 8 (depends on 3) The evaporation method according to claim 3, wherein in step 2, the direction of opening of each of the crucibles is coarsely adjusted, so that the evaporation source in each of the crucibles volatilizes either outwardly and obliquely in a homogeneous manner, or inwardly and obliquely in a homogeneous manner. ### Claim 9 (depends on 4) The evaporation method according to claim 4, wherein an angle formed between a straight line of volatilization of the evaporation source in the crucible and a plane in which the crucible platform is located is in a range of 10-80 degrees. ### Claim 10 (depends on 4) The evaporation method according to claim 4, wherein in step 2, each evaporation source is volatized, so that a mixed film layer is formed on a second test substrate, and different second test points are selected on the second test substrate, so as to obtain a thickness value of the mixed film layer at each of the second test points; and wherein a ratio of a difference between a maximum value and a minimum value of the thickness values of the mixed film layer to an average value thereof is calculated to obtain a test mixed film layer thickness homogeneity parameter; and when the test mixed film layer thickness homogeneity parameter is smaller than a standard mixed film layer thickness homogeneity parameter, the direction of each of the crucibles is fixed. ### Claim 11 An evaporation device for implementing an evaporation method, wherein the evaporation method includes: step 1, regulating a distance between a supporting module for supporting a substrate and a crucible platform of an evaporation device, step 2, adjusting a direction of opening of a crucible disposed on the crucible platform, and step 3, placing a substrate to be evaporated on the supporting module and volatizing an evaporation source in the crucible and attaching the volatized evaporation source onto a surface of the substrate; and wherein the evaporation device comprises: the supporting module for supporting the substrate, the crucible platform disposed under the supporting module, the crucible being disposed on the crucible platform, the evaporation source disposed in the crucible, and a driving module for driving the crucible to rotate, the driving module comprising a driving shaft fixedly connected with the crucible and a driving source connected with the driving shaft; wherein in step 1, the evaporation source is selected and volatized, so as to form a single film layer on a corresponding first test substrate; different first test points are selected on the first test substrate, so as to obtain a thickness value of the single film layer at each of the first test points; a ratio of a difference between a maximum value and a minimum value of the thickness values of the single film layer at the first test points on the first test substrate to a sum thereof is calculated to obtain a test single film layer thickness homogeneity parameter; and a comparison of the test single film layer thickness homogeneity parameter with a standard single film layer thickness homogeneity parameter is made, so as to adjust the distance between the supporting module and the crucible platform; wherein the standard single film layer thickness homogeneity parameter is in a range of 1-3%, and wherein when the test single film layer thickness homogeneity parameter is smaller than 1%, the distance between the supporting module and the crucible platform is reduced, and when the test single film layer thickness homogeneity parameter is larger than 3%, the distance between the supporting module and the crucible platform is increased. ### Claim 12 (depends on 11) The evaporation device according to claim 11, wherein 12-24 of the first test points are selected on the first test substrate. ### Claim 13 (depends on 12) The evaporation device according to claim 12, wherein when the first test substrate is square, the first test points are evenly distributed along a diagonal line. ### Claim 14 (depends on 11) The evaporation device according to claim 11, wherein in step 2, the direction of opening of each of the crucibles is coarsely adjusted, so that the evaporation source in each of the crucibles volatilizes either outwardly and obliquely in a homogeneous manner, or inwardly and obliquely in a homogeneous manner. ### Claim 15 (depends on 11) The evaporation device according to claim 11, wherein a thermal insulation member is disposed between the driving shaft and the crucible. ### Claim 16 (depends on 11) The evaporation device according to claim 11, wherein a thermal insulation member is disposed between the driving shaft and the crucible.