# US 10,319,875 B2 · Microelectronic workpiece processing systems and associated methods of color correction > Agents: this data is available as JSON from the patentgrep API and MCP server — see https://patentgrep.com/llms.txt - Number: US 10,319,875 B2 - Document ID: US10319875B2 - Status: Granted - Kind: B2 - Application number: 14/269,348 - Filed: 2014-05-05 - Published: 2014-08-28 - Granted: 2019-06-11 - Earliest claimed: 2010-03-02 - Assignees: Micron Technology, Inc. - Applicants: Micron Technology, Inc. - Inventors: Kevin Tetz; Charles M. Watkins - Web page: https://patentgrep.com/patent/US10319875B2 ## CPC - H10H 20/01: Manufacture or treatment - H10H 20/8513: {having two or more wavelength conversion materials} - B05C 11/00: Component parts, details or accessories not specifically provided for in groups B05C1/00 - B05C9/00 (means for manipulating or holding work B05C13/00; enclosures for apparatus, booths B05C15/00; spray booths B05B16/00) - H10H 20/0361: {of wavelength conversion means} - H10H: INORGANIC LIGHT-EMITTING SEMICONDUCTOR DEVICES HAVING POTENTIAL BARRIERS - B05C: APPARATUS FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL (spraying apparatus, atomising apparatus, nozzles B05B; plant for applying liquids or other fluent materials to objects by electrostatic spraying B05B5/08) ## Abstract Several embodiments of semiconductor systems and associated methods of color corrections are disclosed herein. In one embodiment, a method for producing a light emitting diode (LED) includes forming an (LED) on a substrate, measuring a base emission characteristic of the formed LED, and selecting a phosphor based on the measured base emission characteristic of the formed LED such that a combined emission from the LED and the phosphor at least approximates white light. The method further includes introducing the selected phosphor onto the LED via, for example, inkjet printing. ## Claims ### Claim 1 A system for processing a semiconductor substrate, comprising: a substrate support configured to individually carry a microelectronic workpiece containing a plurality of light emitting diodes (LEDs); a container holding a phosphor; an injector operatively coupled to the container, the injector being configured to introduce a volume of the phosphor onto the plurality of LEDs of the microelectronic workpiece; and a controller operatively coupled to the injector, the controller having a computer-readable storage medium containing instructions which, when executed, cause the controller to perform a method comprising: receiving a base emission characteristic of the plurality of LEDs of the microelectronic workpiece; adjusting a characteristic of the phosphor based on a previously-performed measurement that generates a plurality of points in a chromaticity plot of the received base emission characteristic of the plurality of LEDs, and wherein each of the plurality of points is indicative of a set of parameters associated with the phosphor and the plurality of LEDs, and wherein the plurality of points together define a rectangular distribution area; and introducing the phosphor with the adjusted characteristic onto the plurality of LEDs. ### Claim 2 (depends on 1) The system of claim 1, further comprising a probe configured to measure the base emission characteristic of the plurality of LEDs of the microelectronic workpiece. ### Claim 3 (depends on 1) The system of claim 1, further comprising a probe configured to measure the base emission characteristic of the plurality of LEDs of the microelectronic workpiece, wherein the method further includes: organizing and storing the measured emission characteristic of the plurality of LEDs in an emission map; and receiving a base emission characteristic includes receiving an emission characteristic from the emission map. ### Claim 4 (depends on 1) The system of claim 1 wherein: receiving a base emission characteristic includes receiving an emission characteristic from an emission map stored in the computer-readable storage medium of the controller; and adjusting the characteristic of the phosphor includes determining at least one of a composition and a concentration from a recipe database based on the received emission characteristic of the plurality of LEDs. ### Claim 5 (depends on 1) The system of claim 1 wherein: receiving a base emission characteristic includes receiving an emission characteristic from an emission map stored in the computer-readable storage medium of the controller; and adjusting the characteristic of the phosphor includes determining (1) at least one of a composition and a concentration of a first phosphor and a second phosphor; and (2) a ratio of the first and second phosphors from a recipe database based on the received emission characteristic of the plurality of LEDs. ### Claim 6 (depends on 1) The system of claim 1, wherein the method further comprises adjusting the characteristic of the phosphor based on a target emission. ### Claim 7 (depends on 1) The system of claim 1, wherein the container is a first container and the phosphor is a first phosphor, and wherein the system further comprises a second container holding a second phosphor. ### Claim 8 (depends on 7) The system of claim 7, wherein the method further comprises introducing the first phosphor and the second phosphor, in a ratio, with the adjusted characteristic onto the plurality of LEDs. ### Claim 9 (depends on 8) The system of claim 8, wherein the ratio includes at least one of a mass ratio, a molar ratio, and a volume ratio. ### Claim 10 (depends on 1) The system of claim 1, wherein the base emission characteristic is measured based on an emission wavelength of the plurality of LEDs with a peak intensity. ### Claim 11 A system for processing a semiconductor substrate, comprising: a substrate support configured to individually carry a microelectronic workpiece containing a plurality of light emitting diodes (LEDs); a container holding a phosphor; an injector operatively coupled to the container, the injector being configured to introduce a volume of the phosphor onto the plurality of LEDs of the microelectronic workpiece; and a controller operatively coupled to the injector, the controller having a computer-readable storage medium containing instructions which, when executed, cause the controller to perform a method comprising: receiving a base emission characteristic of the plurality of LEDs of the microelectronic workpiece; developing a compensation scheme by selecting a group of candidate phosphors based on the base emission characteristic of the plurality of LEDs, wherein the group of the candidate phosphors is selected based on a previously-performed measurement that generates a plurality of points in a chromaticity plot of the received base emission characteristic of the plurality of LEDs, and wherein each of the plurality of points is indicative of a set of parameters associated with the phosphor and the plurality of LEDs, and wherein the plurality of points together define a rectangular distribution area; adjusting a characteristic of the phosphor based on the compensation scheme; and introducing the phosphor with the adjusted characteristic onto the plurality of LEDs. ### Claim 12 (depends on 11) The system of claim 11, further comprising a probe configured to measure the base emission characteristic of the plurality of LEDs of the microelectronic workpiece. ### Claim 13 (depends on 11) The system of claim 11, further comprising a probe configured to measure the base emission characteristic of the plurality of LEDs of the microelectronic workpiece, wherein the method further includes: organizing and storing the measured emission characteristic of the plurality of LEDs in an emission map; and receiving a base emission characteristic includes receiving an emission characteristic from the emission map. ### Claim 14 (depends on 11) The system of claim 11 wherein: receiving a base emission characteristic includes receiving an emission characteristic from an emission map stored in the computer-readable storage medium of the controller; and adjusting the characteristic of the phosphor includes determining at least one of a composition and a concentration from a recipe database based on the received emission characteristic of the plurality of LEDs. ### Claim 15 (depends on 11) The system of claim 11 wherein: receiving a base emission characteristic includes receiving an emission characteristic from an emission map stored in the computer-readable storage medium of the controller; and adjusting the characteristic of the phosphor includes determining (1) at least one of a composition and a concentration of a first phosphor and a second phosphor; and (2) a ratio of the first and second phosphors from a recipe database based on the received emission characteristic of the plurality of LEDs.