# US 10,319,860 B2 · Overlap capacitance nanowire

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- Number: US 10,319,860 B2
- Document ID: US10319860B2
- Status: Granted
- Kind: B2
- Application number: 14/667,349
- Filed: 2015-03-24
- Published: 2015-07-30
- Granted: 2019-06-11
- Earliest claimed: 2013-01-11
- Assignees: International Business Machines Corporation
- Applicants: International Business Machines Corporation
- Inventors: Effendi Leobandung
- Web page: https://patentgrep.com/patent/US10319860B2

## CPC

- H10D 30/6215: {having multiple independently-addressable gate electrodes}
- B82Y 10/00: Nanotechnology for information processing, storage or transmission, e.g. quantum computing or single electron logic
- B82Y 40/00: Manufacture or treatment of nanostructures
- H10D 30/014: {of FETs having zero-dimensional [0D] or one-dimensional [1D] channels, e.g. quantum wire FETs, single-electron transistors [SET] or Coulomb blockade transistors}
- H10D 30/43: having one-dimensional [1D] charge carrier gas channels, e.g. quantum wire FETs or transistors having 1D quantum-confined channels
- H10D 62/121: {oriented parallel to substrates}
- H10D 62/235: {of IGFETs (IGFETs having buried channels H10D30/637)}
- H10D: INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
- B82Y: SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES

## Abstract

A device and method for fabricating a nanowire include patterning a first set of structures on a substrate. A dummy structure is formed over portions of the substrate and the first set of structures. Exposed portions of the substrate are etched to provide an unetched raised portion. First spacers are formed about a periphery of the dummy structure and the unetched raised portion. The substrate is etched to form controlled undercut etched portions around a portion of the substrate below the dummy structure. Second spacers are formed in the controlled undercut etched portions. Source/drain regions are formed with interlayer dielectric regions formed thereon. The dummy structure is removed. The substrate is etched to release the first set of structures. Gate structures are formed including a top gate formed above the first set of structures and a bottom gate formed below the first set of structures to provide a nanowire.

## Claims

### Claim 1

A semiconductor device comprising:
a top gate present on an upper surface of at least one fin structure having a first spacer present on a first sidewall of the top gate; and
a bottom gate present on a lower surface of the fin structure having a second sidewall that is aligned with the first sidewall of the top gate, wherein a second spacer is present on the second sidewall, the second spacer having an L-shaped side cross-sectional geometry with a vertical portion overlying the upper surface of the at least one fin structure and abutting vertical portion of the first spacer, the first spacer and the second spacer having a substantially equal height, and a horizontal portion of the second spacer having a portion present directly underlying the first spacer, the horizontal portion of the second spacer extending along a portion of the lower surface of the fin structure, the horizontal portion of the second spacer extending beyond the width of the first spacer and along an entire length of the one or more fin structures that extends beyond a sidewall of the top gate, the horizontal portion and the vertical portion of the second spacer each have a substantially same thickness and having a conformal thickness along their entirety, wherein an entirety of a first upper surface of the horizontal portion of the second spacer on a first side of the bottom gate is coplanar with an entirety of a second upper surface of the second spacer on the second side of the bottom gate.

### Claim 2 (depends on 1)

The semiconductor device of claim 1, wherein the vertical portion of the second spacer is formed on a portion of the first spacer.

### Claim 3 (depends on 1)

The semiconductor device of claim 1, wherein the horizontal portion of the second spacer is present between the substrate and portions of the at least one fin structure.

### Claim 4 (depends on 1)

The semiconductor device of claim 1, further comprising source and drain regions on portions of the at least one fin structure adjacent to the upper gate and the lower gate.

### Claim 5 (depends on 1)

The semiconductor device as recited in claim 1, wherein the bottom gate is formed above the substrate.

### Claim 6 (depends on 1)

The semiconductor device as recited in claim 1, wherein the bottom gate is laterally disposed between undercut etched portions.

### Claim 7 (depends on 6)

The semiconductor device as recited in claim 6, wherein the undercut etched portions include dielectric material.

### Claim 8 (depends on 1)

The semiconductor device as recited in claim 1, wherein the top gate includes a top metal gate and the bottom gate includes a bottom metal gate.

### Claim 9 (depends on 1)

The semiconductor device as recited in claim 1, wherein the at least one fin includes one or more fins for a nanowire.