# US 10,319,765 B2 · Imaging device having an effective pixel region, an optical black region and a dummy region each with pixels including a photoelectric converter > Agents: this data is available as JSON from the patentgrep API and MCP server — see https://patentgrep.com/llms.txt - Number: US 10,319,765 B2 - Document ID: US10319765B2 - Status: Granted - Kind: B2 - Application number: 15/622,595 - Filed: 2017-06-14 - Published: 2018-01-04 - Granted: 2019-06-11 - Earliest claimed: 2016-07-01 - Assignees: Canon Kabushiki Kaisha - Applicants: Canon Kabushiki Kaisha - Inventors: Taro Kato; Akira Okita; Takehito Okabe; Takeru Ohya; Kosuke Asano; Koichiro Iwata; Seiichirou Sakai - Web page: https://patentgrep.com/patent/US10319765B2 ## CPC - H10F 39/806: {Optical elements or arrangements associated with the image sensors} - G06T 7/536: from perspective effects, e.g. by using vanishing points - H04N 7/183: {for receiving images from a single remote source} - H04N 25/57: Control of the dynamic range - H04N 25/633: by using optical black pixels - H04N 25/76: Addressed sensors, e.g. MOS or CMOS sensors - H04N 25/78: Readout circuits for addressed sensors, e.g. output amplifiers or A/D converters - H10F 39/8057: {Optical shielding} - G06T 2207/10004: Still image; Photographic image - G06T 2207/30252: Vehicle exterior; Vicinity of vehicle - H10F 39/8053: {Colour filters} - H10F 39/8063: {Microlenses} - H10F: INORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION - G06T: IMAGE DATA PROCESSING OR GENERATION, IN GENERAL - H04N: PICTORIAL COMMUNICATION, e.g. TELEVISION ## Abstract An imaging device includes a pixel region in which a plurality of pixels, each including a photoelectric converter, are arranged, including an effective pixel region, an optical black region covered with a light-shielding film, and a dummy pixel region arranged between the effective pixel region and the optical black region. The pixels arranged in at least the effective pixel region and the optical black region among the plurality of the pixels each include an optical waveguide arranged above the photoelectric converter. The pixels including the optical waveguides are arranged between the effective pixel region and the optical black region so as to be spaced apart from each other by at least a one-pixel pitch. ## Claims ### Claim 1 An imaging device comprising: an effective pixel region in which a plurality of pixels, each including a photoelectric converter, are arranged; an optical black region in which a plurality of pixels, each including a photoelectric converter, are arranged, the optical black region being covered with a light-shielding film; and a region arranged between the effective pixel region and the optical black region, in which pixels each including a photoelectric converter are arranged, wherein the plurality of pixels arranged in the effective pixel region each include an optical waveguide arranged above the photoelectric converter, wherein the plurality of pixels arranged in the optical black region each include an optical waveguide arranged above the photoelectric converter and under the light-shielding film, and wherein at least some of the pixels arranged in the region between the effective pixel region and the optical black region do not include an optical waveguide arranged above the photoelectric converter. ### Claim 2 (depends on 1) An imaging device according to claim 1, further comprising: a first connecting portion, which is made of a material having a same characteristic as a characteristic of the optical waveguide, provided so as to connect the optical waveguides of the plurality of pixels arranged in the effective pixel region to each other; and a second connecting portion, which is made of the material having the same characteristic as the characteristic of the optical waveguide, provided so as to connect the optical waveguides of the plurality of pixels arranged in the optical black region to each other, wherein the first connecting portion and the second connecting portion are arranged so as to be spaced apart from each other. ### Claim 3 (depends on 2) An imaging device according to claim 2, wherein the first connecting portion and the second connecting portion are made of a material including silicon nitride. ### Claim 4 (depends on 1) An imaging device according to claim 1, further comprising a connecting portion, which is made of a material having a same characteristic as a characteristic of the optical waveguide, provided so as to connect the optical waveguides of the plurality of pixels arranged in the effective pixel region and the plurality of pixels arranged in the optical black region to each other. ### Claim 5 (depends on 1) An imaging device according to claim 1, wherein the region arranged between the effective pixel region and the optical black region includes a first region, which is covered with the light-shielding film. ### Claim 6 (depends on 5) An imaging device according to claim 5, wherein the region arranged between the effective pixel region and the optical black region further includes a second region, which is arranged between the first region and the effective pixel region, covered with the light-shielding film in which pixels each including an optical waveguide are arranged. ### Claim 7 (depends on 6) An imaging device according to claim 6, wherein the region between the effective pixel region and the optical black region further includes a third region, which is arranged between the second region and the effective pixel region, not covered with the light-shielding film and in which pixels each including an optical waveguide are arranged. ### Claim 8 (depends on 7) An imaging device according to claim 7, wherein the plurality of pixels arranged in the effective pixel region further include a color filter configured to select a wavelength of light entering the photoelectric converter, and wherein the pixels arranged in the third region do not include the color filter. ### Claim 9 (depends on 7) An imaging device according to claim 7, wherein the plurality of pixels arranged in the effective pixel region further include a microlens configured to condense light onto the photoelectric converter, and wherein the pixels arranged in the third region do not include the microlens. ### Claim 10 (depends on 5) An imaging device according to claim 5, wherein the region between the effective pixel region and the optical black region further includes a second region, which is arranged between the first region and the effective pixel region, not covered with the light-shielding film and in which pixels including no optical waveguide are arranged. ### Claim 11 (depends on 10) An imaging device according to claim 10, wherein the region between the effective pixel region and the optical black region further includes a third region, which is arranged between the second region and the effective pixel region, not covered with the light-shielding film and in which pixels each including an optical waveguide are arranged. ### Claim 12 (depends on 10) An imaging device according to claim 10, wherein the plurality of pixels arranged in the effective pixel region further include a microlens configured to condense light onto the photoelectric converter, and wherein the pixels arranged in the second region do not include the microlens. ### Claim 13 (depends on 5) An imaging device according to claim 5, wherein the photoelectric converter and the light-shielding film of the pixels arranged in the first region have an interval between the photoelectric converter and the light-shielding film smaller than an interval between the photoelectric converter and the light-shielding film of the plurality of pixels arranged in the optical black region. ### Claim 14 (depends on 1) An imaging device according to claim 1, further comprising: an interconnection layer; and a light-shielding wall, which is provided in the region between the effective pixel region and the optical black region, made of a metal material. ### Claim 15 (depends on 14) An imaging device according to claim 14, wherein the light-shielding wall is provided to the pixels that doe not include the optical waveguide. ### Claim 16 (depends on 14) An imaging device according to claim 14, wherein the light-shielding wall is connected to a terminal for a constant voltage. ### Claim 17 (depends on 1) An imaging device according to claim 1, de wherein the pixels arranged in the region between the effective pixel region and the optical black region each have a readout circuit. ### Claim 18 (depends on 1) An imaging device according to claim 1, further comprising a plurality of insulating films and an interconnection layer arranged between the plurality of insulating films, wherein the optical waveguides are provided in the plurality of insulating films. ### Claim 19 (depends on 18) An imaging device according to claim 18, wherein the optical waveguides are made of a material including silicon nitride, and the plurality of insulating films are made of a material including silicon oxide. ### Claim 20 (depends on 1) An imaging device according to claim 1, wherein the plurality of pixels arranged in the optical black region is a pixel for outputting a reference signal to be used as a reference for a black level. ### Claim 21 (depends on 1) An imaging device according to claim 1, wherein the pixels arranged in the region between the effective pixel region and the optical black region are a pixel in which no signals are read out. ### Claim 22 (depends on 1) An imaging device according to claim 1, further including a plurality of insulating films and an interconnection layer arranged between the plurality of insulating films, wherein in the pixels arranged in the region between the effective pixel region and the optical black region and including no optical waveguide above the photoelectric converter, the plurality of insulating films is arranged above the photoelectric converter at a position of a height same as a height where the optical waveguides in the effective pixel region are provided, or the plurality of insulating films is arranged above the photoelectric converter at a portion of a height same as a height where the optical waveguides in the optical black region are provided. ### Claim 23 An imaging device comprising: an effective pixel region in which a plurality of pixels, each including a photoelectric converter and an optical waveguide arranged above the photoelectric converter, are arranged; an optical black region covered with a light-shielding film, in which a plurality of pixels, each including a photoelectric converter and an optical waveguide arranged above the photoelectric converter and under the light-shielding film, are arranged; a first connecting portion, which is made of a material having a same characteristic as a characteristic of the optical waveguide, provided so as to connect the optical waveguides of the plurality of pixels arranged in the effective pixel region to each other; and a second connecting portion, which is made of the material having the same characteristic as the characteristic of the optical waveguide, provided so as to connect the optical waveguides of the plurality of pixels arranged in the optical black region to each other, wherein the first connecting portion and the second connecting portion are arranged so as to be spaced apart from each other. ### Claim 24 (depends on 23) An imaging system, comprising: the imaging device according to claim 23; and a signal processing unit configured to process a signal output from the imaging device. ### Claim 25 (depends on 23) A movable object, comprising: the imaging device according to claim 23; a distance information acquisition unit configured to acquire distance information on a distance to a target object from a parallax image that is based on a signal output from the imaging device; and a control unit configured to control the movable object based on the distance information. ### Claim 26 (depends on 23) An imaging device according to claim 23, further comprising a plurality of insulating films and an interconnection layer arranged between the plurality of insulating films, wherein the optical waveguides are provided in the plurality of insulating films. ### Claim 27 (depends on 26) An imaging device according to claim 26, wherein the optical waveguides are made of a material including silicon nitride, and the plurality of insulating films are made of a material including silicon oxide. ### Claim 28 (depends on 23) An imaging device according to claim 23, wherein the first connecting portion and the second connecting portion are made of a material including silicon nitride. ### Claim 29 (depends on 23) An imaging device according to claim 23, wherein the plurality of pixels arranged in the optical black region is a pixel for outputting a reference signal to be used as a reference for a black level. ### Claim 30 (depends on 23) An imaging device according to claim 23, further comprising a region between the effective pixel region and the optical black region, wherein pixels arranged in the region between the effective pixel region and the optical black region are a pixel in which no signals are read out. ### Claim 31 (depends on 23) An imaging device according to claim 23, further comprising: a region between the effective pixel region and the optic al black region, in which pixels each including a photoelectric converter are arranged; an interconnection layer; and a light-shielding wall, which is provided in the region between the effective pixel region and the optical black region, made of a metal material. ### Claim 32 (depends on 31) An imaging device according to claim 31, wherein the light-shielding wall is connected to a terminal for a constant voltage. ### Claim 33 An imaging device comprising: an effective pixel region in which a plurality of pixels, each including a photoelectric converter and an optical waveguide arranged above the photoelectric converter, are arranged, the optical waveguide being made of a material including silicon nitride; an optical black region covered with a light-shielding film, in which a plurality of pixels, each including a photoelectric converter and an optical waveguide arranged above the photoelectric converter and under the light-shielding film, are arranged, the optical waveguide being made of a material including silicon nitride; a first connecting portion provided so as to connect the optical waveguides of the plurality of pixels arranged in the effective pixel region to each other, the first connecting portion being made of a material including silicon nitride; and a second connecting portion provided so as to connect the optical waveguides of the plurality of pixels arranged in the optical black region to each other, the second connecting portion being made of a material including silicon nitride, wherein the first connecting portion and the second connecting portion are arranged so as to be spaced apart from each other. ### Claim 34 (depends on 33) An imaging device according to claim 33 further comprising a plurality of insulating films and an interconnection layer arranged between the plurality of insulating films, wherein the optical waveguides are provided in the plurality of insulating films. ### Claim 35 (depends on 34) An imaging device according to claim 34, wherein the plurality of insulating films are made of a material including silicon oxide. ### Claim 36 (depends on 33) An imaging device according to claim 33, wherein the plurality of pixels arranged in the optical black region is a pixel for outputting a reference signal to be used as a reference for a black level. ### Claim 37 (depends on 33) An imaging device according to claim 33, further comprising a region arranged between the effective pixel region and the optical black region, in which pixels each including a photoelectric converter are arranged, wherein the pixels arranged in the region between the effective pixel region and the optical black region are a pixel in which no signals are read out. ### Claim 38 (depends on 33) An imaging device according to claim 33, further comprising: a region arranged between the effective pixel region and the optical black region, in which pixels each including a photoelectric converter are arranged; an interconnection layer; and a light-shielding wall, which is provided in the region between the effective pixel region and the optical black region, made of a metal material. ### Claim 39 (depends on 33) An imaging system, comprising: the imaging device according to claim 33; and a signal processing unit configured to process a signal output from the imaging device. ### Claim 40 (depends on 33) A movable object, comprising: the imaging device according to claim 33; a distance information acquisition unit configured to acquire distance information on a distance to a target object from a parallax image that is based on a signal output from the imaging device; and a control unit configured to control the movable object based on the distance information.