# US 10,319,622 B2 · Substrate conveying method and substrate processing system

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- Number: US 10,319,622 B2
- Document ID: US10319622B2
- Status: Granted
- Kind: B2
- Application number: 15/414,703
- Filed: 2017-01-25
- Published: 2017-08-03
- Granted: 2019-06-11
- Earliest claimed: 2016-02-01
- Assignees: Tokyo Electron Limited
- Applicants: Tokyo Electron Limited
- Inventors: Toshiaki Kodama
- Web page: https://patentgrep.com/patent/US10319622B2

## CPC

- H10P 72/50: for positioning, orientation or alignment
- H10P 72/3302: {Mechanical parts of transfer devices}
- H10P: GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10

## Abstract

Provided is a substrate conveying method including: holding a substrate by a holder; rotating the substrate while conveying the substrate; specifying a position of an edge of the substrate based on a position of the holder when the edge of the substrate crosses a facing surface of a sensor that is disposed on a conveyance trajectory of the substrate, and a position of the sensor; and removing an influence of the rotation of the substrate from the specified position of the edge of the substrate.

## Claims

### Claim 1

A substrate conveying method comprising:
holding a substrate by a holder capable of applying rotational movement;
rotating the substrate while conveying the substrate held by the holder;
specifying, by a controller, a position of an edge of the substrate based on a position of the holder when the edge of the substrate crosses a stationary sensor that is disposed along a conveyance trajectory of the substrate, and a position of the sensor, the position of the edge of the substrate being defined relative to a stationary rectilinear coordinate system;
converting, by the controller, the specified position of the edge of the substrate from being defined relative to the stationary rectilinear coordinate system to being defined relative to a rotatable fork coordinate system of the holder by rotationally moving the specified position of the edge of the substrate by a difference angle defined by a difference between a rotation angle of the position of the edge of the substrate in the fork coordinate system and a rotation angle of the position of the edge of the substrate in the rectilinear coordinate system, thereby removing an influence of the rotation of the substrate from the specified position of the edge of the substrate.

### Claim 2 (depends on 1)

The substrate conveying method of claim 1, wherein the conveying system is a one-link arm.

### Claim 3

A substrate processing system comprising:
a conveying system including a holder that holds a substrate the holder being capable of applying rotational movement;
a stationary sensor disposed along a conveyance trajectory of the substrate; and
a controller,
wherein the holder rotates the substrate while conveying the substrate, and the controller specifies a position of a center of the substrate based on a position of the holder when the edge of the substrate crosses the stationary sensor and a position of the sensor, and the controller is configured to adjust the conveyance trajectory of the substrate by converting a specified position of the edge of the substrate from being defined relative to the stationary rectilinear coordinate system to being defined relative to a rotatable fork coordinate system of the holder,
wherein the converting of the specified position of the edge of the substrate includes rotationally moving the specified position of the edge of the substrate by a difference angle defined by a difference between a rotation angle of the position of the edge of the substrate in the fork coordinate system and a rotation angle of the position of the edge of the substrate in the rectilinear coordinate system.

### Claim 4 (depends on 3)

The substrate processing system of claim 3, wherein the conveying system is a one-link arm.