# US 10,319,570 B2 · Determining a malfunctioning device in a plasma system > Agents: this data is available as JSON from the patentgrep API and MCP server — see https://patentgrep.com/llms.txt - Number: US 10,319,570 B2 - Document ID: US10319570B2 - Status: Granted - Kind: B2 - Application number: 15/450,721 - Filed: 2017-03-06 - Published: 2017-06-22 - Granted: 2019-06-11 - Earliest claimed: 2013-01-31 - Assignees: Lam Research Corporation - Applicants: Lam Research Corporation - Inventors: John C. Valcore, Jr.; Bradford J. Lyndaker; Arthur Sato - Web page: https://patentgrep.com/patent/US10319570B2 ## CPC - H01J 37/32926: {Software, data control or modelling} - G01R 31/40: Testing power supplies (testing photovoltaic devices H02S50/10) - H01J 37/32917: {Plasma diagnostics} - H01J 37/3299: {Feedback systems} - H01J: ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS (spark-gaps H01T; electric arc lamps H05B31/00; particle accelerators H05H) - G01R: MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES (indicating correct tuning of resonant circuits H03J3/12) ## Abstract Systems and methods for determining a malfunctioning device in a plasma system, are described. One of the methods includes receiving an indication whether plasma is generated within a plasma chamber of the plasma system. The plasma system includes a processing portion and a power delivery portion. The method further includes determining whether the plasma system operates within constraints in response to receiving the indication that the plasma is generated, determining a value of a variable at an output of the power delivery portion when the processing portion is decoupled from the power delivery portion, and comparing the determined value with a pre-recorded value of the variable. The method includes determining whether the determined value is outside a range of the pre-recorded value and determining that the malfunctioning device within the power delivery portion upon determining that the determined value is outside the range of the pre-recorded value. ## Claims ### Claim 1 A method for determining a location of a malfunctioning device in a plasma module, comprising: determining whether the plasma module operates within a constraint, the plasma module having a power delivery portion and a plasma processing portion, wherein the power delivery portion includes a radio frequency (RF) generator and the plasma processing portion includes a plasma chamber; determining a value of a variable at an output of the power delivery portion in response to determining that the plasma module does not operate within the constraint, wherein the value of the variable is determined when the power delivery portion is coupled with a known load and is based on a measured value of the variable, wherein when the power delivery portion is coupled with the known load, the power delivery portion is decoupled from the plasma chamber, wherein the measured value is measured by a sensor associated with the RF generator of the power delivery portion; comparing the value of the variable at the output of the power delivery portion with a pre-recorded value of the variable, wherein the pre-recorded value is generated based on a detected value of the variable at an output of the RF generator; and determining whether the malfunctioning device is between an input of the power delivery portion and the output of the power delivery portion based on said comparing. ### Claim 2 (depends on 1) The method of claim 1, wherein the pre-recorded value of the variable is determined based on a computer-generated model of a portion of the power delivery portion, wherein the portion of the power delivery portion excludes the RF generator. ### Claim 3 (depends on 1) The method of claim 1, wherein the pre-recorded value of the variable is calculated by propagating the detected value through a computer-generated model of a portion of the power delivery portion, wherein the portion of the power delivery portion excludes the RF generator. ### Claim 4 (depends on 3) The method of claim 3, wherein the computer-generated model has the same resistance, or inductance, or capacitance, or a combination of two or more thereof as the portion of the power delivery portion. ### Claim 5 (depends on 1) The method of claim 1, wherein said determining that the malfunctioning device is between the input of the power delivery portion and the output of the power delivery portion occurs when the value of the variable at the output of the power delivery portion is not within a pre-determined range from the pre-recorded value of the variable, wherein the known load has a resistance of 50 ohms. ### Claim 6 (depends on 1) The method of claim 1, wherein the power delivery portion includes: a combination of the RF generator and one or more cables, the one or more cables for coupling to the RF generator; or a combination of the RF generator, the one or more cables, and an impedance matching circuit, the impedance matching circuit for coupling to the one or more cables; or a combination of the RF generator, the one or more cables, the impedance matching circuit, and a portion of an RF transmission line, the RF transmission line for coupling the impedance matching circuit to the plasma chamber. ### Claim 7 (depends on 1) The method of claim 1, wherein the plasma processing portion includes: a combination of the plasma chamber and at least a portion of an RF transmission line, the RF transmission line coupled to the plasma chamber; or a combination of the plasma chamber, at least a portion of the RF transmission line, and an impedance matching circuit coupled to the RF transmission line. ### Claim 8 A system for determining a location of a malfunctioning device in a plasma module, comprising: the plasma module having a power delivery portion and a plasma processing portion, wherein the power delivery portion includes a radio frequency (RF) generator, wherein the plasma processing portion includes a plasma chamber, wherein the power delivery portion has an input and an output and the plasma processing portion has an input, wherein the output of the power delivery portion is coupled to the input of the plasma processing portion; and a host computer coupled to the RF generator, wherein the host computer includes a processor configured to: determine whether the plasma module operates within a constraint; determine a value of a variable at the output of the power delivery portion in response to determining that the plasma module does not operate within the constraint, wherein the value of the variable is determined when the power delivery portion is coupled with a known load and is based on a measured value of the variable, wherein when the power delivery portion is coupled with the known load, the power delivery portion is decoupled from the plasma chamber, wherein the measured value is measured by a sensor associated with the RF generator; compare the value of the variable at the output of the power delivery portion with a pre-recorded value of the variable, wherein the pre-recorded value is generated based on a detected value of the variable at an output of the RF generator; and determine whether the malfunctioning device is between the input of the power delivery portion and the output of the power delivery portion based the comparison. ### Claim 9 (depends on 8) The system of claim 8, wherein the pre-recorded value of the variable is determined based on a computer-generated model of a portion of the power delivery portion, wherein the portion of the power delivery portion excludes the RF generator. ### Claim 10 (depends on 8) The system of claim 8, wherein the pre-recorded value of the variable is calculated by propagating the detected value through a computer-generated model of a portion of the power delivery portion, wherein the portion of the power delivery portion excludes the RF generator. ### Claim 11 (depends on 10) The system of claim 10, wherein the computer-generated model has the same resistance, or inductance, or capacitance, or a combination of two or more thereof as the portion of the power delivery portion. ### Claim 12 (depends on 8) The system of claim 8, wherein the processor is configured to determine that the malfunctioning device is between the input of the power delivery portion and the output of the power delivery portion occurs when the value of the variable at the output of the power delivery portion is not within a pre-determined range from the pre-recorded value of the variable, wherein the known load has a resistance of 50 ohms. ### Claim 13 (depends on 8) The system of claim 8, wherein the power delivery portion includes: one or more cables, the one or more cables for coupling to the RF generator; or the one or more cables and an impedance matching circuit, the impedance matching circuit for coupling to the one or more cables; or the one or more cables, the impedance matching circuit, and a portion of an RF transmission line, the RF transmission line for coupling the impedance matching circuit to the plasma chamber. ### Claim 14 (depends on 8) The system of claim 8, wherein the plasma processing portion includes: at least a portion of an radio frequency (RF) transmission line, the RF transmission line coupled to the plasma chamber; or at least a portion of the RF transmission line and an impedance matching circuit coupled to the RF transmission line. ### Claim 15 A non-transitory computer readable medium storing a program for determining a location of a malfunctioning device in a plasma module, wherein the program causes a computer to execute a method comprising: determining whether the plasma module operates within a constraint, the plasma module having a power delivery portion and a plasma processing portion, wherein the power delivery portion includes a radio frequency (RF) generator and the plasma processing portion includes a plasma chamber; determining a value of a variable at an output of the power delivery portion in response to determining that the plasma module does not operate within the constraint, wherein the value of the variable is determined when the power delivery portion is coupled with a known load and is based on a measured value of the variable, wherein when the power delivery portion is coupled with the known load, the power delivery portion is decoupled from the plasma chamber, wherein the measured value is measured by a sensor associated with the RF generator of the power delivery portion; comparing the value of the variable at the output of the power delivery portion with a pre-recorded value of the variable, wherein the pre-recorded value is generated based on a detected value of the variable at an output of the RF generator; and determining whether the malfunctioning device is between an input of the power delivery portion and the output of the power delivery portion based on said comparing. ### Claim 16 (depends on 15) The non-transitory computer readable medium of claim 15, wherein the pre-recorded value of the variable is determined based on a computer-generated model of a portion of the power delivery portion, wherein the portion of the power delivery portion excludes the RF generator. ### Claim 17 (depends on 15) The non-transitory computer readable medium of claim 15, wherein the pre-recorded value of the variable is calculated by propagating the detected value through a computer-generated model of a portion of the power delivery portion, wherein the portion of the power delivery portion excludes the RF generator. ### Claim 18 (depends on 17) The non-transitory computer readable medium of claim 17, wherein the computer-generated model has the same resistance, or inductance, or capacitance, or a combination of two or more thereof as the portion of the power delivery portion. ### Claim 19 (depends on 15) The non-transitory computer readable medium of claim 15, wherein said determining that the malfunctioning device is between the input of the power delivery portion and the output of the power delivery portion occurs when the value of the variable at the output of the power delivery portion is not within a pre-determined range from the pre-recorded value of the variable, wherein the known load has a resistance of 50 ohms. ### Claim 20 (depends on 15) The non-transitory computer readable medium of claim 15, wherein the power delivery portion includes: a combination of the RF generator and one or more cables, the one or more cables for coupling to the RF generator; or a combination of the RF generator, the one or more cables, and an impedance matching circuit, the impedance matching circuit for coupling to the one or more cables; or a combination of the RF generator, the one or more cables, the impedance matching circuit, and a portion of an RF transmission line, the RF transmission line for coupling the impedance matching circuit to the plasma chamber.