# US 10,319,534 B2 · Perovskite thin film low-pressure chemical deposition equipment and uses thereof

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- Number: US 10,319,534 B2
- Document ID: US10319534B2
- Status: Granted
- Kind: B2
- Application number: 15/944,694
- Filed: 2018-04-03
- Published: 2018-08-16
- Granted: 2019-06-11
- Earliest claimed: 2016-08-25
- Assignees: Hangzhou Microquanta Semiconductor Co., Ltd.
- Applicants: Hangzhou Microquanta Semiconductor Co., Ltd.
- Inventors: Buyi Yan; Jizhong Yao
- Web page: https://patentgrep.com/patent/US10319534B2

## CPC

- C23C 16/30: Deposition of compounds, mixtures or solid solutions, e.g. borides, carbides, nitrides
- C23C 16/4481: {by evaporation using carrier gas in contact with the source material (C23C16/4486 takes precedence)}
- C23C 16/455: characterised by the method used for introducing gases into reaction chamber or for modifying gas flows in reaction chamber
- C23C 16/45502: {Flow conditions in reaction chamber}
- C23C 16/45591: {Fixed means, e.g. wings, baffles}
- C23C 16/52: Controlling or regulating the coating process {(C23C16/45557, C23C16/279 take precedence)}
- C23C 16/56: After-treatment
- C30B 25/14: Feed and outlet means for the gases; Modifying the flow of the reactive gases
- C30B 29/12: Halides
- H01G 9/2059: {comprising an organic dye as the active light absorbing material, e.g. adsorbed on an electrode or dissolved in solution}
- H10K 71/10: Deposition of organic active material
- H10K 85/50: Organic perovskites; Hybrid organic-inorganic perovskites [HOIP], e.g. CH3NH3PbI3
- H01G 9/2031: {comprising titanium oxide, e.g. TiO2 (H01G9/2036 takes precedence)}
- H01G 9/204: {comprising zinc oxides, e.g. ZnO (H01G9/2036 takes precedence)}
- H10K 30/50: Photovoltaic [PV] devices
- Y02E 10/542: Dye sensitized solar cells
- Y02E 10/549: Organic PV cells
- Y02P 70/50: Manufacturing or production processes characterised by the final manufactured product
- C23C: COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL (making metal-coated products by extrusion B21C23/22; covering with metal by connecting pre-existing layers to articles, see the relevant places, e.g. B21D39/00, B23K; metallising of glass C03C; metallising mortars, concrete, artificial stone, ceramics or natural stone C04B41/00; enamelling of, or applying a vitreous layer to, metals C23D; treating metal surfaces or coating of metals by electrolysis or electrophoresis C25D; single-crystal film growth C30B; by metallising textiles D06M11/83; decorating textiles by locally metallising D06Q1/04)
- C30B: SINGLE-CRYSTAL GROWTH (by using ultra-high pressure, e.g. for the formation of diamonds, B01J3/06); UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL (zone-refining of metals or alloys C22B); PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE (casting of metals, casting of other substances by the same processes or devices B22D; working of plastics B29; modifying the physical structure of metals or alloys C21D, C22F); SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE (for producing semiconductor devices or parts thereof H10); APPARATUS THEREFOR
- H01G: CAPACITORS; CAPACITORS, RECTIFIERS, DETECTORS, SWITCHING DEVICES, LIGHT-SENSITIVE OR TEMPERATURE-SENSITIVE DEVICES OF THE ELECTROLYTIC TYPE (selection of specified materials as dielectric H01B3/00; capacitors having potential barriers H10D1/62, H10K10/10)
- H10K: ORGANIC ELECTRIC SOLID-STATE DEVICES
- Y02E: REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
- Y02P: CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS

## Abstract

The present disclosure relates to perovskite thin film low-pressure chemical deposition equipment and a usage method thereof, and application of the usage method. The equipment comprises a main chamber, wherein two precursor heating plates and a substrate holddown groove are respectively arranged in the main chamber, the precursor heating plates are respectively provided with precursor containers, a plurality of groups of substrates on which a thin film is to be deposited are arranged on the substrate holddown groove, each group is provided with two substrates which are tightly attached back to back, and the surface of each of the two substrates on which a thin film is to be deposited faces towards one end of the main chamber; the left and right ends of the main chamber respectively communicate with carrier gas pipelines provided with carrier gas inlet mass flow control valves, the main chamber also communicates with a vacuum providing unit, and the main chamber is also provided with a main chamber heater for heating the substrates; and the carrier gas pipelines on the two ends respectively communicate with solvent evaporators. By adopting simultaneous introduction of the gas from the two ends of the main chamber and the substrate back-to-back configuration mode, the rate of preparing the perovskite thin film by the method is doubled as compared with the existing methods.

## Claims

### Claim 1

A perovskite thin film low-pressure chemical vapor deposition equipment, comprising a main chamber, wherein:
two precursor heating plates and a substrate holddown groove are respectively arranged in the main chamber, the two precursor heating plates are respectively adjacent to the left and right end of the main chamber, the substrate holddown groove is arranged between the two precursor heating plates, the precursor heating plates are respectively provided with precursor containers, a plurality of groups of substrates on which a thin film is to be deposited are arranged on the substrate holddown groove, each group of substrates is provided with two substrates which are arranged back to back, so that the surface of the left substrate faces left end of the main chamber and the surface of the right substrate faces right end of the main chamber, each of these surfaces is to be deposited with a layer of thin film;
the left end and right end of the main chamber respectively are connected with carrier gas pipelines equipped with carrier gas inlet mass flow control valves, the main chamber is also connected with a vacuum providing unit, and the main chamber is also equipped with a heating component for heating the substrates; and
the carrier gas pipelines on the two ends respectively are connected with solvent evaporators.

### Claim 2 (depends on 1)

The equipment of claim 1, wherein the inside of the main chamber is further provided with diversion partitions, the diversion partitions are respectively arranged between the precursor containers and openings of the carrier gas pipelines on the two ends of the main chamber, and the diversion partitions are detachably arranged on the inner wall of the main chamber through diversion partition holddown grooves.

### Claim 3 (depends on 1)

The equipment of claim 1, wherein the vacuum providing unit comprises a vacuum pump and a vacuum control valve, the vacuum providing unit is connected with the main chamber through a vacuum duct, the vacuum pump and the vacuum control valve are sequentially arranged on the vacuum duct, and the vacuum control valve is between the main chamber and the vacuum pump.

### Claim 4 (depends on 1)

The equipment of claim 1, wherein the solvent evaporators are connected with the carrier gas pipelines through solvent ducts, the solvent evaporators comprise solvent containers, solvent heaters and solvent vapor control valves, the solvent heaters respectively heat the solvent containers, and solvent vapor respectively enters the carrier gas pipelines through the solvent vapor control valves and the solvent ducts.

### Claim 5 (depends on 1)

The equipment of claim 1, wherein the carrier gas pipelines are also respectively connected with reserved functional gas devices, and the reserved functional gas devices comprise reserved functional gas ducts and reserved functional gas inlet valves.

### Claim 6 (depends on 2)

The equipment of claim 2, wherein the vacuum providing unit comprises a vacuum pump and a vacuum control valve, the vacuum providing unit is connected with the main chamber through a vacuum duct, the vacuum pump and the vacuum control valve are sequentially arranged on the vacuum duct, and the vacuum control valve is between the main chamber and the vacuum pump.

### Claim 7 (depends on 2)

The equipment of claim 2, wherein the solvent evaporators are connected with the carrier gas pipelines through solvent ducts, the solvent evaporators comprise solvent containers, solvent heaters and solvent vapor control valves, the solvent heaters respectively heat the solvent containers, and solvent vapor respectively enters the carrier gas pipelines through the solvent vapor control valves and the solvent ducts.

### Claim 8 (depends on 2)

The equipment of claim 2, wherein the carrier gas pipelines are also respectively connected with reserved functional gas devices, and the reserved functional gas devices comprise reserved functional gas ducts and reserved functional gas inlet valves.

### Claim 9

A method of forming a perovskite film, comprising the following steps:
(i) providing a perovskite thin film low-pressure chemical vapor deposition equipment, comprising a main chamber, wherein:
two precursor heating plates and a substrate holddown groove are respectively arranged in the main chamber, the two precursor heating plates are respectively adjacent to the left and right end of the main chamber, the substrate holddown groove is arranged between the two precursor heating plates, the precursor heating plates are respectively provided with precursor containers, a plurality of groups of substrates on which a thin film is to be deposited are arranged on the substrate holddown groove, each group of substrates is provided with two substrates which are arranged back to back, so that the surface of the left substrate faces left end of the main chamber and the surface of the right substrate faces right end of the main chamber, each of these surfaces is to be deposited with a layer of thin film;
the left end and right end of the main chamber respectively are connected with carrier gas pipelines equipped with carrier gas inlet mass flow control valves, the main chamber is also connected with a vacuum providing unit, and the main chamber is also equipped with a heating component for heating the substrates;
the carrier gas pipelines on the two ends respectively are connected with solvent evaporators; and
the inside of the main chamber is further provided with diversion partitions, the diversion partitions are respectively arranged between the precursor containers and openings of the carrier gas pipelines on the two ends of the main chamber, and the diversion partitions are detachably arranged on the inner wall of the main chamber through diversion partition holddown grooves;
(ii) preparation of BX2 layer
depositing a BX2 layer having a thickness of 100 nm-1000 nm on the surface at one side of the substrates, wherein B is at least one cation of lead, tin, tungsten, copper, zinc, gallium, germanium, arsenic, selenium, rhodium, palladium, silver, cadmium, indium, antimony, osmium, iridium, platinum, gold, mercury, thallium, bismuth and polonium; X is at least one anion of iodine, bromine, chlorine and astatine;
(iii) preparation of perovskite layer
putting the substrates on which the BX2 is deposited in the step (ii) into the substrate holddown groove of the main chamber, wherein the surfaces without any deposited thin film on the two substrates are attached to each other back to back, and the surfaces with the deposited thin film respectively face towards one end of the main chamber respectively;
adding a reactant AX into the precursor containers, wherein A is at least one of amine, amidino or alkali family;
starting the vacuum providing unit so that the pressure in the main chamber is 10−5 Pa-105 Pa;
preheating the main chamber so that the temperature of the main chamber is 50-250° C.;
switching on the precursor heating plates, controlling the temperature of the precursor heating plates so that the temperature of precursor heating plates temperature regions is 10-100° C. higher than that of a substrate temperature region of the substrate holddown groove, and holding the reaction process for 5-120 minutes;
opening the carrier gas inlet mass flow control valves, and regulating the gas input of the main chamber so that the thin film on the surface of the substrate starts the chemical reaction, wherein the type of carrier gas is at least one of nitrogen, helium and argon;
3-100 minutes after the chemical reaction is started, introducing solvent vapor into the main chamber by using the solvent evaporators, wherein the solvent includes methanol, ethanol, isopropanol, ethylene glycol, dimethyl sulfoxide, N,N-dimethylformamide, γ-butyrolactone, or N-methyl-2-pyrrolidone, the evaporation temperature of the solvent is controlled at 50-150° C., and the duration time is 5-100 minutes;
(iv) annealing treatment
removing the residual reactant AX in the precursor containers, heating the substrates in the main chamber to 50-250° C. within 5-60 minutes under the vacuum degree of 1 Pa-10−5 Pa;
and after the heating, slowly introducing at least one of nitrogen, helium and argon into the main chamber through the carrier gas pipelines, and waiting until the main chamber is cooled.

### Claim 10 (depends on 9)

The method of claim 9, wherein the detachable diversion partitions can be in a mounted state or demounted state; and if mounting is required, the diversion partitions are respectively fixed to the diversion partition holddown grooves.

### Claim 11 (depends on 9)

The method of claim 9, wherein the method forms a perovskite solar cell.

### Claim 12 (depends on 7)

A method of manufacturing a perovskite solar cell, comprising:
(a) selecting a transparent substrate, and depositing a transparent conductive layer on the substrate;
(b) depositing a hole transport layer or an electron transport layer on the transparent conductive layer;
(c) depositing a perovskite layer on the hole transport layer or the electron transport layer using the method of claim 7, thereby forming a perovskite light absorbing layer;
(d) depositing a hole transport layer or an electron transport layer on the perovskite light absorbing layer;
(e) depositing a metal conducting layer on the structure formed in step (d).

### Claim 13 (depends on 12)

The method of claim 12, wherein the hole transport layer or the electron transport layer in step (b) or (d) comprises graphene, poly(3,4-ethylenedioxythiophene) polystyrene sulfonate (PEDOT:PSS), polytriarylamine (PTAA), cuprous rhodanide (CuSCN), cuprous iodide (CuI), molybdenum oxide (MoOx), tungsten oxide (WO3), vanadium pentoxide (V2O5), nickel oxide (NiO), polyethyleneimine (PEI), zirconium dioxide (ZrO3), zinc oxide (ZnO), titanium dioxide (TiO2), tin oxide (SnO2), bathocuproine (BCP), C60, or derivatives thereof.

### Claim 14 (depends on 12)

The method of claim 12, wherein depositing a hole transport layer or an electron transport layer in step (b) or (d) comprises vacuum evaporation, electron-beam evaporation, magnetron sputtering, atomic layer deposition, photoetching, chemical vapor deposition, screen printing, hydrothermal process, electrochemical deposition, spin-coating, blade-coating, bar coating, slot-die coating, spray coating or ink-jet printing.