Apparatus and method for detecting position, exposure apparatus, and method for the same

A method for detecting a position of a mark on an object, the method comprising the steps of:

• illuminating the mark and accumulating first signals and second signals from the mark;
• determining an amount of the light from the mark based on the accumulated first signals in parallel with the step of accumulating the second signals;
• and
• detecting, in a case where the amount of light applied to the mark is appropriate, the position of the mark based on the light from the mark received by the light receiving element, and, adjusting, in a case where the amount of the light from the mark is inappropriate, the amount of light applied to the mark by controlling an adjusting unit.

A position detecting apparatus that detects a position of a mark on an object, the apparatus comprising:

• a light receiving element configured to receive light from the object and accumulate signals corresponding to the received light;
• a control unit configured to detect a position of the mark based on the accumulated signals from the light receiving element;
• a light source configured to illuminate the object;
• and
• an adjusting unit configured to adjust an amount of light illuminating the object,
• wherein the control unit obtains an amount of light based on first accumulated signals from the light receiving element transferred to the control unit in a term overlapping with a term during which second accumulated signals are transferred to the control unit,
• wherein the control unit, in a case where the obtained amount of the light is appropriate, detects the position of the mark based on the accumulated signals from the light receiving element and in a case where the obtained amount of the light is inappropriate, adjusts the amount of light illuminating the object by controlling the adjusting unit.

A method for detecting a position of a mark on an object, the method comprising the steps of:

• illuminating the object and accumulating first signals and second signals from the object;
• obtaining an amount of the light based on the first accumulated signals in parallel with the step of accumulating the second accumulated signals;
• and
• obtaining, in a case where the obtained amount of light is appropriate, detecting the position of the mark based on the accumulated signals from the light receiving element, and, adjusting, in a case where the obtained amount of the light is inappropriate, the amount of light illuminating the object by controlling an adjusting unit.