# US 10,313,799 B2 · Microphone and method for manufacturing the same > Agents: this data is available as JSON from the patentgrep API and MCP server — see https://patentgrep.com/llms.txt - Number: US 10,313,799 B2 - Document ID: US10313799B2 - Status: Granted - Kind: B2 - Application number: 15/824,321 - Filed: 2017-11-28 - Published: 2019-03-14 - Granted: 2019-06-04 - Earliest claimed: 2017-09-13 - Assignees: Hyundai Motor Company; Kia Motors Corporation - Applicants: Hyundai Motor Company; Kia Motors Corporation - Inventors: Ilseon Yoo - Web page: https://patentgrep.com/patent/US10313799B2 ## CPC - H04R 19/04: Microphones (H04R19/01 takes precedence) - H04R 17/02: Microphones - H04R 19/005: {using semiconductor materials} - H04R 31/00: Apparatus or processes specially adapted for the manufacture of transducers or diaphragms therefor {(manufacture of microstructural arrangements of deformable or non-deformable structures in general B81C1/00182)} - H04R 1/025: {Arrangements for fixing loudspeaker transducers, e.g. in a box, furniture} - H04R 2201/003: Mems transducers or their use - H04R 2499/11: Transducers incorporated or for use in hand-held devices, e.g. mobile phones, PDA's, camera's - H04R: LOUDSPEAKERS, MICROPHONES, GRAMOPHONE PICK-UPS OR LIKE ACOUSTIC ELECTROMECHANICAL TRANSDUCERS; ELECTRIC HEARING AIDS; PUBLIC ADDRESS SYSTEMS (producing sounds with frequency not determined by supply frequency G10K) ## Abstract A microphone includes: a vibration electrode disposed in an upper portion of a substrate which has an acoustic hole; a fixed electrode separated from the upper portion of the vibration electrode by a reference distance and having an insulation membrane on each of an upper surface and a lower surface of the fixed electrode; and a piezoelectric electrode having a plurality of beams disposed in a radial direction outwards from a center of an upper portion of the fixed electrode and uniformly maintaining a space between the vibration electrode and the fixed electrode by bending the fixed electrode in one direction according to an input voltage. ## Claims ### Claim 1 A microphone, comprising a vibration electrode disposed in an upper portion of a substrate which has an acoustic hole; a fixed electrode separated from an upper portion of the vibration electrode by a reference distance and having an insulation membrane on each of an upper surface and a lower surface of the fixed electrode; and a piezoelectric electrode having a plurality of beams disposed in a radial direction outwards from a center of an upper portion of the fixed electrode and uniformly maintaining a space between the vibration electrode and the fixed electrode by bending the fixed electrode in one direction according to an input voltage. ### Claim 2 (depends on 1) The microphone of claim 1, wherein: the vibration electrode includes a plurality of inflow holes penetrating a portion corresponding to the acoustic hole. ### Claim 3 (depends on 1) The microphone of claim 1, wherein: a first sacrificial layer is disposed between the vibration electrode and the substrate. ### Claim 4 (depends on 1) The microphone of claim 1, wherein the fixed electrode is separated from the vibration electrode by a second sacrificial layer which is disposed on the upper portion of the vibration electrode. ### Claim 5 (depends on 1) The microphone of claim 1, wherein the fixed electrode has a plurality of air holes, and the air holes penetrate an area in which the piezoelectric electrode is not disposed. ### Claim 6 (depends on 1) The microphone of claim 1, wherein: the fixed electrode further comprises a plurality of flexible springs extending outwards along an edge of the fixed electrode. ### Claim 7 (depends on 6) The microphone of claim 6, wherein: the flexible spring is disposed along a circumference of the fixed electrode in an area in which the piezoelectric electrode is not disposed. ### Claim 8 (depends on 1) The microphone of claim 1, wherein: a metallic layer is disposed on each of an upper surface and a lower surface of the piezoelectric electrode. ### Claim 9 (depends on 1) The microphone of claim 1, wherein: the piezoelectric electrode is made of a piezo material including lead zirconate titanate (PZT). ### Claim 10 (depends on 1) The microphone of claim 1, further comprising: a first electrode pad connected with the vibration electrode and a second electrode pad connected with the fixed electrode, wherein the first electrode pad and the second electrode pad are connected electrically with a semiconductor chip. ### Claim 11 A method for manufacturing a microphone, the method comprising steps of: forming a vibration electrode in an upper portion of a substrate; forming a fixed electrode in an upper portion of the vibration electrode, the fixed electrode separated from the vibration electrode by a reference distance; and forming a piezoelectric electrode having a plurality of beams disposed in a radial direction outwards from a center of an upper portion of the fixed electrode and uniformly maintaining a space between the vibration electrode and the fixed electrode by bending the fixed electrode in one direction according to an input voltage. ### Claim 12 (depends on 11) The method of claim 11, wherein the step of forming the vibration electrode comprises: forming a first sacrificial layer on the upper portion of the substrate; and forming the vibration electrode having a plurality of inflow holes in an upper portion of the first sacrificial layer. ### Claim 13 (depends on 11) The method of claim 11, wherein: the step of forming the fixed electrode forms a second sacrificial layer in the upper portion of the vibration electrode, forms a first insulating layer on an upper portion of the second sacrificial layer, and then forms the fixed electrode having a plurality of air holes in an upper portion of the first insulating layer. ### Claim 14 (depends on 13) The method of claim 13, further comprising after the step of forming the fixed electrode: forming a first electrode pad groove connected with the vibration electrode by etching the second sacrificial layer and a portion of the first insulating layer simultaneously; and forming a second insulating layer in an area of the first insulating layer and the upper portion of the fixed electrode, the area not including the air hole and first electrode pad groove. ### Claim 15 (depends on 11) The method of claim 11, wherein the step of forming the piezoelectric electrode: forms a first metallic layer in an upper portion of the second insulating layer formed in an upper portion of the fixed electrode and forms a piezoelectric electrode in an upper portion of the first metallic layer. ### Claim 16 (depends on 15) The method of claim 15, further comprising, after the step of forming the piezoelectric electrode: forming a first electrode pad connected with the vibration electrode and a second electrode pad connected with the fixed electrode while forming a second metallic layer in an upper portion of the piezoelectric electrode simultaneously. ### Claim 17 (depends on 11) The method of claim 11, further comprising, after the step of forming the piezoelectric electrode: forming an acoustic hole by etching a central portion of the substrate; and forming an air layer in the space between the vibration electrode and the fixed electrode corresponding to the acoustic hole.