# US 10,313,616 B2 · Image sensors including shielding structures

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- Number: US 10,313,616 B2
- Document ID: US10313616B2
- Status: Granted
- Kind: B2
- Application number: 15/434,605
- Filed: 2017-02-16
- Published: 2017-09-07
- Granted: 2019-06-04
- Earliest claimed: 2016-03-03
- Assignees: Samsung Electronics Co., Ltd.
- Applicants: Samsung Electronics Co., Ltd.
- Inventors: Yunhwan Jung; Sunyool Kang; Kyoungmin Koh; Seungjin Lee
- Web page: https://patentgrep.com/patent/US10313616B2

## CPC

- H04N 25/617: for reducing electromagnetic interference, e.g. clocking noise
- H04N 25/11: Arrangement of colour filter arrays [CFA]; Filter mosaics
- H04N 25/76: Addressed sensors, e.g. MOS or CMOS sensors
- H04N 25/78: Readout circuits for addressed sensors, e.g. output amplifiers or A/D converters
- H04N: PICTORIAL COMMUNICATION, e.g. TELEVISION

## Abstract

An image sensor includes first pixels and second pixels arranged in alternating order along a first direction, first output lines extending in a second direction that is perpendicular to the first direction and respectively connected to the first pixels, second output lines extending in the second direction and respectively connected to the second pixels, first analog circuit blocks and second analog circuit blocks arranged in alternating order along the first direction, and shielding structures disposed each between adjacent ones of the first and second analog circuit blocks. Each of the first analog circuit blocks includes a plurality of first analog circuits respectively connected to the first output lines. Each of the second analog circuit blocks includes a plurality of second analog circuits respectively connected to the second output lines.

## Claims

### Claim 1

An image sensor comprising:
first pixels and second pixels arranged in alternating order along a first direction;
first output lines connected to respective ones of the first pixels;
second output lines connected to respective ones of the second pixels;
first analog circuit blocks and second analog circuit blocks arranged in an alternating order along the first direction, wherein each of the first analog circuit blocks includes a plurality of first analog circuits, each of the first analog circuits connected to a respective one of the first output lines, and each of the second analog circuit blocks includes a plurality of second analog circuits, each of the second analog circuits connected to a respective one of the second output lines; and
shielding structures disposed between adjacent ones of the first and second analog circuit blocks,
wherein each of the first and second analog circuit blocks is disposed between adjacent ones of the shielding structures.

### Claim 2 (depends on 1)

The image sensor of claim 1, wherein the plurality of first analog circuits within ones of the first analog circuit blocks are spaced apart from each other at a first distance in the first direction, and
wherein outermost ones of the plurality of first analog circuits within ones of the first analog circuit blocks are spaced apart from adjacent outermost ones of the plurality of second analog circuits within adjacent ones of the second analog circuit blocks at a second distance in the first direction, the second distance being substantially equal to the first distance.

### Claim 3 (depends on 2)

The image sensor of claim 2, wherein the shielding structures have a width less than the second distance.

### Claim 4 (depends on 1)

The image sensor of claim 1, wherein the plurality of first analog circuits within ones of the first analog circuit blocks are spaced apart from each other at a first distance in the first direction, and
wherein outermost ones of the plurality of first analog circuits within ones of the first analog circuit blocks are spaced apart from adjacent outermost ones of the plurality of second analog circuits within adjacent ones of the second analog circuit blocks at a second distance in the first direction, the second distance being greater than the first distance.

### Claim 5 (depends on 4)

The image sensor of claim 4, wherein the shielding structures have a width greater than the first distance and less than the second distance.

### Claim 6 (depends on 1)

The image sensor of claim 1, wherein the image sensor further comprises a substrate, each of the first and second analog circuits includes a MOS transistor in the substrate, and each of the shielding structures comprises a doped region in the substrate.

### Claim 7 (depends on 6)

The image sensor of claim 6, wherein the image sensor further comprises an interlayer insulating layer on the substrate, and wherein each of the shielding structures further comprises a contact plug extending through the interlayer insulating layer and a metal line on the contact plug.

### Claim 8 (depends on 7)

The image sensor of claim 7, wherein the metal line and the contact plug have lengths, in a second direction that is perpendicular to the first direction, that are greater than lengths of the first and second analog circuit blocks in the second direction.

### Claim 9

An image sensor comprising:
an active pixel sensor array including unit pixels arranged in a matrix and a plurality of first and second output lines connected to the unit pixels, the first and second output lines being arranged in alternating order along a first direction; and
an analog-to-digital converter that converts pixel signals to digital signals, the pixel signals being output from the first and second output lines of the active pixel sensor array,
wherein the analog-to-digital converter comprises:
a plurality of shielding structures spaced apart from each other along the first direction; and
a plurality of first analog circuits respectively connected to the first output lines; and
a plurality of second analog circuits respectively connected to the second output lines,
wherein the plurality of first analog circuits are disposed between first adjacent ones of the shielding structures, and
the plurality of second analog circuits are disposed between second adjacent ones of the shielding structures.

### Claim 10 (depends on 9)

The image sensor of claim 9, wherein each of the shielding structures is disposed between a respective one of the first analog circuits and a respective one of the second analog circuits that are adjacent to each other.

### Claim 11 (depends on 9)

The image sensor of claim 9, wherein the unit pixels comprise first pixels and second pixels arranged in alternating order along the first direction,
wherein the first output lines extend in a second direction perpendicular to the first direction and are respectively connected to the first pixels, and the second output lines extend in the second direction and are connected to respective ones of the second pixels.

### Claim 12 (depends on 9)

The image sensor of claim 9, wherein adjacent ones of the first analog circuits are spaced apart from each other by a first distance,
wherein adjacent ones of the first and second analog circuits are spaced apart from each other by a second distance that is substantially equal to the first distance.

### Claim 13 (depends on 9)

The image sensor of claim 9, wherein adjacent ones of the first analog circuits are spaced apart from each other by a first distance, and
wherein adjacent ones of the first and second analog circuits are spaced apart from each other by a second distance that is greater than the first distance.

### Claim 14 (depends on 9)

The image sensor of claim 9, wherein adjacent ones of the first analog circuits are spaced apart from each other by a first distance,
wherein adjacent ones of the first and second analog circuits are spaced apart from each other by a second distance that is greater than the first distance, and
wherein the shielding structures have a width that is greater than the first distance and less the second distance.

### Claim 15 (depends on 9)

The image sensor of claim 9, wherein each of the first and second analog circuits includes at least one capacitor.

### Claim 16 (depends on 9)

The image sensor of claim 9, wherein each of the first and second analog circuits includes a comparator.

### Claim 17

An image sensor, comprising:
first pixels configured to detect light having a first color;
second pixels configured to detect light having a second color;
first correlated double sampler (CDS) circuit blocks coupled to the first pixels and second CDS circuit blocks coupled to the second pixels, wherein each of the first CDS circuit blocks includes a plurality of first analog circuits respectively connected to ones of the first pixels and each of the second CDS circuit blocks includes a plurality of second analog circuits respectively connected to ones of the second pixels; and
a plurality of shielding structures respectively between adjacent ones of the first and second analog circuits.

### Claim 18 (depends on 17)

The image sensor of claim 17, wherein adjacent ones of the first analog circuits are spaced apart from each other by a first distance in a first direction, and
wherein adjacent ones of the first and second CDS circuit blocks are spaced apart from each other by a second distance in the first direction, wherein the second distance is greater than the first distance.

### Claim 19 (depends on 17)

The image sensor of claim 17, wherein the image sensor further comprises a substrate, each of the first and second analog circuits is on the substrate, and ones of the shielding structures comprise respective doped regions in the substrate.

### Claim 20 (depends on 19)

The image sensor of claim 19, wherein the image sensor further comprises an interlayer insulating layer on the substrate, and wherein ones of the shielding structures further comprise a respective contact plug extending through the interlayer insulating layer and a respective metal line on the contact plug.
