# US 10,312,658 B2 · Brillouin gain spectral position control of claddings for tuning acousto-optic waveguides

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- Number: US 10,312,658 B2
- Document ID: US10312658B2
- Status: Granted
- Kind: B2
- Application number: 15/630,261
- Filed: 2017-06-22
- Published: 2018-12-27
- Granted: 2019-06-04
- Earliest claimed: 2017-06-22
- Assignees: Honeywell International Inc.
- Applicants: Honeywell International Inc.
- Inventors: Matthew Wade Puckett
- Web page: https://patentgrep.com/patent/US10312658B2

## CPC

- H01S 3/1068: {using an acousto-optical device}
- G01C 19/661: {details}
- G02F 1/125: in an optical waveguide structure
- G02F 1/365: in an optical waveguide structure (G02F1/377, {G02F1/395} take precedence)
- H01S 3/0635: {provided with a periodic structure, e.g. using distributed feed-back, grating couplers (controlling, e.g. modulating distributed feed-back lasers H01S3/102)}
- H01S 3/0637: {Integrated lateral waveguide, e.g. the active waveguide is integrated on a substrate made by Si on insulator technology (Si/SiO2)}
- H01S 3/083: Ring lasers {(fibre ring lasers H01S3/06791)}
- H01S 3/094042: {of a fibre laser}
- H01S 3/094053: {Fibre coupled pump, e.g. delivering pump light using a fibre or a fibre bundle}
- H01S 3/30: using scattering effects, e.g. stimulated Brillouin or Raman effects
- H01S 3/302: {in an optical fibre}
- H01S 3/08059: {Constructional details of the reflector, e.g. shape (mirrors in general G02B5/08; mountings for mirrors G02B7/18)}
- H01S 3/094026: {for synchronously pumping, e.g. for mode locking}
- H01S: DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- G01C: MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY (measuring liquid level G01F; radio navigation, determining distance or velocity by use of propagation effects, e.g. Doppler effects, propagation time, of radio waves, analogous arrangements using other waves G01S)
- G02F: OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS

## Abstract

A method of fabricating an acousto-optic waveguide that includes a waveguide cladding surrounding an optical core is disclosed. The method comprises providing a wafer substrate; depositing an initial amount of a first material over an upper surface of the wafer substrate to form a partial cladding layer; depositing a second material over the partial cladding layer to form an optical layer; removing portions of the second material of the optical layer to expose portions of the partial cladding layer and form an optical core comprising the remaining second material; and depositing an additional amount of the first material over the optical core and the exposed portions of the partial cladding layer to form a full cladding layer that surrounds the optical core. A relative concentration of components of the first material is adjusted to provide Brillouin gain spectral position control of the waveguide cladding to tune the acousto-optic waveguide.

## Claims

### Claim 1

A Brillouin waveguide laser device, comprising:
an integrated photonics chip, comprising:
an acousto-optic waveguide bus; and
an acousto-optic waveguide resonator optically coupled to the acousto-optic waveguide bus;
a first optical fiber in optical communication with the integrated photonics chip through the acousto-optic waveguide bus; and
a second optical fiber in optical communication with the integrated photonics chip through the acousto-optic waveguide bus;
wherein the first optical fiber is configured to direct pump light onto the acousto-optic waveguide bus such that the pump light is coupled into the acousto-optic waveguide resonator;
wherein when a frequency of the pump light matches a resonance frequency of acousto-optic waveguide resonator, an optical power density within the acousto-optic waveguide resonator builds up such that beyond a certain threshold power, the pump light will create a moving acoustic grating in the acousto-optic waveguide resonator that the pump light reflects from, thereby producing lasing of a first order Brillouin wave that is sent to the second optical fiber;
wherein a separation between resonances of the acousto-optic waveguide resonator matches a frequency shift corresponding to Brillouin scattering in a guiding material of the acousto-optic waveguide bus and the acousto-optic waveguide resonator.

### Claim 2 (depends on 1)

The Brillouin waveguide laser device of claim 1, wherein when additional power is transferred into the pump light to create a cascade effect, lasing of higher-order Brillouin waves is produced that travel in alternating directions.

### Claim 3 (depends on 1)

The Brillouin waveguide laser device of claim 1, wherein the acousto-optic waveguide bus and the acousto-optic waveguide resonator each include a waveguide cladding surrounding an optical core.

### Claim 4 (depends on 3)

The Brillouin waveguide laser device of claim 3, wherein the waveguide cladding comprises silicon oxynitride, silicon dioxide, silicon nitride, germanium oxide, zinc oxide, aluminum oxide, titanium dioxide, magnesium oxide, or combinations thereof.

### Claim 5 (depends on 3)

The Brillouin waveguide laser device of claim 3, wherein the optical core comprises silicon, silicon nitride, silicon oxynitride, silicon carbide, diamond, silicon germanium, germanium, gallium arsenide, gallium nitride, gallium phosphide, lithium niobate, or combinations thereof.

### Claim 6 (depends on 3)

The Brillouin waveguide laser device of claim 3, wherein the waveguide cladding has a thickness of about 6 microns to about 40 microns.

### Claim 7 (depends on 3)

The Brillouin waveguide laser device of claim 3, wherein the optical core has a thickness of about 40 nm to about 200 nm.