# US 10,312,655 B2 · Excimer laser generator and excimer laser annealing equipment > Agents: this data is available as JSON from the patentgrep API and MCP server — see https://patentgrep.com/llms.txt - Number: US 10,312,655 B2 - Document ID: US10312655B2 - Status: Granted - Kind: B2 - Application number: 15/841,619 - Filed: 2017-12-14 - Published: 2018-09-20 - Granted: 2019-06-04 - Earliest claimed: 2017-03-17 - Assignees: Boe Technology Group Co., Ltd.; Chengdu Boe Optoelectronics Technology Co., Ltd. - Applicants: Boe Technology Group Co., Ltd.; Chengdu Boe Optoelectronics Technology Co., Ltd. - Inventors: Yin Xie; Zubin Lv; Yu Zhang; Yongzhou Ling; Yayu Wang; Jingshuai Wang; Chenliang Liu; Rujian Li; Kang Luo - Web page: https://patentgrep.com/patent/US10312655B2 ## CPC - H01S 3/034: Optical devices within, or forming part of, the tube, e.g. windows, mirrors (reflectors having variable properties or positions for initial adjustment of the resonator H01S3/086) - H01S 3/02: Constructional details {(housings or packages of fibre lasers H01S3/06704)} - H01S 3/0346: {Protection of windows or mirrors against deleterious effects (cooling arrangements H01S3/0401)} - H01S 3/036: Means for obtaining or maintaining the desired gas pressure within the tube, e.g. by gettering, replenishing; Means for circulating the gas, e.g. for equalising the pressure within the tube {(H01S3/031 takes precedence)} - H01S 3/225: comprising an excimer or exciplex - H01S: DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL ## Abstract An excimer laser generator and an excimer laser annealing equipment are disclosed to improve the convenience of window replacement, improve the replacement efficiency and reduce the gas waste. The excimer laser generator includes a reflector, an active medium cavity and an output mirror arranged in sequence. The active medium cavity has a first opening facing the reflector and a second opening facing the output mirror. The excimer laser generator further includes two replacement units respectively arranged between the first opening and the reflector, and between the second opening and the output mirror. Each of the replacement units includes a support plate and a driving component. The support plate is provided with a plurality of windows, and the driving component is adapted for driving the support plate so that one of the plurality of windows seals a corresponding opening. ## Claims ### Claim 1 An excimer laser generator, comprising: a reflector, an active medium cavity and an output mirror arranged in sequence; the active medium cavity having a first opening facing the reflector and a second opening facing the output mirror; wherein the excimer laser generator further comprises two replacement units respectively arranged between the first opening and the reflector, and between the second opening and the output mirror; each of the replacement units comprises a support plate and a driving component; the support plate is provided with a plurality of windows, and the driving component is adapted for driving the support plate so that one of the plurality of windows seals a corresponding opening; wherein the excimer laser generator further comprises two pressure balancing units located at the first opening and the second opening respectively; wherein each pressure balancing unit comprises: a pressure regulating cavity surrounding each replacement unit, the pressure regulating cavity being provided with a gas inlet and a gas outlet; a gas supply member for supplying gas to the pressure regulating cavity; a regulating valve provided on a communication line between the gas supply member and the gas inlet; and an on-off valve provided on the gas outlet; and wherein the gas supply member is a gasbag or a gas cushion. ### Claim 2 (depends on 1) The excimer laser generator according to claim 1, further comprising: a seal ring located between one of the openings and one of the plurality of windows sealing the opening. ### Claim 3 (depends on 1) The excimer laser generator according to claim 1, wherein each pressure balancing unit further comprises: a sensor for detecting a pressure in the active medium cavity; a controller in signal connection with the sensor, the on-off valve and the regulating valve; the controller adjusting the regulating valve and the on-off valve based on the pressure detected by the sensor so that pressures inside and outside the active medium cavity are equal. ### Claim 4 (depends on 3) The excimer laser generator according to claim 3, wherein when the pressures inside and outside the active medium cavity are equal, the controller controls the driving component so that one of the plurality of windows seals the corresponding opening, and the controller opens the on-off valve. ### Claim 5 (depends on 4) The excimer laser generator according to claim 4, wherein the driving component comprises: a driving motor; a transmission rod, one end of the transmission rod is connected with the support plate, and the other end of the transmission rod is connected with an output shaft of the driving motor. ### Claim 6 (depends on 1) The excimer laser generator according to claim 1, wherein the support plate is circular, and the plurality of windows are arranged within a circumference of the support plate. ### Claim 7 (depends on 1) The excimer laser generator according to claim 1, wherein the support plate is rectangular, and the plurality of windows are arranged on the support plate in an array. ### Claim 8 (depends on 1) The excimer laser generator according to claim 1, wherein the plurality of windows are formed integrally. ### Claim 9 An excimer laser annealing equipment comprising an excimer laser generator; wherein the excimer laser generator comprises: a reflector, an active medium cavity and an output mirror arranged in sequence; the active medium cavity having a first opening facing the reflector and a second opening facing the output mirror; wherein the excimer laser generator further comprises two replacement units respectively arranged between the first opening and the reflector, and between the second opening and the output mirror; each of the replacement units comprises a support plate and a driving component; the support plate is provided with a plurality of windows, and the driving component is adapted for driving the support plate so that one of the plurality of windows seals a corresponding opening; wherein the excimer laser generator further comprises two pressure balancing units located at the first opening and the second opening respectively; wherein each pressure balancing unit comprises: a pressure regulating cavity surrounding each replacement unit, the pressure regulating cavity being provided with a gas inlet and a gas outlet; a gas supply member for supplying gas to the pressure regulating cavity; a regulating valve provided on a communication line between the gas supply member and the gas inlet; and an on-off valve provided on the gas outlet; and wherein the gas supply member is a gasbag or a gas cushion. ### Claim 10 (depends on 9) The excimer laser annealing equipment according to claim 9, further comprising: a seal ring located between one of the openings and one of the plurality of windows sealing the opening. ### Claim 11 (depends on 9) The excimer laser annealing equipment according to claim 9, wherein each pressure balancing unit further comprises: a sensor for detecting a pressure in the active medium cavity; a controller in signal connection with the sensor, the on-off valve and the regulating valve; the controller adjusting the regulating valve and the on-off valve based on the pressure detected by the sensor so that pressures inside and outside the active medium cavity are equal. ### Claim 12 (depends on 11) The excimer laser annealing equipment according to claim 11, wherein when the pressures inside and outside the active medium cavity are equal, the controller controls the driving component so that one of the plurality of windows seals the corresponding opening, and the controller opens the on-off valve. ### Claim 13 (depends on 12) The excimer laser annealing equipment according to claim 12, wherein the driving component comprises: a driving motor; a transmission rod, one end of the transmission rod is connected with the support plate, and the other end of the transmission rod is connected with an output shaft of the driving motor. ### Claim 14 (depends on 9) The excimer laser annealing equipment according to claim 9, wherein the support plate is circular, and the plurality of windows are arranged within a circumference of the support plate. ### Claim 15 (depends on 9) The excimer laser annealing equipment according to claim 9, wherein the support plate is rectangular, and the plurality of windows are arranged on the support plate in an array. ### Claim 16 (depends on 9) The excimer laser annealing equipment according to claim 9, wherein the plurality of windows are formed integrally.