# US 10,312,389 B2 · Optical detector device with patterned graphene layer and related methods

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- Number: US 10,312,389 B2
- Document ID: US10312389B2
- Status: Granted
- Kind: B2
- Application number: 15/782,948
- Filed: 2017-10-13
- Published: 2018-04-19
- Granted: 2019-06-04
- Earliest claimed: 2016-10-13
- Assignees: University of Central Florida Research Foundation, Inc.
- Applicants: University of Central Florida Research Foundation, Inc.
- Inventors: Debashis Chanda; Alireza Safaei; Michael Leuenberger
- Web page: https://patentgrep.com/patent/US10312389B2

## CPC

- G02B 5/008: {Surface plasmon devices (diffractive gratings with a pitch less than or comparable to the wavelength G02B5/1809; surface plasmons in integrated optics G02B6/1226; optical analysis of materials by means of surface plasmons G01N21/553)}
- G01N 21/553: {and using surface plasmons (fluorescence excitation G01N21/648; enhanced Raman G01N21/658)}
- G02B 5/0866: {incorporating one or more organic, e.g. polymeric layers}
- G02B 5/12: Reflex reflectors
- H10F 30/10: the devices being sensitive to infrared radiation, visible or ultraviolet radiation, and having no potential barriers, e.g. photoresistors
- H10F 30/21: the devices being sensitive to infrared, visible or ultraviolet radiation
- H10F 77/12: Active materials
- H10F 77/143: {comprising quantum structures}
- H10F 77/40: Optical elements or arrangements (surface textures H10F77/70)
- H10F 77/413: {directly associated or integrated with the devices, e.g. back reflectors (directly associated or integrated with photovoltaic cells H10F77/42)}
- H10F 77/484: {Refractive light-concentrating means, e.g. lenses}
- H10K 39/32: Organic image sensors
- B82Y 20/00: Nanooptics, e.g. quantum optics or photonic crystals
- B82Y 30/00: Nanotechnology for materials or surface science, e.g. nanocomposites
- G01N 21/554: {detecting the surface plasmon resonance of nanostructured metals, e.g. localised surface plasmon resonance}
- G01N 2021/7773: {Reflection}
- Y02E 10/52: PV systems with concentrators
- Y02E 10/549: Organic PV cells
- Y02P 70/50: Manufacturing or production processes characterised by the final manufactured product
- G02B: OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G01N: INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES (measuring or testing apparatus or processes other than immunoassay, involving enzymes or microorganisms C12M, C12Q)
- H10F: INORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
- H10K: ORGANIC ELECTRIC SOLID-STATE DEVICES
- B82Y: SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
- Y02E: REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
- Y02P: CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS

## Abstract

An optical detector device may include a substrate, a reflector layer carried by the substrate, and a first dielectric layer over the reflector layer. The optical detector device may include a graphene layer over the first dielectric layer and having a perforated pattern.

## Claims

### Claim 1

An optical detector device comprising:
a substrate;
a reflector layer carried by said substrate;
a first dielectric layer over said reflector layer;
a graphene layer over said first dielectric layer and having a perforated pattern therein;
the perforated pattern comprising an array of openings, the array of openings comprising a plurality of rows and a plurality of columns; and
a second dielectric layer over said graphene layer and covering said array of openings.

### Claim 2 (depends on 1)

The optical detector device of claim 1 wherein the array of openings comprises a square array of openings.

### Claim 3 (depends on 2)

The optical detector device of claim 2 wherein each of the openings is circle-shaped.

### Claim 4 (depends on 1)

The optical detector device of claim 1 wherein the perforated pattern is symmetrical.

### Claim 5 (depends on 1)

The optical detector device of claim 1 wherein said first dielectric layer comprises a polymer material.

### Claim 6 (depends on 1)

The optical detector device of claim 1 wherein said graphene layer comprises a monolayer of graphene.

### Claim 7 (depends on 1)

The optical detector device of claim 1 further comprising:
a first electrically conductive contact coupled to said second dielectric layer; and
a second electrically conductive contact coupled to said graphene layer.

### Claim 8 (depends on 1)

The optical detector device of claim 1 wherein said reflector layer comprises gold material.

### Claim 9 (depends on 1)

The optical detector device of claim 1 wherein said reflector layer has a thickness greater than a threshold thickness for optical opacity.

### Claim 10

An optical detector device comprising:
a substrate;
a gold reflector layer carried by said substrate;
a first dielectric layer over said gold reflector layer;
a graphene layer over said first dielectric layer and having a perforated pattern defining a square array of openings;
the perforated pattern comprising an array of openings, the array of openings comprising a plurality of rows and a plurality of columns;
a second dielectric layer over said graphene layer and covering said array of openings;
a first electrically conductive contact coupled to said second dielectric layer; and
a second electrically conductive contact coupled to said graphene layer.

### Claim 11 (depends on 10)

The optical detector device of claim 10 wherein each of the openings is circle-shaped.

### Claim 12 (depends on 10)

The optical detector device of claim 10 wherein the perforated pattern is symmetrical.

### Claim 13 (depends on 10)

The optical detector device of claim 10 wherein said first dielectric layer comprises a polymer material.

### Claim 14 (depends on 10)

The optical detector device of claim 10 wherein said graphene layer comprises a monolayer of graphene.

### Claim 15 (depends on 10)

The optical detector device of claim 10 wherein said gold reflector layer has a thickness greater than a threshold thickness for optical opacity.

### Claim 16

An optical detector device comprising:
a substrate;
a reflector layer carried by said substrate;
a first dielectric layer over said reflector layer;
a graphene layer over said first dielectric layer and having a perforated pattern therein;
the perforated pattern comprising an array of openings; and
a second dielectric layer over said graphene layer and covering said array of openings.

### Claim 17 (depends on 16)

The optical detector device of claim 16 wherein the array of openings comprises a square array of openings.

### Claim 18 (depends on 17)

The optical detector device of claim 17 wherein each of the openings is circle-shaped.

### Claim 19 (depends on 16)

The optical detector device of claim 16 wherein the perforated pattern is symmetrical.

### Claim 20 (depends on 1)

The optical detector device of claim 1 wherein said second dielectric layer comprises an ion-gel dielectric layer.