# US 10,312,280 B2 · Image sensors with diffractive lenses for stray light control

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- Number: US 10,312,280 B2
- Document ID: US10312280B2
- Status: Granted
- Kind: B2
- Application number: 15/719,181
- Filed: 2017-09-28
- Published: 2019-03-28
- Granted: 2019-06-04
- Earliest claimed: 2017-09-28
- Assignees: Semiconductor Components Industries, LLC
- Applicants: Semiconductor Components Industries, LLC
- Inventors: Byounghee Lee
- Web page: https://patentgrep.com/patent/US10312280B2

## CPC

- H10F 39/806: {Optical elements or arrangements associated with the image sensors}
- G02B 3/0056: {arranged along two different directions in a plane, e.g. honeycomb arrangement of lenses (G02B3/0043 takes precedence; miniaturised objectives for electronic devices employing wafer level optics G02B13/0085)}
- G02B 3/0062: {Stacked lens arrays, i.e. refractive surfaces arranged in at least two planes, without structurally separate optical elements in-between}
- G02B 5/1814: {structurally combined with one or more further optical elements, e.g. lenses, mirrors, prisms or other diffraction gratings (G02B5/189 takes precedence)}
- G02B 5/1885: {Arranged as a periodic array}
- G02B 5/201: {in the form of arrays}
- G02B 13/0085: {employing wafer level optics}
- G02B 27/4205: {having a diffractive optical element [DOE] contributing to image formation, e.g. whereby modulation transfer function MTF or optical aberrations are relevant}
- H10F 39/805: {Coatings}
- H10F 39/8053: {Colour filters}
- H10F 39/8063: {Microlenses}
- G02B 1/11: Anti-reflection coatings
- H10F: INORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
- G02B: OPTICAL ELEMENTS, SYSTEMS OR APPARATUS

## Abstract

An image sensor may include an array of imaging pixels. Each imaging pixel may have a photosensitive area that is covered by a microlens and a diffractive lens that focuses light onto the photosensitive area. The diffractive lens may be interposed between the microlens and the photosensitive area. The diffractive lens may have a higher index of refraction than the surrounding materials. The diffractive lens may be formed as a portion of an anti-reflection coating. In some cases, multiple diffractive lenses may be formed over the imaging pixels. Focusing and defocusing diffractive lenses may be used to tune the response of the imaging pixels to incident light.

## Claims

### Claim 1

An image sensor comprising a plurality of imaging pixels, wherein each imaging pixel of the plurality of imaging pixels comprises:
a photodiode;
a microlens formed over the photodiode; and
a diffractive lens interposed between the photodiode and the microlens, wherein the diffractive lens of each imaging pixel has a first refractive index, wherein the diffractive lens of each imaging pixel is surrounded by a respective layer of material that has a second refractive index that is less than the first refractive index, wherein the respective layer of material for each imaging pixel forms a portion of a respective color filter element for that imaging pixel, wherein the respective color filter element for each imaging pixel has a first portion with a first thickness and a second portion with a second thickness that is greater than the first thickness, wherein the first portion is formed over the diffractive lens of that imaging pixel, and wherein the second portion is formed around the diffractive lens of that imaging pixel.

### Claim 2 (depends on 1)

The image sensor defined in claim 1, wherein the diffractive lens of each imaging pixel has a planar upper surface and a planar lower surface.

### Claim 3 (depends on 1)

The image sensor defined in claim 1, further comprising:
a planarization layer that is formed over the plurality of imaging pixels between the photodiodes of the imaging pixels and the diffractive lenses of the imaging pixels.

### Claim 4 (depends on 1)

The image sensor defined in claim 1, further comprising:
an anti-reflective coating that is formed over the plurality of imaging pixels between the photodiodes of the imaging pixels and the diffractive lenses of the imaging pixels.

### Claim 5

An image sensor comprising a plurality of imaging pixels, wherein each imaging pixel of the plurality of imaging pixels comprises:
a photodiode;
a microlens formed over the photodiode; and
a diffractive lens interposed between the photodiode and the microlens, the image sensor further comprising an anti-reflective coating that is formed over the plurality of imaging pixels between the photodiodes of the imaging pixels and the diffractive lenses of the imaging pixels, wherein the anti-reflective coating has first portions with a first thickness and second portions with a second thickness that is greater than the first thickness and wherein the second portions of the anti-reflective coating form the diffractive lenses of the plurality of imaging pixels.

### Claim 6

An imaging pixel comprising:
a photosensitive area;
a color filter element formed over the photosensitive area;
a microlens formed over the color filter element; and
a diffractive lens formed between the color filter element and the photosensitive area, wherein the diffractive lens is transparent, wherein the diffractive lens has first and second opposing surfaces, wherein the first and second surfaces of the diffractive lens are planar, and wherein the color filter element laterally surrounds the diffractive lens.

### Claim 7 (depends on 6)

The imaging pixel defined in claim 6, wherein the diffractive lens has a first refractive index and the color filter element has a second refractive index that is less than the first refractive index.

### Claim 8 (depends on 6)

The imaging pixel defined in claim 6, further comprising:
an anti-reflective coating interposed between the diffractive lens and the photosensitive area, wherein the diffractive lens is formed from the same material as the anti-reflective coating.

### Claim 9 (depends on 6)

The imaging pixel defined in claim 6, further comprising:
an anti-reflective coating on the diffractive lens.

### Claim 10 (depends on 6)

The imaging pixel defined in claim 6, wherein the diffractive lens has a center, the photosensitive area has a center, and the center of the diffractive lens is shifted relative to the center of the photosensitive area.

### Claim 11 (depends on 10)

The imaging pixel defined in claim 10, wherein the color filter element has a center and the center of the diffractive lens is aligned with the center of the color filter element.

### Claim 12 (depends on 6)

The imaging pixel defined in claim 6, wherein the color filter element directly contacts an edge surface of the diffractive lens.

### Claim 13 (depends on 12)

The imaging pixel defined in claim 12, wherein the color filter element directly contacts the first surface of the diffractive lens.

### Claim 14 (depends on 6)

The imaging pixel defined in claim 6, wherein the color filter element has a first portion with a first thickness and a second portion with a second thickness that is greater than the first thickness.

### Claim 15 (depends on 14)

The imaging pixel defined in claim 14, wherein the first portion is formed over the diffractive lens and wherein the second portion laterally surrounds the diffractive lens.