# US 10,312,273 B2 · Low temperature poly-silicon TFT substrate structure and manufacture method thereof

> Agents: this data is available as JSON from the patentgrep API and MCP server — see https://patentgrep.com/llms.txt

- Number: US 10,312,273 B2
- Document ID: US10312273B2
- Status: Granted
- Kind: B2
- Application number: 15/823,514
- Filed: 2017-11-27
- Published: 2018-03-22
- Granted: 2019-06-04
- Earliest claimed: 2015-03-27
- Assignees: Shenzhen China Star Optoelectronics Technology Co., Ltd.
- Applicants: Shenzhen China Star Optoelectronics Technology Co., Ltd.
- Inventors: Xiaoxing Zhang
- Web page: https://patentgrep.com/patent/US10312273B2

## CPC

- H10D 86/0251: {characterised by increasing the uniformity of device parameters}
- H10D 30/6731: {Top-gate only TFTs}
- H10D 30/674: {characterised by the active materials}
- H10D 30/6745: {Polycrystalline or microcrystalline silicon}
- H10D 30/6757: {characterised by the structure of the channel, e.g. transverse or longitudinal shape or doping profile (TFTs having channel structures for preventing kink or snapback effects H10D30/6708; TFTs having lightly-doped source or drain extensions H10D30/6715)}
- H10D 86/0212: {comprising manufacture, treatment or coating of substrates}
- H10D 86/0223: {comprising crystallisation of amorphous, microcrystalline or polycrystalline semiconductor materials}
- H10D 86/0227: {using structural arrangements to control crystal growth, e.g. placement of grain filters}
- H10D 86/411: {characterised by materials, geometry or structure of the substrates}
- H10D 86/421: {having a particular composition, shape or crystalline structure of the active layer}
- H10D 86/441: {Interconnections, e.g. scanning lines}
- H10D 86/60: wherein the TFTs are in active matrices
- H10K 59/1213: {the pixel elements being TFTs}
- H10D: INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
- H10K: ORGANIC ELECTRIC SOLID-STATE DEVICES

## Abstract

A method for manufacturing a LTPS TFT substrate is provided. Buffer layers are respectively provided in a drive TFT area and a display TFT area and have different thicknesses, such that the thickness of the buffer layer in the drive TFT area is larger than the thickness of the buffer layer in the display TFT area so that different temperature grades are formed in a crystallization process of poly-silicon to achieve control of the grain diameters of crystals. A poly-silicon layer that is formed in the drive TFT area in the crystallization process has a large lattice dimension to increase electron mobility thereof. Fractured crystals can be formed in a poly-silicon layer of the display TFT area in the crystallization process for ensuring the uniformity of the grain boundary and increasing the uniformity of electrical current. Accordingly, the electrical property demands for different TFTs can be satisfied.

## Claims

### Claim 1

A method for manufacturing a low temperature poly-silicon thin film transistor (TFT) substrate structure, comprising the following steps:
Step 1, providing a substrate, wherein the substrate comprises a drive TFT area and a display TFT area, depositing a buffer layer on the substrate, and patterning the buffer layer to make a thickness of the buffer layer in the drive TFT area larger than a thickness of the buffer layer in the display TFT area, wherein the buffer layer of the drive TFT area and the buffer layer of the display TFT area are formed of the same material such that a thickness of the material of the buffer layer in the drive TFT area is larger than a thickness of the material of the buffer layer in the display TFT area by a predetermined buffer layer thickness difference;
Step 2, depositing an amorphous silicon layer on the buffer layer, implementing an excimer laser annealing process to the amorphous silicon layer to make the amorphous silicon layer crystallized and converted to a poly-silicon layer, and patterning the poly-silicon layer to obtain a first poly-silicon section in the drive TFT area and a second poly-silicon section in the display TFT area;
Step 3, depositing a gate isolation layer on the first poly-silicon section, the second poly-silicon section and the buffer layer;
Step 4, depositing and patterning a first metal layer on the gate isolation layer to form a first gate and a second gate respectively above the first poly-silicon section and the second poly-silicon section and corresponding thereto;
Step 5, depositing an interlayer insulation layer on the gate isolation layer, the first gate and the second gate and forming a first via and a second via in the interlayer insulation layer and the gate isolation layer to be respectively above the first poly-silicon section and the second poly-silicon section and corresponding thereto; and
Step 6, depositing and patterning a second metal layer on the interlayer insulation layer to respectively form a first source/drain in the drive TFT area and a second source/drain in the display TFT area, wherein the first source/drain contacts with the first poly-silicon section through the first via and the second source/drain contacts with the second poly-silicon section through the second via.

### Claim 2 (depends on 1)

The method as claimed in claim 1, wherein a lattice dimension of the first poly-silicon section is larger than a lattice dimension of the second poly-silicon section and fractured crystals in the second poly-silicon section outnumber fractured crystals in the first poly-silicon section.

### Claim 3 (depends on 1)

The method as claimed in claim 1, wherein the substrate comprises a glass substrate.

### Claim 4 (depends on 1)

The method as claimed in claim 1, wherein the material of the buffer layer is one of silicon oxide, silicon nitride, and a combination thereof.

### Claim 5 (depends on 1)

The method as claimed in claim 1, wherein the interlayer insulation layer is formed of a material comprising one of silicon oxide, silicon nitride, and a combination thereof.

### Claim 6 (depends on 1)

The method as claimed in claim 1, wherein the predetermined buffer layer thickness difference is larger than 500 Å.