# US 10,312,234 B2 · Diode connected vertical transistor

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- Number: US 10,312,234 B2
- Document ID: US10312234B2
- Status: Granted
- Kind: B2
- Application number: 15/907,908
- Filed: 2018-02-28
- Published: 2018-09-20
- Granted: 2019-06-04
- Earliest claimed: 2017-03-15
- Assignees: International Business Machines Corporation
- Applicants: International Business Machines Corporation
- Inventors: Karthik Balakrishnan; Pouya Hashemi; Alexander Reznicek
- Web page: https://patentgrep.com/patent/US10312234B2

## CPC

- H10D 84/811: {Combinations of field-effect devices and one or more diodes, capacitors or resistors}
- G11C 7/062: {Differential amplifiers of non-latching type, e.g. comparators, long-tailed pairs}
- H10D 8/045: {of PN junction diodes}
- H10D 12/021: {of gated diodes, e.g. field-controlled diodes [FCD]}
- H10D 30/025: {of vertical IGFETs (of VDMOS H10D30/0291; of vertical TFTs H10D30/0318)}
- H10D 30/63: Vertical IGFETs (H10D30/66 {, H10D30/6728, H10D30/689, H10D30/693} take precedence)
- H10D 84/0142: {the gate conductors having different shapes or dimensions}
- H10D 84/016: {the components including vertical IGFETs}
- H10D 84/038: {using silicon technology, e.g. SiGe}
- G11C 11/4091: Sense or sense/refresh amplifiers, or associated sense circuitry, e.g. for coupled bit-line precharging, equalising or isolating
- H10D 8/00: Diodes (variable-capacitance diodes H10D1/64; gated diodes H10D12/00)
- H10D 12/211: {Gated diodes}
- H10D 84/0149: {Manufacturing their interconnections or electrodes, e.g. source or drain electrodes}
- H10D: INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
- G11C: STATIC STORES (semiconductor memory devices H10B)

## Abstract

An electrical device including a vertical transistor device connected to a vertical diode. The vertical diode connected transistor device including a vertically orientated channel. The vertical diode connected transistor device also includes a first diode source/drain region provided by an electrically conductive surface region of a substrate at a first end of the diode vertically orientated channel, and a second diode source/drain region present at a second end of the vertically orientated channel. The vertical diode also includes a diode gate structure in electrical contact with the first diode source/drain region.

## Claims

### Claim 1

An electrical device comprising:
a semiconductor substrate including an electrically conductive surface region; and
a diode connected transistor device comprising a vertically orientated channel present on the semiconductor substrate, the diode connected transistor device further including a first diode source/drain region provided by the electrically conductive surface region at a first end of the vertically orientated channel and a gate structure in electrical contact with the first diode source/drain region, wherein a gate electrode of the gate structure is in direct contact with the first diode source/drain region.

### Claim 2 (depends on 1)

The electrical device of claim 1, wherein the diode connected transistor device comprises a second diode transistor source/drain region that is present at a second end of the diode vertically orientated channel that is opposing the first end that is in contact with the first diode source/drain region.

### Claim 3 (depends on 1)

The electrical device of claim 1, wherein the diode vertically orientated channel are provided by a fin structure.

### Claim 4 (depends on 3)

The electrical device of claim 3, wherein the fin structure is comprised of a type IV semiconductor.

### Claim 5 (depends on 3)

The electrical device of claim 3, wherein the fin structure is comprised of a type III-V semiconductor.

### Claim 6 (depends on 1)

The electrical device of claim 1, wherein the electrical device is a current mirror.

### Claim 7 (depends on 1)

The electrical device of claim 1, wherein the electrical device is a comparator.

### Claim 8 (depends on 1)

The electrical device of claim 1, wherein the electrical device is a sense amplifier.

### Claim 9 (depends on 3)

The electrical device of claim 3, wherein the diode connected transistor device is a two terminal device.

### Claim 10 (depends on 9)

The electrical device of claim 9, wherein the two terminal device comprises a first terminal provided by the electrically conductive surface region that provides the first diode source/drain region, and a second terminal in direct electrical contact to a second diode source/drain region.

### Claim 11

An electrical device comprising:
a semiconductor substrate including an electrically conductive surface region; and
a diode connected transistor device comprising a second vertically orientated channel present on the semiconductor substrate, the diode connected transistor device further including a first diode source/drain region provided by the electrically conductive surface region at a first end of the diode vertically orientated channel, a diode gate structure in electrical contact with the first diode source/drain region, and a second diode source/drain at a second end of the diode vertically orientated channel, wherein a gate electrode of the gate structure is in direct contact with the first diode source/drain region.

### Claim 12 (depends on 11)

The electrical device of claim 11, wherein the diode vertically orientated channel are provided by a fin structure.

### Claim 13 (depends on 12)

The electrical device of claim 12, wherein the fin structure is comprised of a type IV semiconductor.

### Claim 14 (depends on 12)

The electrical device of claim 12, wherein the fin structure is comprised of a type III-V semiconductor.

### Claim 15 (depends on 11)

The electrical device of claim 11, wherein the electrical device is a current mirror.

### Claim 16 (depends on 11)

The electrical device of claim 11, wherein the electrical device is a comparator.

### Claim 17 (depends on 11)

The electrical device of claim 11, wherein the electrical device is a sense amplifier.

### Claim 18 (depends on 11)

The electrical device of claim 11, wherein the diode connected transistor device is a two terminal device.

### Claim 19 (depends on 18)

The electrical device of claim 18, wherein the two terminal device comprises a first terminal provided by the electrically conductive surface region that provides the first diode source/drain region, and a second terminal in direct electrical contact to a second diode source/drain region.

### Claim 20 (depends on 11)

The electrical device of claim 11, further comprising a vertically orientated transistor including a channel region comprised of a channel fin structure.
