# US 10,312,117 B2 · Apparatus and radiant heating plate for processing wafer-shaped articles > Agents: this data is available as JSON from the patentgrep API and MCP server — see https://patentgrep.com/llms.txt - Number: US 10,312,117 B2 - Document ID: US10312117B2 - Status: Granted - Kind: B2 - Application number: 15/233,698 - Filed: 2016-08-10 - Published: 2018-02-15 - Granted: 2019-06-04 - Earliest claimed: 2016-08-10 - Assignees: Lam Research Corporation - Applicants: Lam Research AG - Inventors: Hongbo Si; Bridget Hill; Butch Berney; Daniel Brien - Web page: https://patentgrep.com/patent/US10312117B2 ## CPC - H10P 72/0436: {mainly by radiation} - H05B 3/0047: {for semiconductor manufacture} - H10P 72/0408: {for drying} - H10P 72/0414: {using mainly spraying means, e.g. nozzles} - H10P 72/7608: {characterised by a plurality of separate clamping members, e.g. clamping fingers} - H10P 72/7626: {characterised by the construction of the shaft} - H10P: GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10 - H05B: ELECTRIC HEATING; ELECTRIC LIGHT SOURCES NOT OTHERWISE PROVIDED FOR; CIRCUIT ARRANGEMENTS FOR ELECTRIC LIGHT SOURCES, IN GENERAL ## Abstract An apparatus for processing wafer-shaped articles includes a rotary chuck adapted to hold a wafer-shaped article of a predetermined diameter thereon. A radiant heating plate faces a wafer-shaped article when positioned on the rotary chuck. The radiant heating plate includes radiant heating elements, but a central region of the radiant heating plate is free of radiant heating elements. The radiant heating plate further includes at least one refraction element that refracts radiation emitted by the radiant heating elements and passed through the at least one refraction element, toward the central region of the radiant heating plate. ## Claims ### Claim 1 An apparatus for processing wafer-shaped articles, comprising: a rotary chuck adapted to hold a wafer-shaped article of a predetermined diameter thereon; a radiant heating plate that faces a wafer-shaped article when positioned on said rotary chuck, said radiant heating plate comprising radiant heating elements, wherein a central region of said radiant heating plate is free of radiant heating elements, said radiant heating plate further comprising at least one refraction element that refracts radiation emitted by said radiant heating elements and passed through said at least one refraction element toward said central region of said radiant heating plate; and a cover plate arranged above the radiant heating plate, wherein said cover plate includes a central opening overlying said central region, and wherein said at least one refraction element is arranged to cover said central opening above said central region that is free of said radiant heating elements. ### Claim 2 (depends on 1) The apparatus according to claim 1, wherein the at least one refraction element is at least one lens. ### Claim 3 (depends on 1) The apparatus according to claim 1, wherein said rotary chuck is mounted for rotation about a stationary central post, and wherein said radiant heating plate is secured to an upper end of said stationary central post. ### Claim 4 (depends on 1) The apparatus according to claim 1, wherein said cover plate that is substantially transparent to radiation emitted by said radiant heating elements. ### Claim 5 (depends on 4) The apparatus according to claim 4, wherein said at least one refraction element is comprised by a cap configured to cover said central opening and to overlie said radiant heating elements that are adjacent to said central region. ### Claim 6 (depends on 5) The apparatus according to claim 5, wherein a periphery of said cap overlies said radiant heating elements that are adjacent to said central region, said periphery comprising surfaces that converge in a direction away from a center of said central opening. ### Claim 7 (depends on 5) The apparatus according to claim 5, wherein said rotary chuck is mounted for rotation about a stationary central post, and wherein said radiant heating plate and said cap are secured to an upper end of said stationary central post. ### Claim 8 (depends on 4) The apparatus according to claim 4, wherein said cover plate is made from quartz or sapphire. ### Claim 9 (depends on 5) The apparatus according to claim 5, wherein said cap is made from quartz or sapphire. ### Claim 10 (depends on 2) The apparatus according to claim 2, wherein said at least one lens comprises a molded silicone Fresnel lens positioned on said radiant heating elements that are adjacent said central region. ### Claim 11 (depends on 1) The apparatus according to claim 1, wherein said radiant heating elements are LEDs, and wherein each of said LEDs that are adjacent said central region comprises a silicone lens positioned above a power die of said LEDs. ### Claim 12 A radiant heating plate, comprising: radiant heating elements, wherein a central region of said radiant heating plate is free of radiant heating elements, said radiant heating plate further comprising at least one refraction element that refracts radiation emitted by said radiant heating elements and passed through said at least one refraction element toward said central region of said radiant heating plate; and a cover plate arranged above the radiant heating elements, wherein said cover plate includes a central opening overlying said central region, and wherein said at least one refraction element is arranged to cover said central opening above said central region that is free of said radiant heating elements. ### Claim 13 (depends on 12) The radiant heating plate according to claim 12, wherein the at least one refraction element is at least one lens. ### Claim 14 (depends on 12) The radiant heating plate according to claim 12, wherein said cover plate is substantially transparent to radiation emitted by said radiant heating elements. ### Claim 15 (depends on 14) The radiant heating plate according to claim 14, wherein said at least one refraction element is comprised by a cap configured to cover said central opening and to overlie said radiant heating elements that are adjacent to said central region. ### Claim 16 (depends on 15) The radiant heating plate according to claim 15, wherein a periphery of said cap overlies said radiant heating elements that are adjacent to said central region, said periphery comprising surfaces that converge in a direction away from a center of said central opening. ### Claim 17 (depends on 14) The radiant heating plate according to claim 14, wherein said cover plate is made from quartz or sapphire. ### Claim 18 (depends on 15) The radiant heating plate according to claim 15, wherein said cap is made from quartz or sapphire. ### Claim 19 (depends on 13) The radiant heating plate according to claim 13, wherein said at least one lens comprises a molded silicone Fresnel lens positioned on said radiant heating elements that are adjacent said central region. ### Claim 20 (depends on 12) The radiant heating plate according to claim 12, wherein said radiant heating elements are LEDs, and wherein each of said LEDs that are adjacent said central region comprises a silicone lens positioned above a power die of said LEDs.