# US 10,312,113 B2 · Flow passage structure, intake and exhaust member, and processing apparatus > Agents: this data is available as JSON from the patentgrep API and MCP server — see https://patentgrep.com/llms.txt - Number: US 10,312,113 B2 - Document ID: US10312113B2 - Status: Granted - Kind: B2 - Application number: 15/124,323 - Filed: 2015-09-10 - Published: 2017-12-28 - Granted: 2019-06-04 - Earliest claimed: 2015-03-18 - Assignees: Kabushiki Kaisha Toshiba - Applicants: Kabushiki Kaisha Toshiba - Inventors: Takahiro Terada; Masayuki Tanaka; Shiguma Kato - Web page: https://patentgrep.com/patent/US10312113B2 ## CPC - H10P 72/0402: {Apparatus for fluid treatment (H10P72/0441, H10P72/0448 take precedence)} - B33Y 80/00: Products made by additive manufacturing - F17D 1/00: Pipe-line systems (conveying articles or materials through a pipe- line by means of a fluid carrier B65G51/00, B65G53/00; liquids B67D; special devices for transferring liquids from bulk storage containers into vehicles or boats or vice versa, e.g. loading or unloading vehicles or portable containers B67D7/00; conveying material which has been excavated by a dredger or soil shifter through a pipe-line E02F7/10; sewer pipe-line systems E03F3/00; thermal insulation of pipe-lines F16L59/00; central heating systems F24D) - F17D 1/04: for distribution of gas - H10P 72/0462: {characterised by the construction of the processing chambers, e.g. modular processing chambers} - C23C 16/4412: {Details relating to the exhausts, e.g. pumps, filters, scrubbers, particle traps} - H10P: GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10 - B33Y: ADDITIVE MANUFACTURING, i.e. MANUFACTURING OF THREE-DIMENSIONAL [3D] OBJECTS BY ADDITIVE DEPOSITION, ADDITIVE AGGLOMERATION OR ADDITIVE LAYERING, e.g. BY 3D PRINTING, STEREOLITHOGRAPHY OR SELECTIVE LASER SINTERING - F17D: PIPE-LINE SYSTEMS; PIPE-LINES (pumps or compressors F04; fluid dynamics F15D; valves or the like F16K; pipes, laying pipes, supports, joints, branches, repairing, work on the entire line, accessories F16L; steam traps or the like F16T; fluid-pressure electric cables H01B9/06) - C23C: COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL (making metal-coated products by extrusion B21C23/22; covering with metal by connecting pre-existing layers to articles, see the relevant places, e.g. B21D39/00, B23K; metallising of glass C03C; metallising mortars, concrete, artificial stone, ceramics or natural stone C04B41/00; enamelling of, or applying a vitreous layer to, metals C23D; treating metal surfaces or coating of metals by electrolysis or electrophoresis C25D; single-crystal film growth C30B; by metallising textiles D06M11/83; decorating textiles by locally metallising D06Q1/04) ## Abstract A flow passage structure includes a member. The member includes a plurality of first openings, a plurality of second openings, a flow passage, and a plurality of joining and branching parts. The flow passage connects the first openings with the second openings. The joining and branching parts are provided in the flow passage and each have a plurality of first parts having respective first ends connected with each other and a plurality of second parts having respective second ends connected with each other. The second parts are closer to the second openings than the first parts are, in a path between the first opening and the second opening. The first ends are connected with the second ends in each joining and branching part. ## Claims ### Claim 1 A flow passage structure comprising: a member provided with: a plurality of first openings; a plurality of second openings; a flow passage connecting the plurality of first openings with the plurality of second openings; and a plurality of joining and branching parts provided in the flow passage, the plurality of joining and branching parts each including a plurality of first parts and a plurality of second parts, the plurality of first parts having respective first coupling ends connected with each other and respective first outer ends opposite to the first coupling ends, the plurality of second parts having respective second coupling ends connected with each other and respective second outer ends opposite to the second coupling ends, the plurality of second parts being closer to the plurality of second openings than the plurality of first parts are to the plurality of second openings in each of paths between the plurality of first openings and each of the plurality of second openings in the flow passage, the first coupling ends being connected with the second coupling ends in each of the plurality of joining and branching parts, wherein two or more of the plurality of joining and branching parts are provided in each of the paths between the plurality of first openings and each of the plurality of second openings in the flow passage, and each of the first outer ends of the plurality of first parts of one of the plurality of joining and branching parts is connected with one of the second outer ends of another one of the plurality of joining and branching parts. ### Claim 2 (depends on 1) The flow passage structure according to claim 1, wherein the paths between the plurality of first openings and each of the plurality of second openings in the flow passage have a uniform length. ### Claim 3 (depends on 1) The flow passage structure according to claim 1, wherein the plurality of first openings and the plurality of second openings are same in number. ### Claim 4 (depends on 3) The flow passage structure according to claim 3, wherein a same number of the joining and branching parts is provided in each of the paths between the plurality of first openings and each of the plurality of second openings in the flow passage. ### Claim 5 (depends on 1) The flow passage structure according to claim 1, wherein the flow passage connects each of the plurality of first openings with all of the plurality of second openings. ### Claim 6 (depends on 1) The flow passage structure according to claim 1, wherein the plurality of first parts are skew to the plurality of second parts in at least one of the plurality of joining and branching parts. ### Claim 7 (depends on 1) The flow passage structure according to claim 1 further comprising: a first face in which the plurality of first openings are formed; and a second face in which the plurality of second openings are formed. ### Claim 8 (depends on 1) The flow passage structure according to claim 1, wherein the plurality of joining and branching parts includes a plurality of first joining and branching parts and a second joining and branching part, each of the plurality of first joining and branching parts including two or more of the plurality of first parts and two or more of the plurality of second parts, the second joining and branching part including two or more of the plurality of first parts and two or more of the plurality of second parts, one of the plurality of first parts of the second joining and branching part is connected with one of the plurality of second parts of one of the plurality of first joining and branching parts, and another one of the plurality of first parts of the second joining and branching part is connected with one of the plurality of second parts of another one of the plurality of first joining and branching parts. ### Claim 9 (depends on 1) The flow passage structure according to claim 1, wherein each of the plurality of joining and branching parts includes a connecting part, the first coupling ends connected with each other are connected with the connecting part to extend from the connecting part, and the second coupling ends connected with each other are connected with the connecting part to extend from the connecting part. ### Claim 10 An intake and exhaust member comprising: a member that is connectable to a feeder capable of at least one of delivery and suction of fluid and is provided with: a plurality of first openings; a plurality of second openings; a flow passage connecting the plurality of first openings with the plurality of second openings; and a plurality of joining and branching parts provided in the flow passage, the plurality of joining and branching parts each including a plurality of first parts and a plurality of second parts, the plurality of first parts having respective first coupling ends connected with each other and respective first outer ends opposite to the first coupling ends, the plurality of second parts having respective second coupling ends connected with each other and respective second outer ends opposite to the second coupling ends, the plurality of second parts being closer to the plurality of second openings than the plurality of first parts are to the plurality of second openings in each of paths between the plurality of first openings and each of the plurality of second openings in the flow passage, the first coupling ends being connected with the second coupling ends in each of the plurality of joining and branching parts, wherein two or more of the plurality of joining and branching parts are provided in each of the paths between the plurality of first openings and each of the plurality of second openings in the flow passage, and each of the first outer ends of the plurality of first parts of one of the plurality of joining and branching parts is connected with one of the second outer ends of another one of the plurality of joining and branching parts. ### Claim 11 (depends on 10) The intake and exhaust member according to claim 10, wherein the plurality of first parts are skew to the plurality of second parts in at least one of the plurality of joining and branching parts. ### Claim 12 (depends on 10) The intake and exhaust member according to claim 10, wherein the plurality of joining and branching parts includes a plurality of first joining and branching parts and a second joining and branching part, each of the plurality of first joining and branching parts including two or more of the plurality of first parts and two or more of the plurality of second parts, the second joining and branching part including two or more of the plurality of first parts and two or more of the plurality of second parts, one of the plurality of first parts of the second joining and branching part is connected with one of the plurality of second parts of one of the plurality of first joining and branching parts, and another one of the plurality of first parts of the second joining and branching part is connected with one of the plurality of second parts of another one of the plurality of first joining and branching parts. ### Claim 13 (depends on 10) The intake and exhaust member according to claim 10, wherein each of the plurality of joining and branching parts includes a connecting part, the first coupling ends connected with each other are connected with the connecting part to extend from the connecting part, and the second coupling ends connected with each other are connected with the connecting part to extend from the connecting part. ### Claim 14 A processing apparatus comprising: a support that supports an object; a member provided with: a plurality of first openings, a plurality of second openings facing the support, a flow passage connecting the plurality of first openings with the plurality of second openings, and a plurality of joining and branching parts provided in the flow passage, the plurality of joining and branching parts each including a plurality of first parts and a plurality of second parts, the plurality of first parts having respective first coupling ends connected with each other and respective first outer ends opposite to the first coupling ends, the plurality of second parts having respective second coupling ends connected with each other and respective second outer ends opposite to the second coupling ends, the plurality of second parts being closer to the plurality of second openings than the plurality of first parts are to the plurality of second openings in each of paths between the plurality of first openings and each of the plurality of second openings in the flow passage, the first coupling ends being connected with the second coupling ends in each of the plurality of joining and branching parts; and a feeder connected to the member, the feeder being capable of at least one of: introduction of fluid to the plurality of first openings; and suction of fluid from the plurality of first openings, wherein two or more of the plurality of joining and branching parts are provided in each of the paths between the plurality of first openings and each of the plurality of second openings in the flow passage, and each of the first outer ends of the plurality of first parts of one of the plurality of joining and branching parts is connected with one of the second outer ends of another one of the plurality of joining and branching parts. ### Claim 15 (depends on 14) The processing apparatus according to claim 14, wherein the feeder is capable of introducing first fluid to at least one of the plurality of first openings and introducing second fluid different from the first fluid to at least another one of the plurality of first openings. ### Claim 16 (depends on 14) The processing apparatus according to claim 14, wherein the feeder is capable of at least one of: introduction of fluid to the plurality of first openings individually; and suction of fluid from the plurality of first openings individually. ### Claim 17 (depends on 14) The processing apparatus according to claim 14, wherein the plurality of first parts are skew to the plurality of second parts in at least one of the plurality of joining and branching parts. ### Claim 18 (depends on 14) The processing apparatus according to claim 14, wherein the plurality of joining and branching parts including a plurality of first joining and branching parts and a second joining and branching part, each of the plurality of first joining and branching parts including two or more of the plurality of first parts and two or more of the plurality of second parts, the second joining and branching part including two or more of the plurality of first parts and two or more of the plurality of second parts, one of the plurality of first parts of the second joining and branching part is connected with one of the plurality of second parts of one of the plurality of first joining and branching parts, and another one of the plurality of first parts of the second joining and branching part is connected with one of the plurality of second parts of another one of the plurality of first joining and branching parts. ### Claim 19 (depends on 14) The processing apparatus according to claim 14, wherein each of the plurality of joining and branching parts includes a connecting part, the first coupling ends connected with each other are connected with the connecting part to extend from the connecting part, and the second coupling ends connected with each other are connected with the connecting part to extend from the connecting part.