# US 10,312,050 B2 · Holder device for electron microscope

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- Number: US 10,312,050 B2
- Document ID: US10312050B2
- Status: Granted
- Kind: B2
- Application number: 14/420,722
- Filed: 2013-08-08
- Published: 2015-08-20
- Granted: 2019-06-04
- Earliest claimed: 2012-10-04
- Assignees: Snu R&Db Foundation
- Applicants: SNU R&DB Foundation
- Inventors: Young Woon Kim; Sung Dae Kim
- Web page: https://patentgrep.com/patent/US10312050B2

## CPC

- H01J 37/20: Means for supporting or positioning the object or the material; Means for adjusting diaphragms or lenses associated with the support
- H01J 37/226: {Optical arrangements for illuminating the object; optical arrangements for collecting light from the object}
- H01J 37/228: {whereby illumination or light collection take place in the same area of the discharge}
- H01J 37/26: Electron or ion microscopes; Electron or ion diffraction tubes
- H01J 37/261: {Details}
- H01J 2237/2007: Holding mechanisms
- H01J 2237/2602: Details
- H01J 2237/2808: Cathodoluminescence
- H01J: ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS (spark-gaps H01T; electric arc lamps H05B31/00; particle accelerators H05H)

## Abstract

Disclosed is a holder device for an electron microscope, which efficiently collects light emitted when electrons collide with a sample inside the electron microscope and is selectively usable in various electron microscopes since it can be easily attached to and detached from the electron microscopes. The holder device includes a frame; a sample support block configured to be supported on the frame and comprising a sample mounting portion to support an edge of a sample; a mirror unit configured to comprise an upper mirror and a lower mirror respectively arranged above and below the sample and reflect light radiating from the sample, which is mounted to the sample mounting portion and to which an electron beam is emitted, in a predetermined direction; a condensing lens configured to condense light from the mirror unit on a predetermined target; and an optical fiber configured to collect light from the condensing lens.

## Claims

### Claim 1

A holder device for an electron microscope adapted to collect cathodoluminescence from a sample, the device comprising:
a frame;
a sample support block coupled to the frame and comprising a sample mounting portion to have a sample mounted to the sample support block; and
a mirror unit comprising a mirror adapted to reflect cathodoluminescence light radiating from the sample, which is mounted to the sample mounting portion and to which an electron beam is emitted, in a predetermined direction;
a condensing lens mounted to the mirror unit and configured to condense the cathodoluminescence light from the mirror unit on an optical fiber configured to collect the cathodoluminescence light from the condensing lens.

### Claim 2 (depends on 1)

The holder device for an electron microscope according to claim 1, wherein the mirror unit comprises an upper mirror and a lower mirror respectively arranged above and below the sample, and a sample approach slit provided in between the upper mirror and the lower mirror for allowing the sample mounting portion to move in and out along a surface of the sample.

### Claim 3 (depends on 2)

The holder device for an electron microscope according to claim 2, wherein the mirror unit comprises an electron through hole via which the electron beam emitted to the sample passes.

### Claim 4 (depends on 1)

The holder device for an electron microscope according to claim 1, further comprising:
an optical fiber holder configured to hold the optical fiber; and
a coupler configured to couple the optical fiber holder and the mirror unit.

### Claim 5 (depends on 4)

The holder device for an electron microscope according to claim 4, wherein the coupler is movably supported on the frame so that the mirror unit can reciprocate between an inspection position where the sample mounting portion is placed within the mirror unit and an idle position where the sample mounting portion is separated from the mirror unit.

### Claim 6 (depends on 1)

The holder device for an electron microscope according to claim 1, wherein a slide pin extended in parallel with a lengthwise direction of the frame is coupled to the mirror unit and the sample support block to guide the mirror unit to slidably move relative to the sample support block.

### Claim 7 (depends on 6)

The holder device for an electron microscope according to claim 6, further comprising:
a support rod having one end portion to which the frame is detachably coupled and an axial hole through which the optical fiber passes; and
a grip portion provided at the other end portion of the support rod.