# US 10,310,392 B2 · Positioning device, lithographic apparatus and device manufacturing method

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- Number: US 10,310,392 B2
- Document ID: US10310392B2
- Status: Granted
- Kind: B2
- Application number: 15/776,995
- Filed: 2016-11-17
- Published: 2018-11-22
- Granted: 2019-06-04
- Earliest claimed: 2015-11-23
- Assignees: ASML Netherlands B.V.
- Applicants: Asml Netherlands B.V.
- Inventors: Hans Butler; Johannes Petrus Martinus Bernardus Vermeulen; Engelbertus Antonius Fransiscus Van Der Pasch
- Web page: https://patentgrep.com/patent/US10310392B2

## CPC

- G03F 7/70775: {Position control, e.g. interferometers or encoders for determining the stage position}
- G03F 7/70716: {Stages}
- G03F 7/70758: {Drive means, e.g. actuators, motors for long- or short-stroke modules or fine or coarse driving}
- G03F 7/70766: {Reaction force control means, e.g. countermass}
- G03F 7/709: {Vibration, e.g. vibration detection, compensation, suppression or isolation}
- G03F: PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR; (phototypographic composing devices B41B; photosensitive materials or processes for photographic purposes G03C; electrophotography, sensitive layers or processes therefor G03G)

## Abstract

A positioning device comprising an object table and a positioning module configured to position the object table. The positioning module comprises a first positioning module member configured to hold the object table, a second positioning module member configured to support the first positioning module member, and a support frame configured to support the second positioning module member. The positioning module also includes one or more actuators, a position measurement system configured to measure a position of the object table, and a control unit configured to control a position of the object table based on the measured position of the object table. The control unit is further configured to control a vertical position of the second position module member so as to maintain a top surface of the second positioning module member substantially parallel to a bottom surface of the first positioning module member.

## Claims

### Claim 1

A positioning device configured to position an object, the positioning device comprising:
an object table configured to hold the object;
a positioning module configured to position the object table, the positioning module comprising:
a first positioning module member configured to hold the object table;
a second positioning module member configured to support the first positioning module member and to co-operate with the first positioning module member to generate a first force:
a support frame configured to support the second positioning module member;
at least one actuator configured to displace the second positioning module member in a vertical direction relative to the support frame;
a position measurement system configured to measure a position of the object table with respect to a reference frame; and
a control unit configured to control a position of the object table by providing an object table control signal to the positioning module to generate the first force, based on the measured position of the object table and a set point for the object table;
wherein the control unit is further configured to control a vertical position of the second position module member by providing an actuator control signal to the at least one actuator, so as to maintain a top surface of the second positioning module member substantially parallel to a bottom surface of the first positioning module member.

### Claim 2 (depends on 1)

The positioning device according to claim 1, wherein the positioning module comprises a top module and a bottom module;
the top module comprising:
a first top module member configured to hold the object table;
a second top module member configured to co-operate with the first top module member to generate the first force on the object table;
the bottom module comprising:
a first bottom module member configured to hold the second top module member;
a second bottom module member configured to support the first bottom module member and to co-operate with the first bottom module member to generate a second force on the second top module member;
whereby the top module and the first bottom module member constitute the first positioning module member, the second bottom module member constitutes the second positioning module member and a bottom surface of the first bottom member constitutes the bottom surface of the first positioning module member.

### Claim 3 (depends on 1)

The positioning device according to claim 1, wherein the object table control signal comprises a top control signal for generating the first force on the object table and a bottom control signal for generating the second force on the second top module member to maintain a position of the first top module member relative to the second top module member within an operating range.

### Claim 4 (depends on 1)

The positioning device according to claim 1, wherein the second positioning module member is configured to move relative to the support frame in response to a horizontal force.

### Claim 5

A positioning device configured to position an object, the positioning device comprising:
an object table configured to hold the object;
a positioning module configured to position the object table, the positioning module comprising a top module and a bottom module;
the top module comprising:
a first top module member configured to hold the object table;
a second top module member configured to co-operate with the first op module member to generate a first force on the object table;
the bottom module comprising:
at least one actuator;
a first bottom module member onto which the second top module member is displaceably mounted by means of the at least one actuator; at least one actuator being configured to displace move the second top module member in a vertical direction relative to the first bottom module member;
a second bottom module member configured to support the first bottom module member and to co-operate with the first bottom module member to generate a second force on the first top module member;
a support frame configured to support the second bottom module member;
a position measurement system configured to measure a position of the object table with respect to a reference frame;
a control unit configured to control a position of the object table by providing an object table control signal to the positioning module to generate the first force and the second force, based on the measured position of the object table and a set point for the object table;
wherein the control unit is further configured to control a vertical position of the second top module member by providing an actuator control signal to the at least one actuator, in order to maintain the second top module member within the operating range of the first top module member in the vertical direction.

### Claim 6 (depends on 5)

The positioning device according to claim 5, wherein the object table control signal comprises a top control signal for generating the first force on the object table and a bottom control signal for generating the second force on the first bottom module member to so as to maintain a top surface of the second bottom module member substantially parallel to a bottom surface of the first bottom module member.

### Claim 7 (depends on 5)

The positioning device according to claim 5, wherein the second bottom module member is configured to displace relative to the support frame in response to a horizontal force.

### Claim 8 (depends on 2)

The positioning device according to claim 2, wherein the first bottom module member and the second bottom module member constitute a planar motor.

### Claim 9 (depends on 8)

The positioning device according to claim 8, wherein the planar motor comprises a two-dimensional magnet array as the first top module member and a two-dimensional coil array as the second top module member, the two-dimensional coil array being configured to co-operate with the two-dimensional magnet array to generate the second force.

### Claim 10 (depends on 2)

The positioning device according to claim 2 wherein the at least one actuator comprise one or more comprises at least one of a piezo-electrical actuator, a magnetostrictive actuator, a cam-disc type actuators actuator, and a pneumatic actuator.

### Claim 11 (depends on 2)

The positioning device according to claim 2, wherein the top module comprises a plurality of electromagnetic actuators for positioning the object table in 6 degrees of freedom.

### Claim 12 (depends on 2)

The positioning device according to claim 2, wherein the support frame is configured to displaceably support at least one of the second bottom module member and the second positioning module member, by means of an air bearing arranged between the support frame and one of the second bottom module member and the second positioning module member.

### Claim 13 (depends on 2)

The positioning device according to claim 2, wherein the support frame is configured to displaceably support one of the second bottom module member and the second positioning module member by means of flexible supports, such as leaf springs, arranged between the support frame and one of the second bottom module member and the second positioning module member.

### Claim 14 (depends on 2)

The positioning device according to claim 2, wherein the vertical position of the first top module member comprises at least one of a Z-position, an Rx-position and an Ry-position.

### Claim 15

A lithographic apparatus comprising:
an illumination system configured to condition a radiation beam;
a support constructed to support a patterning device, the patterning device being capable of imparting a pattern to a cross-section of the radiation beam to form a patterned radiation beam;
a substrate table constructed to hold a substrate; and
a projection system configured to project the patterned radiation beam onto a target portion of the substrate, wherein the lithographic apparatus further comprises a positioning device, the positioning device comprising a positioning module configured to position the object table, the positioning module comprising
a first positioning module member configured to hold the object table,
a second positioning module member configured to support the first positioning module member and to co-operate with the first positioning module member to generate a first force,
a support frame configured to support the second positioning module member,
at least one actuator configured to displace the second positioning module member in a vertical direction relative to the support frame,
a position measurement system configured to measure a position of the object table with respect to a reference frame, and
a control unit configured to control a position of the object table by providing an object table control signal to the positioning module to generate the first force, based on the measured position of the object table and a set point for the object table;
wherein the control unit is further configured to control a vertical position of the second position module member by providing an actuator control signal to the at least one actuator, so as to maintain a top surface of the second positioning module member substantially parallel to a bottom surface of the first positioning module member.

### Claim 16 (depends on 5)

The positioning device according to claim 5 wherein the at least one actuator comprises piezo-electrical actuator, a magnetostrictive actuator, a cam-disc type actuator, and a pneumatic actuator.

### Claim 17 (depends on 5)

The positioning device according to claim 5, wherein the support frame is configured to displaceably support at least one of the second bottom module member and the second positioning module member, by means of an air bearing arranged between the support frame and one of the second bottom module member and the second positioning module member.

### Claim 18

A method of manufacturing a device, the method comprising the steps of:
providing a positioning device comprising a positioning module configured to position the object table, the positioning module comprising a first positioning module member configured to hold the object table, a second positioning module member configured to support the first positioning module member and to co-operate with the first positioning module member to generate a first force, a support frame configured to support the second positioning module member, at least one actuator configured to displace the second positioning module member in a vertical direction relative to the support frame, a position measurement system configured to measure a position of the object table with respect to a reference frame, and a control unit configured to control a position of the object table by providing an object table control signal to the positioning module to generate the first force, based on the measured position of the object table and a set point for the object table, wherein the control unit is further configured to control a vertical position of the second position module member by providing an actuator control signal to the at least one actuator, so as to maintain a top surface of the second positioning module member substantially parallel to a bottom surface of the first positioning module member;
using the positioning device to position a substrate to a position at which a patterned beam of radiation may be projected;
projecting the patterned beam of radiation onto the substrate.