# US 10,310,380 B2 · High-brightness light source > Agents: this data is available as JSON from the patentgrep API and MCP server — see https://patentgrep.com/llms.txt - Number: US 10,310,380 B2 - Document ID: US10310380B2 - Status: Granted - Kind: B2 - Application number: 15/632,500 - Filed: 2017-06-26 - Published: 2018-06-07 - Granted: 2019-06-04 - Earliest claimed: 2016-12-07 - Assignees: Taiwan Semiconductor Manufacturing Company, Ltd. - Applicants: Taiwan Semiconductor Manufacturing Co., Ltd. - Inventors: Tsiao-Chen Wu; Chun-Lin Louis Chang - Web page: https://patentgrep.com/patent/US10310380B2 ## CPC - G03F 7/70033: {by plasma extreme ultraviolet [EUV] sources} - H05G 2/0023: {Constructional details of the ejection system} - G03F: PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR; (phototypographic composing devices B41B; photosensitive materials or processes for photographic purposes G03C; electrophotography, sensitive layers or processes therefor G03G) - H05G: X-RAY TECHNIQUE (investigating or analysing materials by the use of X-rays G01N23/00; apparatus for X-ray photography G03B42/02; X-ray tubes H01J35/00; TV systems having X-ray input H04N5/321) ## Abstract A method for generating high-brightness light sources is provided. The method includes introducing a gaseous material into the target material. The method further includes supplying the target material into a fuel target generator. The method also includes generating targets by forcing the target material with the gaseous material out of the fuel target generator. In addition, the method includes expanding the gaseous material in the targets to transform the targets to target mists. The method also includes focusing a main pulse laser on the target mists to generate plasma emitting high-brightness light. ## Claims ### Claim 1 A method for generating high-brightness light, comprising: generating a gaseous material in a target material, wherein the gaseous material comprises a gas compound; decomposing the gas compound in the target material to a gaseous phase product; supplying the target material having the gaseous phase product into a fuel target generator; generating targets by forcing the target material with the gaseous material out of the fuel target generator; expanding the gaseous material in the targets to transform the targets to target mists; and focusing a main pulse laser on the target mists to generate plasma that emits high-brightness light. ### Claim 2 (depends on 1) The method for generating high-brightness light as claimed in claim 1, wherein the expansion of the gaseous material in the targets comprises focusing a pre-pulse laser having a lower energy than the main pulse laser on the targets prior to the main pulse laser hitting the targets. ### Claim 3 (depends on 1) The method for generating high-brightness light as claimed in claim 1, wherein the expansion of the gaseous material in the targets comprises projecting a thermal current over the targets. ### Claim 4 (depends on 1) The method for generating high-brightness light as claimed in claim 1, wherein the generation of the gaseous material in the target material comprises supplying the gaseous material into the target material in the fuel target generator. ### Claim 5 (depends on 4) The method for generating high-brightness light as claimed in claim 4, wherein the gaseous material comprises hydrogen or inert gas comprising helium, argon, neon, or their compound. ### Claim 6 (depends on 1) The method for generating high-brightness light as claimed in claim 1, wherein the gas compound comprises stannane. ### Claim 7 A method for generating high-brightness light, comprising: providing ions into a target material to generate a gaseous material in the target material; delivering targets through a fuel target generator; expanding the targets to target mists, wherein the targets comprise the gaseous material; and focusing a main pulse laser on the target mists to generate plasma that emits high-brightness light. ### Claim 8 (depends on 7) The method for generating high-brightness light as claimed in claim 7, wherein the expansion of the targets to the target mists comprises focusing a pre-pulse laser having a lower energy than the main pulse laser on the targets prior to the main laser hitting the targets. ### Claim 9 (depends on 7) The method for generating high-brightness light as claimed in claim 7, wherein the expansion of the targets to the target mists comprises projecting a thermal current over the targets. ### Claim 10 (depends on 7) The method for generating high-brightness light as claimed in claim 7, wherein the gaseous material is generated in the target material contained in the fuel target generator. ### Claim 11 (depends on 10) The method for generating high-brightness light as claimed in claim 10, wherein the generation of the gaseous material in the target material comprises: allowing the ions to interact with ions of opposite charge in the fuel target generator so as to generate the gaseous material. ### Claim 12 (depends on 7) The method for generating high-brightness light as claimed in claim 7, wherein the gaseous material is generated in the target material contained in a storage tank; and delivering the target material with the gaseous material into the fuel target generator. ### Claim 13 A high-brightness light source, comprising: means for providing ions to generate a gaseous material in a target material; a fuel target generator configured to generate a plurality of targets from the target material that contains the gaseous material; a pre-pulse laser; a main pulse laser having a higher energy than the pre-pulse laser; and a controller configured to fire the pre-pulse laser and the main pulse laser to hit the targets in sequence. ### Claim 14 (depends on 13) The high-brightness light source as claimed in claim 13, further comprising a thermal device configured for projecting a thermal current over the targets. ### Claim 15 (depends on 13) The high-brightness light source as claimed in claim 13, wherein the means comprises an ion beam generator connected to the fuel target generator and configured to provide the ions into the fuel target generator to interact with opposite ions in the fuel target generator so as to generate the gaseous material. ### Claim 16 (depends on 13) The high-brightness light source as claimed in claim 13, further comprising: a storage tank configured to supply a target material to the fuel target generator; wherein the means comprises an ion beam generator connected to the storage tank and configured to provide the ions into the storage tank to interact with opposite ions in the storage tank so as to generate the gaseous material. ### Claim 17 (depends on 1) The method for generating high-brightness light as claimed in claim 1, wherein the gas compound is decomposed after the gas compound is blended into the target material. ### Claim 18 (depends on 17) The method for generating high-brightness light as claimed in claim 17, wherein the gas compound is blended via a blending member. ### Claim 19 (depends on 12) The method for generating high-brightness light as claimed in claim 12, further comprising allowing the ions to interact with ions of opposite charge in the storage tank so as to generate the gaseous material. ### Claim 20 (depends on 15) The high-brightness light source as claimed in claim 15, wherein the fuel target generator further comprises a charging circuit configured to provide the opposite ions in the fuel target generator.