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US 10,310,374 B2Granted
Repatternable nanoimprint lithography stamp
AssigneeInternational Business Machines Corporation
InventorsBrandon M. Kobilka, Joseph Kuczynski, Jason T. Wertz
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Abstract
A repatternable nanoimprint lithography stamp includes a magnetic substrate and magnetic core nanoparticles. The magnetic substrate includes a magnet and a magnetic mask, and the magnetic core nanoparticles are arranged in a pattern on a surface of the magnetic substrate. The pattern is defined by selective application of a magnetic field to the magnetic substrate using the magnet and the magnetic mask.
Claims18
A process comprising:
- forming a patterned magnetic substrate that includes magnetic core nanoparticles arranged in a pattern on a surface of a magnetic substrate, wherein the magnetic substrate includes a magnet and a magnetic mask, and wherein the pattern of the magnetic core nanoparticles is defined by selective application of a magnetic field to the magnetic substrate using the magnet and the magnetic mask;
- and
- removing the magnetic core nanoparticles from the surface of the magnetic substrate;
- and
- forming a second patterned magnetic substrate that includes magnetic core nanoparticles arranged in a second pattern on the surface of the magnetic substrate;
- and
- utilizing the second patterned magnetic substrate as a second repatternable nanoimprint lithography stamp.
4 more elements
A nanoimprint lithography process comprising:
- forming a patterned magnetic substrate that includes magnetic core nanoparticles arranged in a first pattern on a surface of a magnetic substrate, wherein the magnetic substrate includes a magnet and a magnetic mask, and wherein the first pattern of the magnetic core nanoparticles is defined by selective application of a magnetic field to the magnetic substrate using the magnet and the magnetic mask;
- utilizing the patterned magnetic substrate to perform a first nanoimprint lithography stamping operation;
- removing the magnetic core nanoparticles from the surface of the magnetic substrate by reversing a polarity of the magnetic field;
- forming a second patterned magnetic substrate that includes magnetic core nanoparticles arranged in a second pattern on the surface of the magnetic substrate;
- and
- utilizing the second patterned magnetic substrate to perform a second nanoimprint lithography operation.
3 more elements
Dependencies are inferred from the claim text.