# US 10,310,355 B2 · Reflective spatial light modulator with high spatial frequency border

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- Number: US 10,310,355 B2
- Document ID: US10310355B2
- Status: Granted
- Kind: B2
- Application number: 15/666,384
- Filed: 2017-08-01
- Published: 2018-02-01
- Granted: 2019-06-04
- Earliest claimed: 2016-08-01
- Assignees: Boulder Nonlinear Systems, Inc.
- Applicants: Boulder Nonlinear Systems, Inc.
- Inventors: Douglas J. McKnight
- Web page: https://patentgrep.com/patent/US10310355B2

## CPC

- G02F 1/19: based on variable-reflection or variable-refraction elements not provided for in groups G02F1/015 - G02F1/169
- G02F 1/0121: {Operation of devices; Circuit arrangements, not otherwise provided for in this subclass}
- G02F 1/1333: Constructional arrangements; {Manufacturing methods}(G02F1/135, G02F1/136 take precedence)
- G02F 1/133388: {with constructional differences between the display region and the peripheral region}
- G02F 2203/02: reflective
- G02F 2203/12: spatial light modulator
- G02F 2203/50: Phase-only modulation
- G02F: OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS

## Abstract

A spatial light modulator having an active and a peripheral region, wherein coherent light impinges on both regions, but due to a higher spatial frequency of pixels within the peripheral region, and due to biasing the peripheral region pixels to maximize dispersion of reflected light therefrom, a majority of light reflected from the peripheral region is directed outside of a three-dimensional target window. A spatial frequency of the pixels in the active region is selected such that maximum dispersion of reflected light from the active region is incident within the three-dimensional target window. In this way, incident light that does not reflect from the active region need not be absorbed, or blocked, but instead can be reflected, but still fails to interfere with the target window.

## Claims

### Claim 1

A spatial light modulator having a plurality of individually-addressed phase-modulating pixels, wherein the pixels are configured to reflect and modify phasing of a beam of coherent light incident on the spatial light modulator to produce reflected light, this phasing controlled to steer the reflected light into a target range of angles, the spatial light modulator comprising:
a substrate;
a first array of individually-addressed reflective phase modulation pixels on the substrate having a first spatial frequency of N and configured to apply a plurality of phase modulations to a central portion of the beam;
a first biasing circuitry coupled to the first array of pixels that biases the first array of pixels to impart phase delays to the central portion of the beam, thereby steering a majority of the central portion of the beam within the target range of angles;
a second array of border pixels on the substrate arranged to surround the first array of pixels, the second array of pixels having a second spatial frequency of N′, where N′>N;
a second biasing circuitry coupled to the second array of pixels that biases pixels of the second array of pixels to impart M different phase delays, thereby steering a majority of the peripheral portion of the beam outside the target range of angles, where M is a number of different groups of pixels in the second array.

### Claim 2 (depends on 1)

The spatial light modulator of claim 1, wherein M=2.

### Claim 3 (depends on 2)

The spatial light modulator of claim 2, wherein each of the two-phase delays differs from the other by B*π, where B is an odd integer.

### Claim 4 (depends on 1)

The spatial light modulator of claim 1, wherein the first biasing circuitry individually addresses pixels in the first array, and the second biasing circuitry addresses groups of electrodes in the second array.

### Claim 5 (depends on 1)

The spatial light modulator of claim 1, wherein the border pixels are arranged in rows, columns, or a checkerboard.

### Claim 6 (depends on 1)

The spatial light modulator of claim 1, the first array of pixels has two or more spatial frequencies, and wherein N is a highest spatial frequency thereof, and wherein the second array of pixels has two or more spatial frequencies, and wherein N′ is a lowest spatial frequency thereof.

### Claim 7 (depends on 1)

The spatial light modulator of claim 1, wherein the second array of pixels comprises mirrors.

### Claim 8

A method of steering reflected light, the method comprising:
arranging an SLM in a path of a coherent beam of light, the SLM comprising a substrate;
arranging a first array of individually-addressed reflective phase modulation pixels on the substrate having a first spatial frequency of N;
individually biasing pixels of the first array to impart a plurality of phase modulations to a central portion of the beam;
arranging a second array of border pixels on the substrate surrounding the first array of pixels, the second array of border pixels having a second spatial frequency of N′, where N′>N;
biasing groups of pixels in the second array of border pixels to impart M phase modulations to a peripheral portion of the beam, where M is a number of different groups of pixels in the second array of border pixels.

### Claim 9

A spatial light modulator comprising:
a first array of individually-addressed pixels having a first spatial frequency;
a second array of border pixels arranged around the first array, and having a second spatial frequency higher than the first spatial frequency;
control circuitry coupled to and biasing the first and second arrays to impart a plurality of phase modulations to the individually-addressed pixels and to impart an M number of phase modulations to the border pixels, where M is a number of electrically-connected groups of pixels in the second array, and a different phase modulation is imparted to each of the groups.
