# US 10,310,279 B2 · Color splitter structure, method of manufacturing the same, image sensor including color splitter structure, and optical apparatus including image sensor > Agents: this data is available as JSON from the patentgrep API and MCP server — see https://patentgrep.com/llms.txt - Number: US 10,310,279 B2 - Document ID: US10310279B2 - Status: Granted - Kind: B2 - Application number: 15/280,273 - Filed: 2016-09-29 - Published: 2017-03-30 - Granted: 2019-06-04 - Earliest claimed: 2015-09-30 - Assignees: Samsung Electronics Co., Ltd. - Applicants: Samsung Electronics Co., Ltd. - Inventors: Ilhwan Kim; Doyoon Kim - Web page: https://patentgrep.com/patent/US10310279B2 ## CPC - G02B 27/1013: {for colour or multispectral image sensors, e.g. splitting an image into monochromatic image components on respective sensors (spectral imaging systems G01J)} - G02B 27/1073: {characterized by manufacturing or alignment methods} - G02B 27/1086: {operating by diffraction only} - H04N 23/16: Optical arrangements associated therewith, e.g. for beam-splitting or for colour correction - H10F 39/182: {Colour image sensors} - H10F 39/8053: {Colour filters} - H10F 39/806: {Optical elements or arrangements associated with the image sensors} - H10F 39/8063: {Microlenses} - G02B: OPTICAL ELEMENTS, SYSTEMS OR APPARATUS - H04N: PICTORIAL COMMUNICATION, e.g. TELEVISION - H10F: INORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION ## Abstract Provided are color splitter structures, methods of manufacturing the color splitter structures, image sensors including the color splitter structures, methods of manufacturing the image sensors, and optical apparatuses including the image sensors. A color splitter may include a plurality of color splitter elements configured to divide an incident light into a plurality of exit lights according to wavelengths, and at least one of the color splitter elements may include a first element portion; a second element portion disposed to shift to the first element portion so as to partially overlap with the first element portion; and an etch stop layer provided between the first and second element portions. ## Claims ### Claim 1 A color splitter comprising: a plurality of color splitter elements configured to divide an incident light into a plurality of exit lights according to wavelengths, wherein at least one of the color splitter elements comprises: a first element portion; a second element portion disposed to partially overlap with the first element portion; and an etch stop layer formed of a material having a predetermined etch selectivity with regard to the first element portion or the second element portion, and disposed between the first element portion and the second element portion, wherein a part of a surface of the etch stop layer is in direct contact with the second element portion and a rest of the surface of the etch stop layer is apart from the second element portion and in direct contact with a dielectric material; or a part of another surface of the etch stop layer is in direct contact with the first element portion and a rest of the other surface of the etch stop layer is apart from the first element portion and in direct contact with the dielectric material. ### Claim 2 (depends on 1) The color splitter of claim 1, wherein the etch stop layer entirely covers a surface of the first element portion which faces the second element portion. ### Claim 3 (depends on 1) The color splitter of claim 1, wherein the etch stop layer entirely covers a surface of the second element portion which faces the first element portion. ### Claim 4 (depends on 1) The color splitter of claim 1, wherein the predetermined selectivity of the material of the etch stop layer is about 1.5 or more with respect to the first element portion or the second element portion. ### Claim 5 (depends on 1) The color splitter of claim 1, wherein at least one of the first and second element portions comprises an oxide material, and the etch stop layer comprises a non-oxide material. ### Claim 6 (depends on 1) The color splitter of claim 1, wherein the etch stop layer comprises a nitride material, and at least one of the first and second element portions comprises a non-nitride material. ### Claim 7 (depends on 1) The color splitter of claim 1, wherein at least one of the first and second element portions comprises at least one of a titanium (Ti) oxide, a niobium (Nb) oxide, and a tantalum (Ta) oxide, and the etch stop layer comprises a silicon (Si) nitride. ### Claim 8 (depends on 1) The color splitter of claim 1, wherein at least one of the first and second element portions comprises a Si nitride, and the etch stop layer comprises a Si oxide. ### Claim 9 (depends on 1) The color splitter of claim 1, further comprising a dielectric layer having the dielectric material, wherein the color splitter elements are buried in the dielectric layer. ### Claim 10 (depends on 1) The color splitter of claim 1, wherein a color splitter element disposed at a center portion of the plurality of color splitter elements comprises an aligned stack of first and second element portions which are stacked without misalignment along an optical axis, and each of the color splitter elements disposed in a region other than the center portion of the plurality of color splitter elements comprises a misaligned stack of first and second element portions. ### Claim 11 (depends on 10) The color splitter of claim 10, wherein a misalignment distance between the first element portion and the second element portion increases in proportion to a distance away from the center portion. ### Claim 12 (depends on 10) The color splitter of claim 10, wherein the first element portion and the second element portion disposed in the region other than the center portion, are aligned with a traveling direction of an incident light that is obliquely incident thereon. ### Claim 13 (depends on 1) The color splitter of claim 1, wherein the at least one of the color splitter elements further comprises: a third element portion overlapping partially with the second element portion; and a second etch stop layer provided between the second element portion and the third element portion. ### Claim 14 (depends on 1) An image sensor comprising: the at least one of the color splitter elements of claim 1; and a pixel array comprising a plurality of pixels configured to detect a light passing out through the color splitter. ### Claim 15 (depends on 14) An optical apparatus comprising: at least one lens; and the image sensor of claim 14, the image sensor being configured to convert lights passing through the at least one lens into electrical image signals.