# US 10,310,183 B2 · Template-based epitaxial growth of lattice mismatched materials on silicon

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- Number: US 10,310,183 B2
- Document ID: US10310183B2
- Status: Granted
- Kind: B2
- Application number: 15/660,916
- Filed: 2017-07-26
- Published: 2019-01-31
- Granted: 2019-06-04
- Earliest claimed: 2017-07-26
- Assignees: Cisco Technology, Inc.
- Applicants: Cisco Technology, Inc.
- Inventors: Harry E. Ruda; Igor Savelyev; Marina Blumin; Christina F. Souza
- Web page: https://patentgrep.com/patent/US10310183B2

## CPC

- G02B 6/1228: {Tapered waveguides, e.g. integrated spot-size transformers (for coupling with fibres G02B6/305)}
- G02B 6/12004: {Combinations of two or more optical elements}
- H01S 5/021: {Silicon based substrates}
- H01S 5/3013: {AIIIBV compounds}
- G02B: OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- H01S: DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL

## Abstract

The embodiments of the present disclosure describe forming a semiconductor layer (e.g., III-V semiconductor material) on a silicon substrate using a template. In one embodiment, the template is patterned to form a plurality of cylindrical openings or pores that expose a portion of the underlying silicon substrate. The material of the semiconductor is disposed into the pores to form individual crystals or monocrystals. Because of the lattice mismatch between the crystalline silicon substrate and the material of the semiconductor layer, the monocrystals may include defects. However, the height of the pores is controlled such that these defects terminate at a sidewall of the template. Thus, the monocrystals can be used to form a single sheet (or single crystal) semiconductor layer above that template that is defect free.

## Claims

### Claim 1

A photonic device, comprising:
a crystalline silicon substrate;
a template comprising an inert material disposed on the silicon substrate, wherein the template comprises a plurality of pores that extends from a top surface of the template to the silicon substrate,
wherein a respective monocrystal of a semiconductor material is disposed in each of the plurality of pores, and wherein the semiconductor material has a different lattice constant than the silicon substrate; and
a semiconductor layer disposed on the top surface, wherein the semiconductor layer is epitaxially disposed on the respective monocrystals to form a single crystalline layer.

### Claim 2 (depends on 1)

The photonic device of claim 1, wherein each of the plurality of pores contains only one monocrystal.

### Claim 3 (depends on 1)

The photonic device of claim 1, wherein at least one of the respective monocrystal contains a defect resulting from lattice mismatch, wherein the defect extends at an offset angle relative to a surface of the silicon substrate on which the template is disposed.

### Claim 4 (depends on 3)

The photonic device of claim 3, wherein the defect terminates at a sidewall of one of the plurality of pores, wherein the sidewall is perpendicular to the surface of the silicon substrate.

### Claim 5 (depends on 4)

The photonic device of claim 4, wherein a height of the sidewall is between 10 nanometers and 30 nanometers.

### Claim 6 (depends on 1)

The photonic device of claim 1, wherein a diameter of the plurality of pores is less than 100 nanometers.

### Claim 7 (depends on 6)

The photonic device of claim 6, wherein the diameter of the plurality of pores is greater than 15 nanometers.

### Claim 8 (depends on 1)

The photonic device of claim 1, wherein a pitch between the plurality of pores is less than 100 nanometers.

### Claim 9 (depends on 1)

The photonic device of claim 1, further comprising:
at least one of an optical source or gain media comprising an optical mode region configured to output light, wherein the optical source comprises the semiconductor layer, and wherein the semiconductor layer is a III-V semiconductor.

### Claim 10 (depends on 9)

The photonic device of claim 9, further comprising:
a waveguide disposed in the silicon substrate, wherein the waveguide is optically coupled to the optical source, wherein a distance between the waveguide and the optical mode region is less than three microns.