# US 10,310,180 B2 · Thermal management for photonic integrated circuits > Agents: this data is available as JSON from the patentgrep API and MCP server — see https://patentgrep.com/llms.txt - Number: US 10,310,180 B2 - Document ID: US10310180B2 - Status: Granted - Kind: B2 - Application number: 15/478,715 - Filed: 2017-04-04 - Published: 2017-07-20 - Granted: 2019-06-04 - Earliest claimed: 2012-08-29 - Assignees: Aurrion, Inc. - Applicants: Aurrion, Inc. - Inventors: Anand Ramaswamy; Jonathan Edgar Roth; Erik Norberg; Brian Koch - Web page: https://patentgrep.com/patent/US10310180B2 ## CPC - G02B 6/122: Basic optical elements, e.g. light-guiding paths - G02B 6/12004: {Combinations of two or more optical elements} - G02B 6/13: Integrated optical circuits characterised by the manufacturing method - G02B 6/4269: {with heat sinks or radiation fins} - G02B 2006/12061: {Silicon} - G02B 2006/12135: {Temperature control} - G02B: OPTICAL ELEMENTS, SYSTEMS OR APPARATUS ## Abstract Embodiments of the invention describe apparatuses, systems, and methods of thermal management for photonic integrated circuits (PICs). Embodiments include a first device and a second device comprising including waveguides, wherein the first and second devices have different thermal operating conditions. A first region is adjacent to a waveguide of the first device, wherein its optical mode is to be substantially confined by the first region, and wherein the first region has a first thermal conductivity to dissipate heat based on the thermal operating condition of the first device. A second region is adjacent to a waveguide of the second device, wherein its optical mode is to be substantially confined by the second region, and wherein the second region has a second thermal conductivity to dissipate heat based on the thermal operating condition of the second device. In some embodiments, thermal cross talk is reduced without significantly affecting optical performance. ## Claims ### Claim 1 A layered photonic integrated circuit, comprising: a silicon layer having a top side that defines a plane extending in a lateral direction; a first waveguide positioned on the top side of the silicon layer; a first region positioned on a bottom side of the silicon layer and laterally aligned with the first waveguide, the first region having a first thermal conductivity, the first region being a buried oxide layer; a second waveguide positioned on the top side of the silicon layer and laterally offset from the first waveguide; and a second region positioned on the bottom side of the silicon layer and laterally aligned with the second waveguide, the second region having a second thermal conductivity different from the first thermal conductivity. ### Claim 2 (depends on 1) The layered photonic integrated circuit of claim 1, wherein the first and second regions are separated by a gap. ### Claim 3 (depends on 1) The layered photonic integrated circuit of claim 1, wherein the first region extends laterally beyond opposing lateral edges of the first waveguide. ### Claim 4 (depends on 1) The layered photonic integrated circuit of claim 1, wherein the silicon layer optically isolates the first waveguide from the first region. ### Claim 5 (depends on 1) The layered photonic integrated circuit of claim 1, wherein the second region extends laterally beyond opposing lateral edges of the second waveguide. ### Claim 6 (depends on 1) The layered photonic integrated circuit of claim 1, wherein the second region is a diamond layer. ### Claim 7 (depends on 1) The layered photonic integrated circuit of claim 1, wherein the silicon layer optically isolates the second waveguide from the second region. ### Claim 8 (depends on 1) The layered photonic integrated circuit of claim 1, wherein the second region is thicker than the first region. ### Claim 9 (depends on 1) The layered photonic integrated circuit of claim 1, wherein the first waveguide comprises a passive optical device. ### Claim 10 (depends on 1) The layered photonic integrated circuit of claim 1, wherein the second waveguide comprises an active optical device. ### Claim 11 (depends on 1) The layered photonic integrated circuit of claim 1, wherein: the first and second thermal conductivities represent respective rates of heat transfer in the first and second regions; and a rate of heat transfer in the first region is different from a rate of heat transfer in the second region. ### Claim 12 A layered photonic integrated circuit comprising: a silicon layer having a top side that defines a plane extending in a lateral direction; a first waveguide positioned on the top side of the silicon layer; a first region positioned on a bottom side of the silicon layer and laterally aligned with the first waveguide, the first region having a first thermal conductivity; a second waveguide positioned on the top side of the silicon layer and laterally offset from the first waveguide; a second region positioned on the bottom side of the silicon layer and laterally aligned with the second waveguide, the second region having a second thermal conductivity different from the first thermal conductivity; and a silicon substrate positioned on a bottom side of the first region and a bottom side of the second region. ### Claim 13 (depends on 12) The layered photonic integrated circuit of claim 12, wherein the first and second regions are separated by a gap that extends through the silicon substrate to the silicon layer. ### Claim 14 (depends on 12) The layered photonic integrated circuit of claim 12, wherein the silicon layer optically isolates the first waveguide from the first region, and the silicon layer optically isolates the second waveguide from the second region. ### Claim 15 A layered photonic integrated circuit, comprising: a silicon layer having a top side that defines a plane extending in a lateral direction; a passive optical device positioned on the top side of the silicon layer; a buried oxide layer positioned on a bottom side of the silicon layer and laterally aligned with the passive optical device, the buried oxide layer having a first thermal conductivity; an active optical device positioned on the top side of the silicon layer and laterally offset from the passive optical device; and a diamond layer positioned on the bottom side of the silicon layer and laterally aligned with the active optical device, the diamond layer having a second thermal conductivity greater than the first thermal conductivity. ### Claim 16 (depends on 15) The layered photonic integrated circuit of claim 15, wherein the buried oxide layer and the diamond layer are separated by a gap. ### Claim 17 (depends on 15) The layered photonic integrated circuit of claim 15, further comprising a silicon substrate positioned on a bottom side of the buried oxide layer and a bottom side of the diamond layer, wherein the buried oxide layer and the diamond layer are separated by a gap that extends through the silicon substrate to the silicon layer. ### Claim 18 (depends on 15) The layered photonic integrated circuit of claim 15, wherein: the buried oxide layer extends laterally beyond opposing lateral edges of the passive optical device; and the diamond layer extends laterally beyond opposing lateral edges of the active optical device. ### Claim 19 (depends on 15) The layered photonic integrated circuit of claim 15, wherein the diamond layer is thicker than the buried oxide layer. ### Claim 20 A method of manufacturing a layered photonic integrated circuit, the method comprising: forming a silicon layer having a top side that defines a plane extending in a lateral direction; forming a first waveguide positioned on the top side of the silicon layer; forming a first region positioned on a bottom side of the silicon layer and laterally aligned with the first waveguide, the first region having a first thermal conductivity, the first region being a buried oxide layer; forming a second waveguide positioned on the top side of the silicon layer and laterally offset from the first waveguide; and forming a second region positioned on the bottom side of the silicon layer and laterally aligned with the second waveguide, the second region having a second thermal conductivity different from the first thermal conductivity.