Optical waveguide and method for manufacturing the same
AssigneeIndustrial Technology Research Institute
InventorsChih-Jen Yang, Li-Ting Huang, Dong-Sen Chen, Chyi-Ming Leu
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Abstract
An optical waveguide includes a lower clad layer, a core layer, and an upper clad layer, wherein the core layer is disposed between the lower clad layer and the upper clad layer. The lower clad layer has a composition including unetchable closed-loop polyimide and plate-shaped clay in a range of 20 wt %-60 wt %. The core layer has a composition including etchable closed-loop polyimide and plate-shaped clay in a range of 20 wt %-60 wt %. The upper clad layer has a composition including an organic material and plate-shaped clay in a range of 20 wt %-60 wt %. The core layer has a refractive index lager than that of the upper clad layer and the lower clad layer.
Claims16
An optical waveguide, comprising:
- a lower clad layer, having a composition comprising an unetchable closed-loop polyimide and a plate-shaped clay, wherein the plate-shaped clay of the lower clad layer is between 20 wt % and 60 wt %;
- a core layer, having a composition comprising an etchable closed-loop polyimide and a plate-shaped clay, wherein the plate-shaped clay of the core layer is between 20 wt % and 60 wt %;
- and
- an upper clad layer, having a composition comprising a polymer and a plate-shaped clay, wherein the plate-shaped clay of the upper clad layer is between 20 wt % and 60 wt %, the core layer is disposed between the lower clad layer and the upper clad layer, and the core layer has a refractive index lager than a refractive index of the upper clad layer and a refractive index of the lower clad layer.
A method for manufacturing an optical waveguide, comprising:
- providing a lower clad layer, wherein the lower clad layer has a composition including an unetchable closed-loop polyimide and a plate-shaped clay, and the plate-shaped clay of the lower clad layer is between 20 wt % and 60 wt %;
- coating a core layer on the lower clad layer, wherein the core layer has a composition including an etchable closed-loop polyimide and a plate-shaped clay, and the plate-shaped clay of the core layer is between 20 wt % and 60 wt %;
- etching the core layer;
- and
- coating an upper clad layer on the lower clad layer and covering the core layer, wherein the upper clad layer has a composition including a polymer and a plate-shaped clay, the plate-shaped clay of the upper clad layer is between 20 wt % and 60 wt %,
- wherein the core layer has a refractive index lager than a refractive index of the upper clad layer and a refractive index of the lower clad layer.
Dependencies are inferred from the claim text.