# US 10,310,144 B2 · Image sensor having photodetectors with reduced reflections > Agents: this data is available as JSON from the patentgrep API and MCP server — see https://patentgrep.com/llms.txt - Number: US 10,310,144 B2 - Document ID: US10310144B2 - Status: Granted - Kind: B2 - Application number: 15/178,271 - Filed: 2016-06-09 - Published: 2017-12-14 - Granted: 2019-06-04 - Earliest claimed: 2016-06-09 - Assignees: Intel Corporation - Applicants: Intel Corporation - Inventors: Khaled Ahmed; Richmond Hicks - Web page: https://patentgrep.com/patent/US10310144B2 ## CPC - G02B 1/118: having sub-optical wavelength surface structures designed to provide an enhanced transmittance, e.g. moth-eye structures - H04N 23/54: Mounting of pick-up tubes, electronic image sensors, deviation or focusing coils - H10F 39/805: {Coatings} - H10F 39/8063: {Microlenses} - G02B 3/0056: {arranged along two different directions in a plane, e.g. honeycomb arrangement of lenses (G02B3/0043 takes precedence; miniaturised objectives for electronic devices employing wafer level optics G02B13/0085)} - G02B: OPTICAL ELEMENTS, SYSTEMS OR APPARATUS - H04N: PICTORIAL COMMUNICATION, e.g. TELEVISION - H10F: INORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION ## Abstract An image sensor is described that has photodetectors with reduced reflections. In one example the image sensor has a plurality of photodetectors on a silicon substrate. The images sensor has a top surface and an anti-reflective coating over the photodetectors, the coating having an array of sub-wavelength sized features. ## Claims ### Claim 1 An image sensor comprising: a plurality of photodetectors on a silicon substrate and having a top surface; an anti-reflective coating on the top surface over the photodetectors, the anti-reflective coating having an array of sub-wavelength sized features, wherein each of the sub-wavelength sized features comprises self-assembling block copolymer micro domains of a self-assembling block copolymer thin film that comprises alumina to provide a self-assembled alumina pattern over the photodetectors; and wherein the sub-wavelength sized features comprise cones extending from the top surface. ### Claim 2 (depends on 1) The apparatus of claim 1, wherein the self-assembling block copolymer thin film is a self-assembling cylindrical phase block copolymer thin film, wherein each of the cones comprises the alumina domains including the alumina that is built over nanocylinders of the self-assembling cylindrical phase block copolymer thin film. ### Claim 3 (depends on 2) The apparatus of claim 2, wherein the cones have a height of more than about 0.4 times the longest wavelength of light that is to be passed through the coating. ### Claim 4 (depends on 2) The apparatus of claim 2, wherein the cones have a spacing of less than about one half the longest wavelength of light that is to be passed through the coating. ### Claim 5 (depends on 2) The apparatus of claim 2, wherein the cones are smaller than a wavelength of light to be received at the photodetectors and have a pattern repeat smaller than a wavelength of light to be received at the photodetectors. ### Claim 6 (depends on 1) The apparatus of claim 1, further comprising a micro-lens over each photodetector and wherein the array of sub-wavelength sized features is over each respective micro-lens. ### Claim 7 (depends on 1) The apparatus of claim 1, wherein the self-assembling block copolymer thin film is made from monomers, the apparatus further comprising: a polished passivation layer over the top surface; and a cross-linked pre-treatment layer made of the same monomers as the self-assembling block copolymer thin film. ### Claim 8 (depends on 1) The apparatus of claim 1, wherein the features have a graded index of refraction transition from an ambient index of refraction to an index of refraction of the photodetectors. ### Claim 9 (depends on 1) The apparatus of claim 1, further comprising micro-lenses over the photodetectors, the top surface being over the micro-lenses and wherein the features are formed over the top surface. ### Claim 10 (depends on 1) The apparatus of claim 1, wherein each feature has a base attached to the top surface, a conical surface that extends from the base and a tip opposite the base and narrower than the base. ### Claim 11 (depends on 10) The apparatus of claim 10 wherein the features are arrayed in parallel rows and columns. ### Claim 12 A method comprising: forming an array of photodetector pixels on a silicon substrate; applying a thin film of a self-assembling block copolymer over the pixels; etching the thin film to form sub-wavelength features on the silicon as an anti-reflection coating over the silicon of the substrate, wherein each of the sub-wavelength sized features comprises self-assembling block copolymer micro domains of the self-assembling block copolymer thin film that comprises alumina to provide a self-assembled alumina pattern; and wherein the sub-wavelength features comprise an array of cones. ### Claim 13 (depends on 12) The method of claim 12, wherein the self-assembling block copolymer is a self-assembling cylindrical phase block copolymer thin film, the method further comprising loading the self-assembling block copolymer micro domains with the alumina and wherein etching comprises anisotropically etching the alumina domains and the thin film using inductively coupled plasma-reactive ion etching. ### Claim 14 (depends on 12) The method of claim 12, further comprising applying a passivation layer over the substrate and polishing the passivation layer before applying the thin film. ### Claim 15 (depends on 14) The method of claim 14, wherein the self-assembling block copolymer thin film is made from monomers, the method further comprising: applying a cross-linked pretreatment layer made of the same monomers as the self-assembling block copolymer thin film to the passivation layer; and annealing the self-assembling block copolymer thin film so that the self-assembling block copolymer thin film self assembles nanocylinders and wherein building the alumina domains comprises building the alumina domains over the self-assembled nanocylinders. ### Claim 16 (depends on 15) The method of claim 15, wherein building alumina domains comprises loading the block copolymer thin film with alumina by exposing the self-assembling block copolymer thin film to sequential infiltration synthesis and wherein anisotropically etching comprises etching the block copolymer thin film to leave an array of cones. ### Claim 17 (depends on 12) The method of claim 12, wherein the sub-wavelength features have a pattern repeat smaller than a wavelength of light to be received at the photodetectors. ### Claim 18 A system comprising: a communications chip to send images to external devices; a processor coupled to the communications chip to send images to the communications chip; and an image sensor coupled to the image processor to send captured image data to the image processor, the image sensor having a plurality of photodetectors on a silicon substrate and having a top surface, and an anti-reflective coating over the photodetectors, the anti-reflective coating having an array of sub-wavelength sized cones, wherein each of the sub-wavelength sized cones comprises nanocylinders of a self-assembling cylindrical phase block copolymer thin film that comprises alumina to provide a self-assembled alumina pattern. ### Claim 19 (depends on 18) The system of claim 18, wherein the image sensor further comprises a micro-lens over each photodetector to direct light to the photodetectors and wherein the sub-wavelength sized cones are over the micro-lenses. ### Claim 20 (depends on 18) The system of claim 18, wherein the cones comprise the alumina loaded into the block copolymer by atomic layer deposition that has been etched to form the cones.