# US 10,310,106 B2 · Dual/multiple-energy x-ray sensor with separation between pixels and active circuitry > Agents: this data is available as JSON from the patentgrep API and MCP server — see https://patentgrep.com/llms.txt - Number: US 10,310,106 B2 - Document ID: US10310106B2 - Status: Granted - Kind: B2 - Application number: 15/332,120 - Filed: 2016-10-24 - Published: 2017-04-27 - Granted: 2019-06-04 - Earliest claimed: 2015-10-24 - Assignees: X-Scan Imaging Corporation - Applicants: Xscan Imaging, Inc. - Inventors: Shizu Li; Linbo Yang; Nguyen Phuoc Luu; Chinlee Wang; Hsin-Fu Tseng - Web page: https://patentgrep.com/patent/US10310106B2 ## CPC - G01T 1/242: {Stacked detectors, e.g. for depth information (constructional or manufacturing details H10W90/00)} - G01T 1/20181: {Stacked detectors, e.g. for measuring energy and positional information (using a combination of different types of scintillation detectors, e.g. phoswich detectors, G01T1/2008)} - G01T 1/20182: {Modular detectors, e.g. tiled scintillators or tiled photodiodes (stacked detectors G01T1/20181)} - G01T 1/2019: {Shielding against direct hits} - G01T: MEASUREMENT OF NUCLEAR OR X-RADIATION (radiation analysis of materials, mass spectrometry G01N23/00; tubes for determining the presence, intensity, density or energy of radiation or particles H01J47/00) ## Abstract A dual/multi-energy x-ray image sensor with stacked two-dimensional pixel arrays. Each pixel in one pixel array has a corresponding “overlaid” pixel in the other pixel array. The pixel arrays are stacked parallel and aligned so that they are nominally normal to the x-ray path, and so that a straight path taken by an x-ray photon from the x-ray source to a pixel in one pixel array will also nominally intersect the corresponding pixel in the other pixel array(s). The energy image sensor provides an x-ray scanning detector system, which has increased signal levels and signal-to-noise ratios over dual- or multi-energy detectors using linear diode arrays, specifically when the pixel arrays are TDI pixel arrays that offer higher sensitivities in high-speed line-scan applications. Signal processing circuitry is placed on a periphery of the pixel arrays and shielded. Dual-to-multiple energy applications can be accomplished by increasing the number of stacked pixel arrays. ## Claims ### Claim 1 A multi-energy x-ray detector, comprising: a plurality of two-dimensional x-ray detecting pixel arrays disposed in a vertically parallel arrangement directly above each other, the arrangement positioning corresponding pixels in the pixel arrays that are vertically parallel to each other to be nominally normal to a straight-line x-ray path emanating from a x-ray source disposed above or below the plurality of pixel arrays; MOS devices for receiving signals from the pixels, the MOS devices disposed on the pixel arrays and positioned away from the pixels; and an x-ray shielding disposed one of the pixel arrays, positioned to shield the MOS devices on all the pixel arrays, wherein each pixel array has a different spectral response. ### Claim 2 (depends on 1) The multi-energy x-ray detector of claim 1, wherein the MOS devices are positioned at a coincident end portion of the pixel arrays. ### Claim 3 (depends on 1) The multi-energy x-ray detector of claim 1, wherein the pixels contain scintillator material that converts x-ray photons to lower-energy or visible photons that are detectable by photodiodes. ### Claim 4 (depends on 1) The multi-energy x-ray detector of claim 1, wherein the pixels contain photodiodes or photoelements that are resistant to radiation damage. ### Claim 5 (depends on 4) The multi-energy x-ray detector of claim 4, wherein the photodiodes or photoelements and the MOS devices are integrated on a semiconductor chip. ### Claim 6 (depends on 5) The multi-energy x-ray detector of claim 5, wherein the semiconductor chip is a silicon CMOS chip. ### Claim 7 (depends on 6) The multi-energy x-ray detector of claim 6, wherein the MOS devices are CMOS field-effect transistors. ### Claim 8 (depends on 5) The multi-energy x-ray detector of claim 5, wherein the semiconductor chip is designed or processed with radiation hardening. ### Claim 9 (depends on 1) The multi-energy x-ray detector of claim 1, wherein the pixel arrays are comprised of a plurality of smaller separate pixel arrays, the smaller pixel arrays tiled together in a lateral, arced, staggered, or overlapping arrangement to form a full pixel array. ### Claim 10 (depends on 1) The multi-energy x-ray detector of claim 1, wherein the pixel arrays are separated by a filter that attenuates certain energies of x-rays. ### Claim 11 (depends on 1) The multi-energy x-ray detector of claim 1, wherein visible-light optics are not used. ### Claim 12 (depends on 1) The multi-energy x-ray detector of claim 1, wherein the pixels of the pixel arrays are not in a rectangular grid pattern. ### Claim 13 (depends on 1) The multi-energy x-ray detector of claim 1, further comprising a software algorithm to compensate for parallax or misalignment between corresponding pixels. ### Claim 14 (depends on 1) The multi-energy x-ray detector of claim 1, wherein the x-ray shielding is a plurality of x-ray shields. ### Claim 15 (depends on 1) The multi-energy x-ray detector of claim 1, wherein the plurality of pixel arrays are a set of two pixel arrays, wherein one pixel array of the set of pixel arrays is configured to detect higher-energy x-ray photons than another pixel array of the set of pixel arrays, to form a dual-energy x-ray detector. ### Claim 16 A method of multi-energy x-ray detecting imaging, comprising: passing x-rays from an x-ray source through a plurality of pixel arrays disposed in a vertically parallel arrangement directly above each other, the arrangement positioning corresponding pixels in the pixel arrays that are vertically parallel to each other to be nominally normal to a straight-line path of the x-rays, wherein each pixel array possesses a different spectral response; converting the x-rays in the pixel arrays to electrical charge signals proportional to the x-ray signals for the corresponding spectral responses; processing electrical charge signals in MOS devices that are also disposed on the plurality of pixel arrays, but shielded from incident x-rays; and combining the electrical charge signals from corresponding pixels in the plurality of pixel arrays to generate a multi-energy image. ### Claim 17 (depends on 16) The method of claim 16, wherein the combining the electrical charge signals forms a spectral image. ### Claim 18 (depends on 16) The method of claim 16, further comprising tilling smaller separate pixel arrays together in a lateral, arced, staggered, or overlapping arrangement to form a full pixel array of the plurality of the pixel arrays. ### Claim 19 (depends on 16) The method of claim 16, further comprising adding a filter between the pixel arrays to attenuate certain energies of x-rays. ### Claim 20 (depends on 16) The method of claim 16, wherein the plurality of pixel arrays are a set of two pixel arrays, one pixel array of the set of pixel arrays being configured to detect higher-energy x-ray photons than another pixel array of the set of pixel arrays, to generate a dual-energy image.