# US 10,310,085 B2 · Photonic integrated distance measuring pixel and method of distance measurement

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- Number: US 10,310,085 B2
- Document ID: US10310085B2
- Status: Granted
- Kind: B2
- Application number: 15/643,744
- Filed: 2017-07-07
- Published: 2019-01-10
- Granted: 2019-06-04
- Earliest claimed: 2017-07-07
- Assignees: Mezmeriz, Inc.
- Applicants: Mezmeriz Inc.
- Inventors: Shahyaan Desai; Scott G. Adams; Clifford A. Lardin
- Web page: https://patentgrep.com/patent/US10310085B2

## CPC

- G01S 17/32: using transmission of continuous waves, whether amplitude-, frequency-, or phase-modulated, or unmodulated
- G01S 7/4811: {common to transmitter and receiver}
- G01S 7/4812: {transmitted and received beams following a coaxial path}
- G01S 7/4817: {relating to scanning}
- G01S 7/4818: {using optical fibres}
- G01S 7/4917: {superposing optical signals in a photodetector, e.g. optical heterodyne detection}
- G01S 17/34: using transmission of continuous, frequency-modulated waves while heterodyning the received signal, or a signal derived therefrom, with a locally-generated signal related to the contemporaneously transmitted signal
- G02B 6/12004: {Combinations of two or more optical elements}
- G02B 26/0833: {the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD (G02B26/0825 takes precedence; micromechanical devices in general B81B)}
- G02B 26/101: {with both horizontal and vertical deflecting means, e.g. raster or XY scanners (colour television using laser beams scanning a display screen H04N9/3129)}
- G02B 6/4208: {using non-reciprocal elements or birefringent plates, i.e. quasi-isolators (optical isolators per se G02F1/093, G02F1/0955)}
- G02B 2006/12102: {Lens}
- G02B 2006/12104: {Mirror; Reflectors or the like}
- G02B 2006/12121: {Laser}
- G02B 2006/12138: {Sensor}
- G01S: RADIO DIRECTION-FINDING; RADIO NAVIGATION; DETERMINING DISTANCE OR VELOCITY BY USE OF RADIO WAVES; LOCATING OR PRESENCE-DETECTING BY USE OF THE REFLECTION OR RERADIATION OF RADIO WAVES; ANALOGOUS ARRANGEMENTS USING OTHER WAVES
- G02B: OPTICAL ELEMENTS, SYSTEMS OR APPARATUS

## Abstract

A distance-measuring pixel apparatus includes a photonic integrated circuit disposed on a common substrate that further includes a photonic integrated circuit substrate having disposed thereon two 3 dB directional couplers, a GRIN lens, and a partially reflecting Faraday mirror having a first side that is optomechanically coupled to a second side of the GRIN lens; and a source laser, a first photodetector, and a second photodetector. A related distance measuring method includes, using the distance-measuring pixel apparatus, generating a local oscillator (LO) beam, generating an echo, combining the LO beam and the echo beam, splitting the combined LO beam and the echo beam, and producing a modulation of the photodetector assembly photocurrent at a frequency that encodes the distance of a remote object.

## Claims

### Claim 1

A distance-measuring pixel apparatus, comprising:
I.) a photonic integrated circuit disposed on a common substrate, comprising:
a photonic integrated circuit substrate having disposed thereon,
a first 3 dB directional coupler having first and second output ports and first and second input ports;
a second 3 dB directional coupler having first and second output ports and first and second input ports,
wherein the second input port of the first 3 dB directional coupler is directly optically coupled to the first input port of the second 3 dB directional coupler;
a GRIN lens having a first side that is optomechanically coupled to the first output port of the first 3 dB directional coupler;
a partially reflecting Faraday mirror having a first side that is optomechanically coupled to a second side of the GRIN lens and configured to reflect between 0.1%, to 50% of light emitted from the first output port of the first 3 dB directional coupler;
II.) a source laser having an output that is optically coupled to the first input port of the first 3 dB directional coupler;
III.) a first photodetector optomechanically coupled to the first output port of the second 3 dB directional coupler; and
IV.) a second photodetector optomechanically coupled to the second output port of the second 3 dB directional coupler.

### Claim 2 (depends on 1)

The pixel apparatus of claim 1, wherein the second output port of the first directional coupler and the second input port of the second directional coupler are optically terminated.

### Claim 3 (depends on 1)

The pixel apparatus of claim 1, wherein the source laser is a laser diode.

### Claim 4 (depends on 1)

The pixel apparatus of claim 1, wherein the source laser output is linearly polarized.

### Claim 5 (depends on 1)

The pixel apparatus of claim 1, wherein the source laser output is in the near infrared, mid infrared, or long wave infrared spectral regions.

### Claim 6 (depends on 1)

The pixel apparatus of claim 1, wherein the source laser output is linearly chirped.

### Claim 7 (depends on 1)

The pixel apparatus of claim 1, wherein the source laser is a distributed feedback (DFB) or distributed Bragg Reflector (DBR) laser with linewidths of ≤1 MHz.

### Claim 8 (depends on 1)

The pixel apparatus of claim 1, wherein the source laser output is in a frequency modulated continuous wave format.

### Claim 9 (depends on 1)

The pixel apparatus of claim 1, wherein the GRIN lens is in the form of a rod.

### Claim 10 (depends on 1)

The pixel apparatus of claim 1, wherein the first and second photodetectors are electrically configured to perform autobalanced, differential signal detection.

### Claim 11 (depends on 1)

The pixel apparatus of claim 1, further comprising an optical isolator disposed between the source laser and the photonic integrated circuit.

### Claim 12 (depends on 1)

The pixel apparatus of claim 1, wherein the source laser and the photonic integrated circuit are disposed on a common substrate.

### Claim 13 (depends on 1)

The pixel apparatus of claim 1, wherein the photodetectors are integrally fabricated within the photonic integrated circuit.

### Claim 14 (depends on 1)

The pixel apparatus of claim 1, further comprising a light focusing component disposed optically downstream of the partial Faraday mirror.

### Claim 15 (depends on 14)

The pixel apparatus of claim 14, further comprising:
a mirror;
a first motor mechanically coupled to the mirror and configured to provide a rotation about a first axis;
a housing in which the first motor is disposed; and
a second motor mechanically coupled to the housing and configured to provide a rotation about a second axis that is different than the first axis.

### Claim 16 (depends on 14)

The pixel apparatus of claim 14, further comprising a composite scanning MEMS mirror capable of oscillating along one or more axes, disposed on the common substrate.

### Claim 17 (depends on 16)

The pixel apparatus of claim 16, further comprising:
a housing on which the common substrate is disposed; and
a motor configured to provide a rotation about an axis, mechanically coupled to the housing.

### Claim 18 (depends on 1)

A method of measuring distance between a distance measuring pixel and a remote object, comprising:
providing a distance measuring pixel apparatus as set forth in claim 1;
producing a frequency modulated light beam from the source laser;
coupling the frequency modulated light beam from the source laser into the first input port of the first 3 dB bidirectional coupler such that half the light is extinguished at the second output port of the first 3 dB bidirectional coupler, while the remainder is output at the first output port of the first 3 dB bidirectional coupler;
collecting a predetermined fraction of the light reflected from the partial Faraday mirror back into the GRIN lens and into the first output port of the first directional coupler to form a local oscillator (LO) light beam;
transmitting the remaining frequency modulated light beam through the partial Faraday mirror and towards a focusing optical component, which gradually focuses the light;
collecting light reflected from the remote object intersecting the gradually focused light using the focusing optical component, through the partial Faraday mirror, into the GRIN lens and subsequently into the first output port of the first bidirectional coupler, to form an echo light beam;
directing the combined LO and echo light beams towards the first input port of the second 3 dB bidirectional coupler where it is split equally at the two output ports of the second directional coupler;
delivering the combined LO and echo beams at each output port of the second directional coupler onto the surface of a photodetector, wherein the optical mixing of the LO and echo signals produces a modulation of the photocurrent of each photodetector at a frequency that encodes the distance of the echo.