# US 10,310,061 B2 · Ultrasound transducer and method of manufacturing > Agents: this data is available as JSON from the patentgrep API and MCP server — see https://patentgrep.com/llms.txt - Number: US 10,310,061 B2 - Document ID: US10310061B2 - Status: Granted - Kind: B2 - Application number: 15/191,246 - Filed: 2016-06-23 - Published: 2016-12-15 - Granted: 2019-06-04 - Earliest claimed: 2013-11-21 - Assignees: SURF Technology AS - Applicants: Bjorn A. J. Angelsen - Inventors: Bjorn A. J. Angelsen - Web page: https://patentgrep.com/patent/US10310061B2 ## CPC - G01S 7/521: Constructional features - B32B 5/16: characterised by features of a layer formed of particles, e.g. chips, powder {or granules (layer formed of natural mineral particles B32B19/00; layer being formed of wood fibres, chips or particles B32B21/02)} - B32B 15/16: next to a particulate layer - G10K 11/02: Mechanical acoustic impedances; Impedance matching, e.g. by horns; Acoustic resonators - B06B 1/02: making use of electrical energy (B06B1/18, B06B1/20 take precedence) - B32B 2260/025: Particulate layer - B32B 2260/046: Synthetic resin - B32B 2264/02: Synthetic macromolecular particles - B32B 2264/105: Metal - B32B 2264/107: Ceramic - B32B 2264/12: Mixture of at least two particles made of different materials - B32B 2307/10: having particular acoustical properties - B32B 2307/20: having particular electrical or magnetic properties, e.g. piezoelectric - B32B 2307/202: Conductive - B32B 2307/302: Conductive - G01S: RADIO DIRECTION-FINDING; RADIO NAVIGATION; DETERMINING DISTANCE OR VELOCITY BY USE OF RADIO WAVES; LOCATING OR PRESENCE-DETECTING BY USE OF THE REFLECTION OR RERADIATION OF RADIO WAVES; ANALOGOUS ARRANGEMENTS USING OTHER WAVES - B32B: LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM - G10K: SOUND-PRODUCING DEVICES; METHODS OR DEVICES FOR PROTECTING AGAINST, OR FOR DAMPING, NOISE OR OTHER ACOUSTIC WAVES IN GENERAL; ACOUSTICS NOT OTHERWISE PROVIDED FOR - B06B: METHODS OR APPARATUS FOR GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS OF INFRASONIC, SONIC, OR ULTRASONIC FREQUENCY, {e.g.} FOR PERFORMING MECHANICAL WORK IN GENERAL (for particular applications, see the relevant subclasses, e.g. B07B1/40, B23Q17/12, B24B31/06; measurement of mechanical vibrations G01H; in direction finding, locating, distance or velocity measuring G01S; {generating seismic energy G01V1/02}; control of mechanical vibrations in general G05D; sound-producing devices, e.g. bells, sirens, whistles G10K, {e.g. methods or devices for transmitting, conducting, or directing sound in general G10K11/00}; generation of electrical oscillations H03B; electromechanical resonators in general H03H; electromechanical transducers {for communication techniques, e.g. microphones, speakers} H04R) ## Abstract An ultrasound transducer array with at least one composite material layer. The layer having a polymer base in which polymer particles are embedded. The polymer particles are coated with a material that has a thermal conductivity that is higher than the thermal conductivity of the polymer base and the polymer particles. ## Claims ### Claim 1 An ultrasound transducer array probe arranged as a layered structure comprising: at least one layer of transducer array elements, and at least one further layer mounted in acoustic and thermal contact with said layer of transducer elements, said further layer comprises particles comprising a polymer core coated with at least one surface layer of a material having thermal conductivity greater than an amount of thermal conductivity of the polymer core; wherein the density of particles provides for a large number of particles to be in contact with neighboring particles for thermal conduction through said further layer. ### Claim 2 (depends on 1) The ultrasound transducer array probe according to claim 1, where said particles are contained in a polymer base. ### Claim 3 (depends on 1) The ultrasound transducer array probe according to claim 1, wherein an overall thermal conductivity of said at least one further layer is determined by at least one of i) a type of materials for the particle surface layer, ii) a thickness of the particle surface layer, and iii) a dimension of the particle polymer core, and/or wherein an acoustic property of said at least one further layer is predetermined by at least one of i) a type of material used to form the particle polymer core, ii) a dimension of the particle polymer core, iii) a type of material or types of materials used to form the particle surface layer or layers, and iv) a thickness of the particle surface layer. ### Claim 4 (depends on 2) The ultrasound transducer array probe according to claim 2, wherein an overall thermal conductivity of said at least one further layer is determined by at least one of i) a type of material used to form the polymer base, and ii) a fill density of particles in the polymer base, and/or wherein an acoustic property of said at least one further layer is predetermined by at least one of i) a type of material used to form the polymer base, and ii) a fill density of particles in the polymer base. ### Claim 5 (depends on 1) The ultrasound transducer array probe according to claim 1, wherein said polymer core comprises a porous polymer material. ### Claim 6 (depends on 1) The ultrasound transducer array probe according to claim 1, wherein said at least one layer of transducer elements comprises at least one of, i) piezo-ceramic materials, and ii) cmut/pmut technology. ### Claim 7 (depends on 1) The ultrasound transducer array probe according to claim 1, wherein said surface layer includes an electrically conducting material and wherein a packaging density of said particles within said further layer is such that the electrical conductivity of the surface layers of contacting particles renders said further layer electrically conductive. ### Claim 8 (depends on 1) The ultrasound transducer array probe according to claim 1, wherein said further layer is part of a structure that provides an electrical connection to elements of the transducer array. ### Claim 9 (depends on 1) The ultrasound transducer array probe according to claim 1, wherein said surface layer of heat conductive material includes an electrically isolating material. ### Claim 10 (depends on 9) The ultrasound transducer array probe according to claim 9, wherein said surface layer includes an electrically conducting material coated with an electrically isolating material. ### Claim 11 (depends on 9) The ultrasound transducer array probe according to claim 9, wherein said at least one layer of transducer elements is based on a composite of polymer and ferroelectric ceramic materials, and said polymer is made as a composite material comprising a polymer base comprising particles having a polymer core coated with at least one surface layer of a material that is more thermally conductive than the polymer core, wherein said surface layer of heat conductive material includes an electrically isolating material. ### Claim 12 (depends on 1) The ultrasound transducer array probe according to claim 1, wherein said surface layer of heat conductive material includes layers improving adhesion between the polymer particle and a coating layer, or between coating layers. ### Claim 13 (depends on 1) The ultrasound transducer array probe according to claim 1, wherein said particles are mono-disperse particles. ### Claim 14 (depends on 1) The ultrasound transducer array probe according to claim 1, wherein said particles are composed of at least two groups of particles, each with mono-disperse cores where the particles in different groups have different diameters. ### Claim 15 (depends on 1) The ultrasound transducer array probe according to claim 1, wherein the at least one further layer is placed in thermal contact with a heat draining structure. ### Claim 16 (depends on 1) The ultrasound transducer array probe according to claim 1, wherein the at least one further layer is placed between said at least one electro-acoustic transduction layer and a heat draining layer. ### Claim 17 (depends on 16) The ultrasound transducer array probe according to claim 16, wherein said heat draining layer comprises at least one semiconductor layer with integrated electronics that are connect to array elements. ### Claim 18 (depends on 1) The ultrasound transducer array probe according to claim 1, further comprising at least one of i) air fin cooling, ii) Peltier elements, and iii) fluid cooling, arranged to remove heat from the probe. ### Claim 19 (depends on 17) The ultrasound transducer array probe according to claim 17, wherein electrical connection between the integrated electronics and the array elements is obtained with electrically connections extending through said at least one further layer. ### Claim 20 (depends on 1) The ultrasound transducer array probe according to claim 1, wherein an electrical connection between an array element and an associated electronic component is established via a single one of the particles, and wherein said surface layer of said single one of the particles is electrically conducting. ### Claim 21 (depends on 19) The ultrasound transducer array probe according to claim 19, wherein the composition and dimension of the single particles and potentially also a surrounding fill material is selected so that the single particle together; wherein the potential surrounding fill material functions as an acoustic impedance inverting structure at a frequency within the transmit band of said array elements. ### Claim 22 (depends on 1) The ultrasound transducer array probe according to claim 1, wherein electrical connection between array elements and associated electronic circuits is obtained through an electrically anisotropic adhesive, the adhesive comprising electrically isolating particles and electrically conducting particles, wherein an amount of the electrically conducting particles is lower than an amount of the electrically isolating particles and so low that said adhesive becomes electrically anisotropic. ### Claim 23 (depends on 22) The ultrasound transducer array probe according to claim 22, wherein the electrically conducting particles are larger than the electrically isolating particles. ### Claim 24 (depends on 1) The ultrasound transducer array probe according to claim 1, wherein the array probe is configured to operate at two separate frequency bands, hereinafter referred to as higher frequency band and lower frequency band, respectively, wherein said at least one layer of transducer array elements comprises an array operative in the higher frequency band, and the probe comprises a further transducer array layer operating in the lower frequency band, and wherein the at least one further layer and a further transducer array layer operating in the lower frequency band are provided on a side of the array operating in the higher frequency band that is opposite to an emission side of the array operating in the higher frequency band. ### Claim 25 (depends on 24) The ultrasound transducer array probe according to claim 24, wherein said at least one further layer between the arrays comprises two composite material layers, and, between the two composite material layers, a layer made of a material that has a thermal conductivity that is at least five times the thermal conductivity of said composite material layers, wherein said composite material layers comprise a polymer base filled with particles comprising a polymer core that is coated with a surface layer of a material that is more thermally conductive than the polymer core. ### Claim 26 A method of manufacturing an ultrasound transducer array as a layered structure comprising: selecting, for a layer comprising particles with a polymer core coated with at least one surface layer of a material that is more thermally conductive than the polymer core, wherein the density of the particles provides for a large number of said particles to be in contact with neighboring ones of said particles for thermal conduction through said layer, at least one of: an overall thermal conductivity of said layer by selecting at least one of i) a type of material for the particle surface layer, ii) a thickness of the particle surface layer, and iii) a dimension of the particle polymer core, and an acoustic property of said layer by selecting at least one of i) a type of material in the polymer base, ii) a type of material in the particle polymer core, iii) a dimension of the particle polymer core, iv) a type of material in the particle surface layer, and v) a thickness of the particle surface layer, and attaching said layer in acoustic and thermal contact to an ultrasound transducer array for heat conduction. ### Claim 27 A method of manufacturing an ultrasound transducer array comprising: creating a composite layer from a polymer base material having embedded particles, said particles comprising a polymer core coated with a surface layer of material with higher thermal conductivity than the polymer core and polymer base material, wherein the density of the embedded particles provides for a large number of said particles to be in contact with neighboring ones of said particles for thermal conduction through said composite layer, at least one of: an overall thermal conductivity of said composite layer is determined by selecting at least one of i) a type of material for the particle surface layer, ii) a thickness of the particle surface layer, iii) a dimension of the particle polymer core, and iv) a volume fill of said particles in the polymer base, and an acoustic property of said composite layer is determined by selecting at least one of i) a type of material in the polymer base, ii) a type of material in the particle polymer core, iii) a dimension of the particle polymer core, iv) a type of materials in the particle surface layer, v) a thickness of the particle surface layer, and vi) a volume fill density of particles in the polymer base; and attaching said composite material layer to an ultrasound transducer array for heat conduction. ### Claim 28 An ultrasound transducer probe arranged as a layered structure comprising: at least one first layer comprising at least one transducer element, and at least one second layer mounted in acoustic and thermal contact with said at least one first layer, said at least one second layer comprising polymer core coated particles having a surface of a material having thermal conductivity greater than thermal conductivity of the polymer core; wherein the density of particles provides for a large number of polymer core coated particles to be in contact with neighboring polymer core coated particles for thermal conduction through said at least one second layer.