# US 10,309,961 B2 · Bio-sensing device

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- Number: US 10,309,961 B2
- Document ID: US10309961B2
- Status: Granted
- Kind: B2
- Application number: 15/473,751
- Filed: 2017-03-30
- Published: 2017-10-05
- Granted: 2019-06-04
- Earliest claimed: 2016-03-31
- Assignees: Ndd, Inc.
- Applicants: Ndd, Inc.
- Inventors: Sae Young Ahn; Hyun Hwa Kwon
- Web page: https://patentgrep.com/patent/US10309961B2

## CPC

- G01N 33/5438: {Electrodes}
- G01N 27/4145: {specially adapted for biomolecules, e.g. gate electrode with immobilised receptors}
- H10K 10/464: {Lateral top-gate IGFETs comprising only a single gate}
- H10K 10/486: {the channel region comprising two or more active layers, e.g. forming pn heterojunctions}
- H10K 19/10: comprising field-effect transistors
- H10K 85/221: {Carbon nanotubes}
- G01N: INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES (measuring or testing apparatus or processes other than immunoassay, involving enzymes or microorganisms C12M, C12Q)
- H10K: ORGANIC ELECTRIC SOLID-STATE DEVICES

## Abstract

The present invention provides a bio-sensing device. The bio-sensing device includes an array of unit cells, each unit cell including: a source electrode and a drain electrode spaced apart from each other; a sensing film that serves as a channel between the source electrode and the drain electrode; and gate electrodes spaced apart from the sensing film, wherein the gate electrodes is disposed at a lower level than the source electrode, the drain electrode and the sensing film.

## Claims

### Claim 1

A bio-sensing device comprising:
an array of unit cells, each unit cell including:
a source electrode and a drain electrode spaced apart from each other;
a sensing film that serves as a channel between the source electrode and the drain electrode;
a gate electrode spaced apart from the sensing film;
an upper substrate on which the source electrode, the drain electrode, and the sensing film are formed; and
a lower substrate on which the gate electrode is formed,
wherein the upper substrate and the lower substrate are vertically stacked and connected to each other, and
wherein the gate electrode is disposed between the upper substrate and the lower substrate.

### Claim 2 (depends on 1)

The bio-sensing device of claim 1,
wherein the material of the sensing film includes carbon nanotube (CNT), graphene, molybdenum disulfide (MoS2), or phosphorene.

### Claim 3 (depends on 2)

The bio-sensing device of claim 2,
wherein a part of the source electrode or the drain electrode in contact with the carbon nanotubes, graphene, molybdenum disulfide, or phosphorene has a comb-like shape.

### Claim 4 (depends on 1)

The bio-sensing device of claim 1,
wherein the unit cell further includes a receptor that is attached to the sensing film and capable of binding to a target material.

### Claim 5 (depends on 4)

The bio-sensing device of claim 4,
wherein the sensing film is made of a material that can vary in resistance depending on the receptor and a target material bound to the receptor,
wherein the receptor is attached to the sensing film by a functional group and is any one or more selected from the group consisting of an enzyme substrate, a ligand, an amino acid, a peptide, an aptamer, a protein, guanine, a nucleic acid, a lipid and a carbohydrate,
wherein the functional group is at least one selected from the group consisting of an amine group, a carboxyl group, a thiol group and a lipid, and
wherein the target material is at least one selected from the group consisting of a protein, a peptide, an aptamer, a nucleic acid, an oligosaccharide, an amino acid, a carbohydrate, a dissolved gas, a sulfur oxide gas, a nitrogen oxide gas, sodium (Na) or sodium ions, potassium (K) or potassium ions, a residual pesticide, a heavy metal and an environmentally harmful sub stance.

### Claim 6 (depends on 1)

The bio-sensing device of claim 1,
wherein the unit cell further includes an insulating member interposed between the sensing film and the gate electrode, and
wherein the surface of the insulating member is subjected to plasma treatment to improve the adhesion between the insulating member and the sensing film.

### Claim 7 (depends on 1)

The bio-sensing device of claim 1,
wherein the unit cell includes an insulating member interposed between the sensing film and the gate electrode, and a buffer layer interposed between the insulating member and the sensing film to improve adhesion.

### Claim 8 (depends on 1)

The bio-sensing device of claim 1,
wherein the unit cell is a multi-channel structure with the sensing film including a first sensing film, to which a first receptor capable of binding to a first target material may be attached, and a second sensing film, to which a second receptor capable of binding to a second target material may be attached.

### Claim 9 (depends on 1)

The bio-sensing device of claim 1, wherein the unit cells are repeatedly arrayed.

### Claim 10 (depends on 2)

The bio-sensing device of claim 2, wherein the unit cells are repeatedly arrayed.

### Claim 11 (depends on 3)

The bio-sensing device of claim 3, wherein the unit cells are repeatedly arrayed.

### Claim 12 (depends on 4)

The bio-sensing device of claim 4, wherein the unit cells are repeatedly arrayed.

### Claim 13 (depends on 5)

The bio-sensing device of claim 5, wherein the unit cells are repeatedly arrayed.

### Claim 14 (depends on 6)

The bio-sensing device of claim 6, wherein the unit cells are repeatedly arrayed.

### Claim 15 (depends on 7)

The bio-sensing device of claim 7, wherein the unit cells are repeatedly arrayed.

### Claim 16 (depends on 8)

The bio-sensing device of claim 8, wherein the unit cells are repeatedly arrayed.