# US 10,309,895 B2 · Electromagnetic wave detector and gas analysis device having dual electromagnetic wave sensors for detecting one of light in a predetermined wavelength band and predetermined polarization > Agents: this data is available as JSON from the patentgrep API and MCP server — see https://patentgrep.com/llms.txt - Number: US 10,309,895 B2 - Document ID: US10309895B2 - Status: Granted - Kind: B2 - Application number: 15/543,421 - Filed: 2016-01-04 - Published: 2018-01-04 - Granted: 2019-06-04 - Earliest claimed: 2015-02-09 - Assignees: Mitsubishi Electric Corporation - Applicants: Mitsubishi Electric Corporation - Inventors: Daisuke Fujisawa; Shimpei Ogawa - Web page: https://patentgrep.com/patent/US10309895B2 ## CPC - G01N 21/314: {with comparison of measurements at specific and non-specific wavelengths (dual wavelength spectrometry G01J3/427)} - G01J 5/0225: {Shape of the cavity itself or of elements contained in or suspended over the cavity} - G01J 5/0802: Optical filters - G01N 21/21: Polarisation-affecting properties (G01N21/19 takes precedence) - G01N 21/3504: for analysing gases, e.g. multi-gas analysis - G01N 21/41: Refractivity; Phase-affecting properties, e.g. optical path length (G01N21/21 takes precedence) - G01N 33/4972: {Determining alcohol content (for vehicle safety devices B60K28/06)} - G01N: INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES (measuring or testing apparatus or processes other than immunoassay, involving enzymes or microorganisms C12M, C12Q) - G01J: MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY (light sources F21, H01J, H01K, H05B; investigating properties of materials by optical means G01N) ## Abstract An electromagnetic wave detector including a first electromagnetic wave sensor including a light reception unit held in midair above a substrate by a support leg and a second electromagnetic wave sensor including a light reception unit held in midair above the substrate by a support leg having same structure as the support leg of the first electromagnetic wave sensor and provided adjacent to the first electromagnetic wave sensor. The light reception unit of the first electromagnetic wave sensor includes a reflective film, the light reception unit of the second electromagnetic wave sensor includes an electromagnetic wave absorption body for detecting light of a prescribed wavelength band or a prescribed polarization, and the difference between the output of the second electromagnetic wave sensor and the first electromagnetic wave sensor is output. ## Claims ### Claim 1 An electromagnetic wave detector comprising: a substrate; a first electromagnetic wave sensor configured to include a light reception unit which is held in midair above the substrate by a support leg; and a second electromagnetic wave sensor configured to include a light reception unit which is held in midair above the substrate by a support leg that has a structure identical to a structure of the support leg of the first electromagnetic wave detector, the second electromagnetic wave sensor being provided to be adjacent to the first electromagnetic wave sensor, wherein the light reception unit of the first electromagnetic wave sensor is formed on the same plane as the support leg and includes a flat reflective film which covers an entire surface of the light reception unit, the light reception unit of the second electromagnetic wave sensor is formed on the same plane as the support leg and includes an electromagnetic wave absorption body which detects one of light in a predetermined wavelength band and light of a predetermined polarization, the first electromagnetic wave sensor includes the light reception unit comprising the reflective film and the support leg which the electromagnetic wave enters directly, and has the same output as the sensor output caused by the electromagnetic wave absorbed in the area other than the light reception unit of the second electromagnetic wave sensor and a difference between output of the second electromagnetic wave sensor and output of the first electromagnetic wave sensor is output. ### Claim 2 (depends on 1) The electromagnetic wave detector according to claim 1, wherein a surface of the support leg of the first electromagnetic wave sensor and a surface of the support leg of the second electromagnetic wave sensor are exposed. ### Claim 3 (depends on 1) The electromagnetic wave detector according to claim 1, further comprising a third electromagnetic wave sensor configured to include a light reception unit which is held in midair above the substrate by a support leg that has a structure identical to the structure of the support leg of the first electromagnetic wave detector, the third electromagnetic wave sensor being provided to be adjacent to one of the first electromagnetic wave sensor and the second electromagnetic wave sensor, wherein the light reception unit of the third electromagnetic wave sensor includes an electromagnetic wave absorption body which detects one of light in a wavelength band and light of a polarization, the wavelength band and the polarization differing from the wavelength band and the polarization of the light detected by the electromagnetic wave absorption body of the second electromagnetic wave sensor, and a difference between output of the third electromagnetic wave sensor and output of the first electromagnetic wave sensor is output. ### Claim 4 (depends on 2) The electromagnetic wave detector according to claim 2, further comprising a third electromagnetic wave sensor configured to include a light reception unit which is held in midair above the substrate by a support leg that has a structure identical to the structure of the support leg of the first electromagnetic wave detector, the third electromagnetic wave sensor being provided to be adjacent to one of the first electromagnetic wave sensor and the second electromagnetic wave sensor, wherein the light reception unit of the third electromagnetic wave sensor includes an electromagnetic wave absorption body which detects one of light in a wavelength band and light of a polarization, the wavelength band and the polarization differing from the wavelength band and the polarization of the light detected by the electromagnetic wave absorption body of the second electromagnetic wave sensor, and a difference between output of the third electromagnetic wave sensor and output of the first electromagnetic wave sensor is output. ### Claim 5 (depends on 1) The electromagnetic wave detector according to claim 1, wherein the support leg comprises a thermocouple. ### Claim 6 (depends on 3) The electromagnetic wave detector according to claim 3, wherein output of the first electromagnetic wave sensor and output of the second electromagnetic wave sensor are electrically connected to each other such that the output of the first electromagnetic wave sensor is subtracted from the output of the second electromagnetic wave sensor, output of the first electromagnetic wave sensor and output of the third electromagnetic wave sensor are electrically connected to each other such that the output of the first electromagnetic wave sensor is subtracted from the output of the third electromagnetic wave sensor, and a connection portion between the first electromagnetic wave sensor and the second electromagnetic wave sensor also serves as a connection portion between the first electromagnetic wave sensor and the third electromagnetic wave sensor. ### Claim 7 (depends on 4) The electromagnetic wave detector according to claim 4, wherein output of the first electromagnetic wave sensor and output of the second electromagnetic wave sensor are electrically connected to each other such that the output of the first electromagnetic wave sensor is subtracted from the output of the second electromagnetic wave sensor, output of the first electromagnetic wave sensor and output of the third electromagnetic wave sensor are electrically connected to each other such that the output of the first electromagnetic wave sensor is subtracted from the output of the third electromagnetic wave sensor, and a connection portion between the first electromagnetic wave sensor and the second electromagnetic wave sensor also serves as a connection portion between the first electromagnetic wave sensor and the third electromagnetic wave sensor. ### Claim 8 (depends on 1) The electromagnetic wave detector according to claim 1, wherein the electromagnetic wave absorption body has one of a single-layer structure of a metal film and a multilayer film structure of a metal film and a dielectric. ### Claim 9 (depends on 1) The electromagnetic wave detector according claim 1, wherein the electromagnetic wave absorption body has a periodic structure arranged in an array on a surface of the electromagnetic wave absorption body such that a surface plasmon which causes a specific wavelength to be coupled to the surface is induced, and an absorption amount of incident light with the specific wavelength is made greater than an absorption amount of incident light with a wavelength other than the specific wavelength. ### Claim 10 (depends on 1) The electromagnetic wave detector according to claim 1, wherein the reflective film of the first electromagnetic wave sensor reflects light with a wavelength other than a specific wavelength included in the wavelength band of the light detected by the electromagnetic wave absorption body of the second electromagnetic wave sensor. ### Claim 11 (depends on 1) The electromagnetic wave detector according to claim 1, wherein the reflective film of the first electromagnetic wave sensor is made of a material which has large specific heat. ### Claim 12 An electromagnetic wave detector comprising: a substrate; a fifth electromagnetic wave sensor configured to include a support leg which is held in midair above the substrate; and a second electromagnetic wave sensor configured to include a light reception unit which is held in midair above the substrate by a support leg that has a structure identical to a structure of the support leg of the fifth electromagnetic wave sensor, the second electromagnetic wave sensor being provided to be adjacent to the fifth electromagnetic wave sensor, wherein the fifth electromagnetic wave sensor is constituted of only the support leg which is held in midair and the electromagnetic wave enters directly, and the support leg includes a reflective film which is formed on the same plane as the support leg and is provided only on a hot junction region where a hot junction of thermocouple is thermally connected, the light reception unit of the second electromagnetic wave sensor includes an electromagnetic wave absorption body which detects one of light in a predetermined wavelength band and light of a predetermined polarization, and a difference between output of the second electromagnetic wave sensor and output of the fifth electromagnetic wave sensor is output. ### Claim 13 (depends on 12) The electromagnetic wave detector according to claim 12, wherein a surface of the support leg of the fifth electromagnetic wave sensor and a surface of the support leg of the second electromagnetic wave sensor are exposed. ### Claim 14 (depends on 12) The electromagnetic wave detector according to claim 12, further comprising a third electromagnetic wave sensor configured to include a light reception unit which is held in midair above the substrate by a support leg that has a structure identical to the structure of the support leg of the fifth electromagnetic wave sensor, the third electromagnetic wave sensor being provided to be adjacent to one of the fifth electromagnetic wave sensor and the second electromagnetic wave sensor, wherein the fifth electromagnetic wave sensor does not include a light reception unit, and the light reception unit of the third electromagnetic wave sensor includes an electromagnetic wave absorption body which detects one of light in a wavelength band and light of a predetermined polarization, the wavelength band and the polarization differing from the wavelength band and the polarization of the light detected by the electromagnetic wave absorption body of the second electromagnetic wave sensor, and a difference between output of the third electromagnetic wave sensor and output of the fifth electromagnetic wave sensor is output. ### Claim 15 (depends on 13) The electromagnetic wave detector according to claim 13, further comprising a third electromagnetic wave sensor configured to include a light reception unit which is held in midair above the substrate by a support leg that has a structure identical to the structure of the support leg of the fifth electromagnetic wave sensor, the third electromagnetic wave sensor being provided to be adjacent to one of the fifth electromagnetic wave sensor and the second electromagnetic wave sensor, wherein the fifth electromagnetic wave sensor does not include a light reception unit, and the light reception unit of the third electromagnetic wave sensor includes an electromagnetic wave absorption body which detects one of light in a wavelength band and light of a predetermined polarization, the wavelength band and the polarization differing from the wavelength band and the polarization of the light detected by the electromagnetic wave absorption body of the second electromagnetic wave sensor, and a difference between output of the third electromagnetic wave sensor and output of the fifth electromagnetic wave sensor is output. ### Claim 16 (depends on 14) The electromagnetic wave detector according to claim 14, wherein output of the fifth electromagnetic wave sensor and output of the second electromagnetic wave sensor are electrically connected to each other such that the output of the fifth electromagnetic wave sensor is subtracted from the output of the second electromagnetic wave sensor, output of the fifth electromagnetic wave sensor and output of the third electromagnetic wave sensor are electrically connected to each other such that the output of the fifth electromagnetic wave sensor is subtracted from the output of the third electromagnetic wave sensor, and a connection portion between the fifth electromagnetic wave sensor and the second electromagnetic wave sensor also serves as a connection portion between the fifth electromagnetic wave sensor and the third electromagnetic wave sensor. ### Claim 17 (depends on 15) The electromagnetic wave detector according to claim 15, wherein output of the fifth electromagnetic wave sensor and output of the second electromagnetic wave sensor are electrically connected to each other such that the output of the fifth electromagnetic wave sensor is subtracted from the output of the second electromagnetic wave sensor, output of the fifth electromagnetic wave sensor and output of the third electromagnetic wave sensor are electrically connected to each other such that the output of the fifth electromagnetic wave sensor is subtracted from the output of the third electromagnetic wave sensor, and a connection portion between the fifth electromagnetic wave sensor and the second electromagnetic wave sensor also serves as a connection portion between the fifth electromagnetic wave sensor and the third electromagnetic wave sensor. ### Claim 18 (depends on 1) A gas analysis device comprising: the electromagnetic wave detector according to claim 1; a gas introduction mechanism configured to introduce a gas to be analyzed; and a light source configured to irradiate the gas to be analyzed with an electromagnetic wave, wherein intensity of an electromagnetic wave with a specific wavelength included in the electromagnetic wave which has passed through the gas to be analyzed is detected by the electromagnetic wave detector. ### Claim 19 (depends on 18) The gas analysis device according to claim 18, wherein the specific wavelength detected by the electromagnetic wave detector is a wavelength for determining presence of alcohol.