# US 10,309,884 B2 · Predicting semiconductor package warpage

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- Number: US 10,309,884 B2
- Document ID: US10309884B2
- Status: Granted
- Kind: B2
- Application number: 15/627,514
- Filed: 2017-06-20
- Published: 2017-10-05
- Granted: 2019-06-04
- Earliest claimed: 2015-03-30
- Assignees: International Business Machines Corporation
- Applicants: International Business Machines Corporation
- Inventors: Stephen P. Ayotte; Eric G. Liniger; Travis S. Longenbach
- Web page: https://patentgrep.com/patent/US10309884B2

## CPC

- G01N 3/42: by performing impressions under a steady load by indentors, e.g. sphere, pyramid (G01N3/54 takes precedence)
- G01M 5/0075: {by means of external apparatus, e.g. test benches or portable test systems (G01M5/005 takes precedence)}
- G01N 3/20: by applying steady bending forces (G01N3/26, G01N3/28 take precedence)
- G01N 33/0078: {Testing material properties on manufactured objects}
- G01N 33/0081: {Containers; Packages; Bottles}
- G01N 33/0095: {Semiconductive materials}
- G01N 2203/0222: Temperature
- G01R 31/2896: {Testing of IC packages; Test features related to IC packages (containers per se H10W76/10, encapsulations per se H10W74/00)}
- G01N: INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES (measuring or testing apparatus or processes other than immunoassay, involving enzymes or microorganisms C12M, C12Q)
- G01M: TESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
- G01R: MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES (indicating correct tuning of resonant circuits H03J3/12)

## Abstract

A method for predicting the electrical functionality of a semiconductor package, the method includes performing a first stiffness test for a first semiconductor package, receiving failure data for the first semiconductor package, the failure data includes results of an electrical test performed after the first semiconductor package is assembled on a printed circuit board, generating a database comprising results of the first stiffness test as a function of the failure data for the first semiconductor package, performing a second stiffness test for a second semiconductor package, identifying a unique result from the results of the first stiffness test in the database, the unique result aligns with a result of the second stiffness test, and predicting a failure data for the second semiconductor package based on the failure data for the first semiconductor package which corresponds to the unique result of the first stiffness test identified in the database.

## Claims

### Claim 1

A method of predicting warpage of a semiconductor package comprising:
performing a stiffness test comprising:
stabilizing a portion of the semiconductor package in a fixture, such that a cantilevered portion of the semiconductor package remains unstabilized,
applying a force to a corner of the cantilevered portion causing the semiconductor package to bend,
measuring the applied force, and
measuring a deflection of the corner of the cantilevered portion;
recording stiffness test results comprising the applied force as a function of the deflection of the corner; and
using the stiffness test results to predict the warpage of the semiconductor package.

### Claim 2 (depends on 1)

The method of claim 1, wherein stabilizing the portion of the semiconductor package comprises:
stabilizing half of the semiconductor package defined by a diagonal line extending between two corners of the semiconductor package.

### Claim 3 (depends on 1)

The method of claim 1, wherein the stiffness test is carried out in a temperature controlled chamber, and the temperature of the temperature controlled chamber is recorded along with the stiffness test results.

### Claim 4 (depends on 1)

The method of claim 1, wherein a static testing machine is used to apply the force, measure the applied force, and measure the deflection of the corner.

### Claim 5 (depends on 1)

The method of claim 1, wherein recording stiffness test results comprises:
recording properties of the semiconductor package comprising at least one of laminate size, die size, lid shape, lid material, laminate composition, sealant material, and amount of sealant used.

### Claim 6 (depends on 5)

The method of claim 5, further comprising:
using the stiffness test results to predict warpage of another semiconductor package by comparing the properties of the semiconductor package and properties of the other semiconductor package.

### Claim 7 (depends on 1)

The method of claim 1, further comprising:
repeating the stiffness test at least once for each corner of the semiconductor package.

### Claim 8

A method, comprising:
performing a stiffness test of a semiconductor package, the stiffness test comprising:
stabilizing half of the semiconductor package in a fixture, such that an unstabilized half of the semiconductor package remains free to move,
applying a force to a corner of the unstabilized half of the semiconductor package causing the semiconductor package to bend,
measuring the amount of applied force, and
measuring the amount of deflection of the corner of the unstabilized half of the semiconductor package;
recording stiffness test results comprising the amount of applied force and the amount of deflection of the corner;
assembling the semiconductor package on a printed circuit board;
performing electrical testing of the semiconductor package after the semiconductor package is assembled on a printed circuit board, the electrical testing generating failure data; and
generating a database comprising results of the stiffness test for the semiconductor package and the failure data for the semiconductor package.

### Claim 9 (depends on 8)

The method of claim 8, wherein half of the semiconductor package is defined by a diagonal line extending between two corners of the semiconductor package.

### Claim 10 (depends on 8)

The method of claim 8, wherein the stiffness test is carried out in a temperature controlled chamber, and the temperature of the temperature controlled chamber is recorded along with the stiffness test results.

### Claim 11 (depends on 8)

The method of claim 8, wherein a static testing machine is used to apply the force, measure the applied force, and measure the amount of deflection of the corner.

### Claim 12 (depends on 8)

The method of claim 8, further comprising:
correlating the amount of applied force and the amount of deflection of the corner to predict warpage of the semiconductor package.

### Claim 13 (depends on 12)

The method of claim 12, wherein the results of the stiffness test comprises:
properties of the semiconductor package comprising at least one of laminate size, die size, lid shape, lid material, laminate composition, sealant material, and amount of sealant used.

### Claim 14 (depends on 13)

The method of claim 13, further comprising:
using the stiffness test results to predict warpage of another semiconductor package by comparing the properties of the semiconductor package and properties of the other semiconductor package.

### Claim 15 (depends on 8)

The method of claim 8, further comprising:
repeating the stiffness test at least once for each corner of the semiconductor package.

### Claim 16

A method, comprising:
performing a stiffness test of a semiconductor package, the stiffness test comprising:
stabilizing a portion of the semiconductor package in a fixture, such that a cantilevered portion of the semiconductor package remains free to move,
applying a force to a corner of the cantilevered portion of the semiconductor package causing the semiconductor package to bend,
measuring the amount of force applied to the corner of the cantilevered portion of the semiconductor package, and
measuring the amount of deflection of the corner of the cantilevered portion;
correlating the amount of force applied to the corner of the cantilevered portion and the amount of deflection of the corner of the cantilevered portion as results of the stiffness test for the semiconductor package; and
using the results of the stiffness test to predict warpage of the semiconductor package.

### Claim 17 (depends on 16)

The method of claim 16, wherein stabilizing the portion of the semiconductor package comprises:
stabilizing half of the semiconductor package defined by a diagonal line extending between corners of the semiconductor package.

### Claim 18 (depends on 16)

The method of claim 16, further comprising:
recording the results of the stiffness test in a database; and
recording properties of the semiconductor package comprising at least one of laminate size, die size, lid shape, lid material, laminate composition, sealant material, and amount of sealant used.

### Claim 19 (depends on 16)

The method of claim 16, further comprising:
assembling the semiconductor package on a printed circuit board; and
performing electrical testing of the semiconductor package after the semiconductor package is assembled on a printed circuit board, the electrical testing generating failure data for the semiconductor package.

### Claim 20 (depends on 19)

The method of claim 19, further comprising:
generating a database comprising results of the stiffness test for the semiconductor package and the failure data for the semiconductor package.
