# US 10,309,845 B2 · Solid-state shear stress sensors with high selectivity > Agents: this data is available as JSON from the patentgrep API and MCP server — see https://patentgrep.com/llms.txt - Number: US 10,309,845 B2 - Document ID: US10309845B2 - Status: Granted - Kind: B2 - Application number: 15/211,838 - Filed: 2016-07-15 - Published: 2017-01-19 - Granted: 2019-06-04 - Earliest claimed: 2015-07-16 - Assignees: Silicon Audio, Inc.; Board of Regents, The University of Texas System - Applicants: Silicon Audio, Inc.; Board of Regents of the University of Texas System - Inventors: Neal A. Hall; Donghwan Kim; Randall P. Williams; David P. Gawalt; Bradley D. Avenson; Caesar T. Garcia; Kristofer L. Gleason - Web page: https://patentgrep.com/patent/US10309845B2 ## CPC - G01L 1/16: using properties of piezoelectric devices - G01L 1/148: {using semiconductive material, e.g. silicon} - G01L: MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE (weighing G01G) ## Abstract Embodiments of solid-state stress sensors are presented herein. A sensor system may include a substrate, a first layer of sensing material disposed on a first surface of the substrate, and at least three electrodes forming a first and second electrode pair. The at least three electrodes may include a first electrode, a second electrode, and a third electrode. The first electrode may be disposed in a first plane and the second electrode and the third electrode may be disposed in a second plane, the first and second planes associated with a first direction parallel to the first surface. The first and second electrodes may be at least partially offset in the first direction. The first and third electrodes may be at least partially offset in the first direction. The sensor system may be configured to generate an output signal in response to a shear stress within the sensing material. ## Claims ### Claim 1 A sensor system, comprising: a substrate; a first layer of sensing material disposed on a first surface of the substrate; and at least three electrodes forming a first and a second electrode pair, wherein the at least three electrodes comprise a first electrode, a second electrode, and a third electrode, wherein the first electrode is disposed in a first plane, wherein the second electrode and the third electrode are disposed in a second plane, wherein the first and second planes are associated with a first direction that is substantially parallel to the first surface, wherein the first and second electrodes are at least partially offset in the first direction, and wherein the first and third electrodes are at least partially offset in the first direction; wherein a first polarization is induced between or across the first and second electrodes, wherein the first polarization induces a first polarization vector, wherein the first polarization vector has a direction substantially parallel to a third plane defined by the first and second electrodes; and wherein the sensor system is configured to generate an output signal in response to a shear stress within the sensing material. ### Claim 2 (depends on 1) The sensor system of claim 1, wherein the first electrode is disposed on a surface of the sensing material, and wherein the second and third electrodes are disposed on the first surface of the substrate. ### Claim 3 (depends on 1) The sensor system of claim 1, wherein a second polarization is induced between or across the first and third electrodes, wherein the second polarization induces a second polarization vector, wherein the second polarization vector has a direction substantially parallel to a fourth plane defined by the first and third electrodes. ### Claim 4 (depends on 3) The sensor system of claim 3, wherein the second polarization vector has a vertical component with polarity that opposes a polarity of a vertical component of the first polarization vector. ### Claim 5 (depends on 3) The sensory system of claim 3, wherein the second polarization vector has a vertical component with polarity that aligns with a polarity of a vertical component of the first polarization vector. ### Claim 6 (depends on 1) The sensor system of claim 1, wherein the output signal is useable to sense force and/or stress responsive to a force applied to the sensor system. ### Claim 7 (depends on 1) The sensor system of claim 1, wherein the output signal is useable to sense a shear force and/or a shear stress responsive to a force applied to the sensor system. ### Claim 8 (depends on 7) The sensor system of claim 7, wherein the force applied to the sensor system comprises at least one of: a force from a fluid in contact with the sensor system; or a force from a solid in contact with the sensor system. ### Claim 9 (depends on 1) The sensor system of claim 1, wherein the shear stress is responsive to a force applied to the sensor system, wherein the force applied comprises a force vector comprising a first force component orthogonal to the sensor system and a second force component parallel to the sensor system. ### Claim 10 (depends on 9) The sensor system of claim 9, wherein the shear stress is responsive to the second force component. ### Claim 11 (depends on 1) The sensor system of claim 1, wherein a direct current (DC) bias voltage is applied between or across the first electrode pair and the second electrode pair during operation. ### Claim 12 (depends on 1) The sensor system of claim 1, wherein the first layer of sensing material is one of a ferroelectric material or a piezoelectric material. ### Claim 13 (depends on 1) The sensor system of claim 1, wherein at least one of the at least three electrodes is disposed within the first layer of sensing material. ### Claim 14 (depends on 1) The sensor system of claim 1, wherein the substrate is one of silicon or sapphire. ### Claim 15 (depends on 1) The sensor system of claim 1, wherein the at least three electrodes form a network of capacitances, wherein a relative value of the capacitances is altered by a deformation of the sensing material in response to an applied stress or force. ### Claim 16 (depends on 15) The sensor system of claim 15, wherein the at least three electrodes are configured in series, and a middle electrode potential is measured to obtain information associated with a shear force applied to the sensing material. ### Claim 17 A sensor system, comprising: a substrate; a first layer of sensing material disposed on a first surface of the substrate; and at least three electrodes forming a first electrode pair and a second electrode pair, wherein the at least three electrodes comprise a first electrode, a second electrode, and a third electrode, wherein the first electrode is disposed in a first plane on a first surface of the sensing material, wherein the second electrode and the third electrode are disposed in a second plane on the first surface of the substrate, wherein the first and second planes are associated with a first direction that is substantially parallel to the first surface of the substrate, wherein the first and second electrodes are at least partially offset in the first direction, and wherein the first and third electrodes are at least partially offset in the first direction; wherein a first polarization is induced between or across the first and second electrodes, wherein the first polarization induces a first polarization vector, wherein the first polarization vector has a direction substantially parallel to a third plane defined by the first and second electrodes; and wherein the sensor system is configured to generate an output signal in response to a shear stress within the sensing material. ### Claim 18 (depends on 17) The sensor system of claim 17, wherein a second polarization is induced between or across the first and third electrodes, wherein the second polarization induces a second polarization vector, wherein the second polarization vector has a direction substantially parallel to a fourth plane defined by the first and third electrodes. ### Claim 19 (depends on 18) The sensor system of claim 18, wherein the second polarization vector has a vertical component with polarity that opposes a polarity of a vertical component of the first polarization vector. ### Claim 20 (depends on 18) The sensory system of claim 18, wherein the second polarization vector has a vertical component with polarity that aligns with a polarity of a vertical component of the first polarization vector. ### Claim 21 (depends on 17) The sensor system of claim 17, wherein the output signal is useable to sense a shear force and/or a shear stress responsive to a force applied to the sensor system, wherein the force applied to the sensor system comprises at least one of: a force from a fluid in contact with the sensor system; or a force from a solid in contact with the sensor system. ### Claim 22 (depends on 17) The sensor system of claim 17, wherein a direct current (DC) bias voltage is applied between or across the first electrode pair and the second electrode pair during operation. ### Claim 23 (depends on 17) The sensor system of claim 17, wherein the at least three electrodes form a network of capacitances, wherein a relative value of the capacitances is altered by a deformation of the sensing material in response to an applied stress or force, and wherein the at least three electrodes are configured in series, and a middle electrode potential is measured to obtain information associated with a shear force applied to the sensing material. ### Claim 24 A sensor system, comprising: a substrate; a first layer of sensing material disposed on a first surface of the substrate; and at least three electrodes forming a first electrode pair and a second electrode pair, wherein the at least three electrodes comprise a first electrode, a second electrode, and a third electrode, wherein the first electrode is disposed in a first plane, wherein the second electrode and the third electrode are disposed in a second plane, wherein the first and second planes are associated with a first direction that is substantially parallel to a first surface of the substrate, wherein the first and second electrodes are at least partially offset in the first direction, and wherein the first and third electrodes are at least partially offset in the first direction; and wherein a first polarization is induced between or across the first and second electrodes, wherein the first polarization induces a first polarization vector, wherein the first polarization vector has a direction substantially parallel to a third plane defined by the first and second electrodes. ### Claim 25 (depends on 24) The sensor system of claim 24, wherein the sensor system is configured to generate an output signal in response to a shear stress within the sensing material, wherein the output signal is useable to sense a shear force and/or a shear stress responsive to a force applied to the sensor system, wherein the force applied to the sensor system comprises at least one of: a force from a fluid in contact with the sensor system; or a force from a solid in contact with the sensor system. ### Claim 26 (depends on 24) The sensor system of claim 24, wherein a second polarization is induced between or across the first and third electrodes, wherein the second polarization induces a second polarization vector, wherein the second polarization vector has a direction substantially parallel to a fourth plane defined by the first and third electrodes. ### Claim 27 (depends on 24) The sensor system of claim 24, wherein a direct current (DC) bias voltage is applied between or across the first electrode pair and the second electrode pair during operation. ### Claim 28 (depends on 24) The sensor system of claim 24, wherein the at least three electrodes form a network of capacitances, wherein a relative value of the capacitances is altered by a deformation of the sensing material in response to an applied stress or force, and wherein the at least three electrodes are configured in series, and a middle electrode potential is measured to obtain information associated with a shear force applied to the sensing material.