# US 10,309,783 B2 · Physical quantity detection system, electronic apparatus, and moving object

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- Number: US 10,309,783 B2
- Document ID: US10309783B2
- Status: Granted
- Kind: B2
- Application number: 15/255,520
- Filed: 2016-09-02
- Published: 2017-03-09
- Granted: 2019-06-04
- Earliest claimed: 2015-09-09
- Assignees: Seiko Epson Corporation
- Applicants: Seiko Epson Corporation
- Inventors: Yutaka Takada
- Web page: https://patentgrep.com/patent/US10309783B2

## CPC

- G01C 19/5776: Signal processing not specific to any of the devices covered by groups G01C19/5607 - G01C19/5719
- G01C 19/5712: the devices involving a micromechanical structure
- G01D 3/032: affecting incoming signal, e.g. by averaging; gating undesired signals
- G01C: MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY (measuring liquid level G01F; radio navigation, determining distance or velocity by use of propagation effects, e.g. Doppler effects, propagation time, of radio waves, analogous arrangements using other waves G01S)
- G01D: MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR

## Abstract

A physical quantity detection system includes first and second physical quantity sensors, first and second power supply lines to which a power supply voltage is applied, a first decoupling circuit with first band elimination frequency characteristics, and a second decoupling circuit with second band elimination frequency characteristics. A relationship of a cutoff frequency on a low frequency side of the first band elimination frequency characteristics<a first drive frequency of a first drive circuit<a cutoff frequency on a high frequency side of the first band elimination frequency characteristics is satisfied, and a relationship of a cutoff frequency on a low frequency side of the second band elimination frequency characteristics<a second drive frequency of a second drive circuit<a cutoff frequency on a high frequency side of second band elimination frequency characteristics is satisfied.

## Claims

### Claim 1

A physical quantity detection system comprising:
a first physical quantity sensor that includes a first physical quantity transducer, a first drive circuit which drives the first physical quantity transducer, and a first detection circuit which outputs first physical quantity information corresponding to a first physical quantity, based on a first detection signal which is outputted from the first physical quantity transducer;
a second physical quantity sensor that includes a second physical quantity transducer, a second drive circuit which drives the second physical quantity transducer, and a second detection circuit which outputs second physical quantity information corresponding to a second physical quantity, based on a second detection signal which is outputted from the second physical quantity transducer;
a first power supply line to which a power supply voltage that is supplied to the first physical quantity sensor from a common power supply of the first physical quantity sensor and the second physical quantity sensor is applied;
a second power supply line to which the power supply voltage that is supplied to the second physical quantity sensor from the power supply is applied;
a first decoupling circuit which is connected to a path of the first power supply line and has a first band elimination frequency characteristic; and
a second decoupling circuit which is connected to a path of the second power supply line and has a second band elimination frequency characteristic,
wherein, in a case where a first drive frequency of the first drive circuit is referred to as fd1, a second drive frequency of the second drive circuit is referred to as fd2, a cutoff frequency on a low frequency side of the first band elimination frequency characteristics is referred to as fCL1, a cutoff frequency on a low frequency side of the second band elimination frequency characteristics is referred to as fCL2, a cutoff frequency on a high frequency side of the first band elimination frequency characteristics is referred to as fCH1, and a cutoff frequency on a high frequency side of the second band elimination frequency characteristics is referred to as fCH2, a relationship of fCL1<fd1<fCH1 is satisfied and a relationship of fCL2<fd2<fcH2 is satisfied.

### Claim 2 (depends on 1)

The physical quantity detection system according to claim 1, wherein a relationship of fCL1<fd1<3×fd1<fCH1 is satisfied and a relationship of fCL2 < fd2<3×fd2<fCH2 is satisfied.

### Claim 3 (depends on 1)

The physical quantity detection system according to claim 1, wherein a relationship of fCL1<fd1<3×fd1<5×fd1<7×fd1<fCH1 is satisfied and a relationship of fCL2<fd2<3×fd2<5×fd2 <7×fd2<fCH2 is satisfied.

### Claim 4 (depends on 1)

The physical quantity detection system according to claim 1,
wherein the first drive circuit and the second drive circuit drive the first physical quantity transducer and the second physical quantity transducer using drive signals of a rectangular wave.

### Claim 5 (depends on 1)

The physical quantity detection system according to claim 1,
wherein, in a case where an upper side frequency of a detection frequency band of the first physical quantity information and the second physical quantity information is referred to as fg, a relationship of |fd1−fd2|<fg is satisfied.

### Claim 6 (depends on 1)

The physical quantity detection system according to claim 1, further comprising:
a third power supply line which applies the power supply voltage to the first power supply line and the second power supply line; and
a third decoupling circuit which is connected to a path of the third power supply line.

### Claim 7 (depends on 1)

The physical quantity detection system according to claim 1,
wherein the first decoupling circuit includes a first capacitor, and a second capacitor having a capacitance value different from a capacitance value of the first capacitor,
wherein the second decoupling circuit includes a third capacitor, and a fourth capacitor having a capacitance value different from a capacitance value of the third capacitor,
wherein the first capacitor and the second capacitor are provided between the first power supply line which supplies the power supply voltage on a high potential side and a power supply node on a low potential side, and
wherein the third capacitor and the fourth capacitor are provided between the second power supply line which supplies the power supply voltage on the high potential side and a power supply node on the low potential side.

### Claim 8 (depends on 1)

The physical quantity detection system according to claim 1,
wherein the first decoupling circuit includes a first inductor, a first capacitor, and a second capacitor having a capacitance value different from a capacitance value of the first capacitor,
wherein the second decoupling circuit includes a second inductor, a third capacitor, and a fourth capacitor having a capacitance value different from a capacitance value of the third capacitor,
wherein the first capacitor and the second capacitor are provided between a first power supplying node which supplies the power supply voltage to the first physical quantity sensor and a power supply node on a low potential side,
wherein the first inductor is provided between the first power supply line and the first power supplying node,
wherein the third capacitor and the fourth capacitor are provided between a second power supplying node which supplies the power supply voltage to the second physical quantity sensor and a power supply node on the low potential side, and
wherein the second inductor is provided between the second power supply line and the second power supplying node.

### Claim 9 (depends on 1)

The physical quantity detection system according to claim 1,
wherein the first decoupling circuit includes a first inductor, a second inductor, a first capacitor, and a second capacitor having a capacitance value different from a capacitance value of the first capacitor,
wherein the second decoupling circuit includes a third inductor, a fourth inductor, a third capacitor, and a fourth capacitor having a capacitance value different from a capacitance value of the third capacitor,
wherein the first capacitor and the second capacitor are provided between a first node and a power supply node on a low potential side,
wherein the first inductor is provided between the first power supply line and the first node,
wherein the second inductor is provided between the first node and a first power supplying node which supplies the power supply voltage to the first physical quantity sensor,
wherein the third capacitor and the fourth capacitor are provided between a second node and a power supply node on the low potential side,
wherein the third inductor is provided between the second power supply line and the second node, and
wherein the fourth inductor is provided between the second node and a second power supplying node which supplies the power supply voltage to the second physical quantity sensor.

### Claim 10 (depends on 1)

The physical quantity detection system according to claim 1, wherein the first physical quantity information and the second physical quantity information is angular rate information.

### Claim 11

A physical quantity detection system comprising:
a first physical quantity sensor that includes a first physical quantity transducer, a first drive circuit which drives the first physical quantity transducer, and a first detection circuit which outputs first physical quantity information corresponding to a first physical quantity, based on a first detection signal which is outputted from the first physical quantity transducer;
a second physical quantity sensor that includes a second physical quantity transducer, a second drive circuit which drives the second physical quantity transducer, and a second detection circuit which outputs second physical quantity information corresponding to a second physical quantity, based on a second detection signal which is outputted from the second physical quantity transducer;
a first power supply line to which a power supply voltage that is supplied to the first physical quantity sensor from a common power supply of the first physical quantity sensor and the second physical quantity sensor is applied;
a second power supply line to which the power supply voltage that is supplied to the second physical quantity sensor from the power supply is applied;
a third power supply line which applies the power supply voltage to the first power supply line and the second power supply line;
a first decoupling circuit which is connected to a path of the first power supply line;
a second decoupling circuit which is connected to a path of the second power supply line; and
a third decoupling circuit which is connected to a path of the third power supply line.

### Claim 12 (depends on 1)

An electronic apparatus comprising:
the physical quantity detection system according to claim 1.

### Claim 13 (depends on 2)

An electronic apparatus comprising:
the physical quantity detection system according to claim 2.

### Claim 14 (depends on 3)

An electronic apparatus comprising:
the physical quantity detection system according to claim 3.

### Claim 15 (depends on 4)

An electronic apparatus comprising:
the physical quantity detection system according to claim 4.

### Claim 16 (depends on 5)

An electronic apparatus comprising:
the physical quantity detection system according to claim 5.

### Claim 17 (depends on 1)

A moving object comprising:
the physical quantity detection system according to claim 1.

### Claim 18 (depends on 2)

A moving object comprising
the physical quantity detection system according to claim 2.

### Claim 19 (depends on 3)

A moving object comprising:
the physical quantity detection system according to claim 3.

### Claim 20 (depends on 4)

A moving object comprising:
the physical quantity detection system according to claim 4.