# US 10,309,761 B2 · Angle sensor system

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- Number: US 10,309,761 B2
- Document ID: US10309761B2
- Status: Granted
- Kind: B2
- Application number: 15/883,226
- Filed: 2018-01-30
- Published: 2018-09-27
- Granted: 2019-06-04
- Earliest claimed: 2017-03-24
- Assignees: TDK Corporation
- Applicants: TDK Corporation
- Inventors: Keisuke Uchida; Hiraku Hirabayashi
- Web page: https://patentgrep.com/patent/US10309761B2

## CPC

- G01B 7/30: for measuring angles or tapers; for testing the alignment of axes
- G01D 5/145: {influenced by the relative movement between the Hall device and magnetic fields (see G01R33/06)}
- G01D 5/16: by varying resistance
- G01D 3/02: with provision for altering or correcting the law of variation
- G01D 5/24476: {Signal processing (G01D5/2448 - G01D5/24495 take precedence)}
- G01B: MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01D: MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR

## Abstract

An angle sensor system includes a magnetic field generation unit for generating a rotating magnetic field, and an angle sensor for detecting the rotating magnetic field to generate a detected angle value. The rotating magnetic field contains first and second magnetic field components orthogonal to each other. Each of the first and second magnetic field components contains an ideal magnetic field component and an error magnetic field component. The error magnetic field component causes an angular error that varies with ½ the predetermined period. The angle sensor includes first and second detection signal generation units. Each of the first and second detection signal generation units includes a magnetic layer whose magnetization direction varies according to the direction of the rotating magnetic field. The magnetic layer is provided with a magnetic anisotropy that is set to reduce the angular error resulting from the error magnetic field component.

## Claims

### Claim 1

An angle sensor system comprising;
a magnetic field generation unit for generating a rotating magnetic field whose direction at a predetermined detection position varies according to an angle to be detected; and
an angle sensor for detecting the rotating magnetic field at the detection position and generating a detected angle *value having a correspondence with the angle to be detected, wherein
the rotating magnetic field at the detection position contains a first magnetic field component in a first direction, and a second magnetic field component in a second direction orthogonal to the first direction,
the angle sensor includes:
a first detection signal generation unit for generating a first detection signal having a correspondence with the cosine of an angle that the direction of the rotating magnetic field at the detection position forms with respect to the first direction;
a second detection signal generation unit for generating a second detection signal having a correspondence with the sine of the angle that the direction of the rotating magnetic field at the detection position forms with respect to the first direction; and
an angle detection unit for generating the detected angle value on the basis of the first and second detection signals,
the first detection signal generation unit includes at least one first magnetic detection element,
the at least one first magnetic detection element includes a first magnetic layer whose magnetization direction varies according to the direction of the rotating magnetic field at the detection position,
the first magnetic layer is provided with a first magnetic anisotropy,
the second detection signal generation unit includes at least one second magnetic detection element,
the at least one second magnetic detection element includes a second magnetic layer whose magnetization direction varies according to the direction of the rotating magnetic field at the detection position,
the second magnetic layer is provided with a second magnetic anisotropy,
when the angle to be detected varies with a predetermined period, each of the first and second magnetic field components contains an ideal magnetic field component and an error magnetic field component, the ideal magnetic field component varying periodically in such a manner as to trace an ideal sinusoidal curve,
the error magnetic field component causes an error that varies with ½ the predetermined period in the detected angle value,
assuming that each of the first and second magnetic field components consists only of the ideal magnetic field component when the angle to be detected varies with the predetermined period, each of the first and second detection signals contains an ideal signal component and an error signal component, the ideal signal component varying periodically in such a manner as to trace an ideal sinusoidal curve,
the error signal component results from the first and second magnetic anisotropies, and causes an error that varies with ½ the predetermined period in the detected angle value, and
the first and second magnetic anisotropies are set to allow the detected angle value to contain a reduced error that varies with ½ the predetermined period, as compared with both of the error that the error magnetic field component causes in the detected angle value and the error that the error signal component causes in the detected angle value.

### Claim 2 (depends on 1)

The angle sensor system according to claim 1, wherein the error that the error magnetic field component causes in the detected angle value and the error that the error signal component causes in the detected angle value have a phase difference of 90°.

### Claim 3 (depends on 1)

The angle sensor system according to claim 1, wherein both of the first and second magnetic anisotropies are shape magnetic anisotropies.

### Claim 4 (depends on 1)

The angle sensor system according to claim 1, wherein an easy axis direction established by the first magnetic anisotropy and an easy axis direction established by the second magnetic anisotropy are the same.

### Claim 5 (depends on 1)

The angle sensor system according to claim 1, wherein the at least one first magnetic detection element and the at least one second magnetic detection element each include at least one magnetoresistance element.

### Claim 6 (depends on 1)

The angle sensor system according to claim 1, wherein
the magnetic field generation unit is a magnet that is rotatable about a central axis,
the detection position is located off the central axis, and
the angle to be detected corresponds to a rotational position of the magnet.

### Claim 7 (depends on 1)

The angle sensor system according to claim 1, wherein
the magnetic field generation unit is a magnet including a plurality of pairs of N and S poles arranged alternately in the first direction,
a relative position of the magnet with respect to the detection position is variable in the first direction, and
the angle to be detected is an angle that represents the relative position of the magnet with respect to the detection position with one pitch of the magnet as 360°.